[Scan]
initial_time=2016-01-18T20:21:14
final_time=2016-01-18T20:21:33
ip_count=19
run=1024
dataset=6
scan=464
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09673E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.36233E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.94961E-9
ql3_vset=
ql3_vmon=-9.13217E0
ql3_imon=1.24788E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=-4.5526E-11
mult1=-9.77126E-9
mult2=-2.78009E-9
rf_tmon=-4.946E-3
rf_agc=3.32324E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.6775E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19406E1
lens5a_imon=2.01341E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04785E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=2.82593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04587E1
cs_ea1_imon=2.53371E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37551E0
lens1_imon=2.60697E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0356E1
cs_ea2_imon=1.48675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.93549E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.33185E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.24877E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.34682E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=1.20253E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.9827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.34679E-8
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26189E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.55612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.05954E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.78052E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.14295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48039E0
os_ea2_imon=-8.15641E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.13507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.42274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.25758E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7324E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.07599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.81217E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.52566E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.46492E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21657E0
defgridb_imon=5.95171E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.43417E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08873E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65677E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.96323E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63645E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67354E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85107E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99257E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22634E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.25655E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.17013E-1	-7.98059E-1	-9.13203E0	-9.14268E0	4.14848E-3	9.52244E-2	2.73207E1	-3.26657E1	-3.2626E1	2.68737E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.02253E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17132E-1	-7.98392E-1	-9.13184E0	-9.14278E0	4.48227E-3	9.48429E-2	2.73363E1	-3.26523E1	-3.26021E1	2.6852E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00942E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.1687E-1	-7.98249E-1	-9.13196E0	-9.1429E0	4.33922E-3	9.48191E-2	2.73027E1	-3.26579E1	-3.26136E1	2.6831E1	1.19978E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.0201E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16798E-1	-7.98249E-1	-9.13203E0	-9.14288E0	4.3869E-3	9.53436E-2	2.73291E1	-3.26518E1	-3.26242E1	2.68244E1	1.1979E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16846E-1	-7.98178E-1	-9.13217E0	-9.14254E0	4.3869E-3	9.50575E-2	2.73201E1	-3.26512E1	-3.26128E1	2.68454E1	1.19965E-7	2.52757E-3	2.52757E-3	6.32386E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1687E-1	-7.97892E-1	-9.13227E0	-9.14259E0	4.3869E-3	9.5439E-2	2.73028E1	-3.26608E1	-3.26382E1	2.6843E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17108E-1	-7.98082E-1	-9.13231E0	-9.14285E0	4.1008E-3	9.50575E-2	2.73486E1	-3.26652E1	-3.25862E1	2.68256E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16965E-1	-7.98202E-1	-9.13234E0	-9.14266E0	4.24385E-3	9.50336E-2	2.72974E1	-3.26449E1	-3.26437E1	2.68424E1	1.20174E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16631E-1	-7.9782E-1	-9.13222E0	-9.14297E0	4.26769E-3	9.50813E-2	2.73167E1	-3.26578E1	-3.26076E1	2.6822E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16822E-1	-7.97987E-1	-9.13208E0	-9.14285E0	3.88622E-3	9.5129E-2	2.72901E1	-3.26603E1	-3.26266E1	2.68569E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16989E-1	-7.97892E-1	-9.13217E0	-9.14254E0	3.93391E-3	9.53674E-2	2.73183E1	-3.26543E1	-3.26374E1	2.6834E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16822E-1	-7.98178E-1	-9.13222E0	-9.14278E0	4.26769E-3	9.51529E-2	2.7334E1	-3.26437E1	-3.2606E1	2.68436E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.1687E-1	-7.97939E-1	-9.13212E0	-9.14285E0	4.24385E-3	9.50575E-2	2.73345E1	-3.26885E1	-3.262E1	2.68364E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.17299E-1	-7.98178E-1	-9.13215E0	-9.1429E0	4.43459E-3	9.51052E-2	2.73411E1	-3.26747E1	-3.26248E1	2.68534E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.17156E-1	-7.97963E-1	-9.1321E0	-9.14252E0	4.43459E-3	9.49383E-2	2.73177E1	-3.26837E1	-3.2647E1	2.6804E1	1.19965E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01871E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16917E-1	-7.98321E-1	-9.13212E0	-9.14249E0	4.64916E-3	9.49383E-2	2.73445E1	-3.26666E1	-3.25999E1	2.68677E1	1.19705E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02659E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1718E-1	-7.98249E-1	-9.13215E0	-9.14268E0	4.60148E-3	9.4986E-2	2.73087E1	-3.26645E1	-3.25803E1	2.68394E1	1.198E-7	2.50989E-3	2.50989E-3	6.3074E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16703E-1	-7.9813E-1	-9.13212E0	-9.14273E0	4.57764E-3	9.49383E-2	2.73216E1	-3.26655E1	-3.25729E1	2.68679E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00453E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16512E-1	-7.97939E-1	-9.13217E0	-9.14292E0	4.60148E-3	9.46999E-2	2.73134E1	-3.26408E1	-3.2577E1	2.68198E1	1.19902E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09673E0	-8.16894E-1	-7.98082E-1	-9.13217E0	-9.14307E0	4.48227E-3	9.49144E-2	2.7324E1	-3.26425E1	-3.26189E1	2.68148E1	1.19749E-7	2.51739E-3	2.51739E-3	6.35059E-3	3.00453E-1