[Scan]
initial_time=2016-01-18T20:21:40
final_time=2016-01-18T20:22:00
ip_count=19
run=1024
dataset=6
scan=465
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.36341E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.96441E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=8.99434E-11
ql4_vset=
ql4_vmon=-9.14266E0
ql4_imon=-7.20024E-11
mult1=-9.71631E-9
mult2=-2.65074E-9
rf_tmon=-4.84288E-3
rf_agc=3.3622E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.68782E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=2.01978E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.82304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=2.52486E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64338E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.49453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.94738E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.33476E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.24445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.36629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.18767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.97802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.33965E-8
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25743E1
iondef3_imon=1.51719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=4.11261E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29929E0
ionrepsh_imon=1.77132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34153E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.11028E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52109E0
os_ea2_imon=-8.01483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7266E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.0251E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.83443E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15597E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47572E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-7.20213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92567E3
multa_neg_imon=7.67186E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.49324E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42072E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06915E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65672E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.96089E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63201E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67197E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69912E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94575E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-1.93316E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22754E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30469E-3
inlet_lpb_pmon=2.99475E-1
chamber_ion_pmon=1.20088E-7
chamber_cvt_pmon=2.51701E-3
foreline_cvt_pmon=2.51701E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.58691E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16512E-1	-7.98249E-1	-9.13239E0	-9.14278E0	4.43459E-3	9.52482E-2	2.73246E1	-3.26537E1	-3.2626E1	2.68377E1	1.20017E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02396E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16345E-1	-7.98321E-1	-9.13196E0	-9.14268E0	4.17233E-3	9.52244E-2	2.73137E1	-3.26982E1	-3.26278E1	2.68575E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16441E-1	-7.97892E-1	-9.1321E0	-9.14285E0	4.62532E-3	9.52721E-2	2.73462E1	-3.26816E1	-3.26382E1	2.68448E1	1.20907E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16607E-1	-7.98202E-1	-9.1321E0	-9.14285E0	4.45843E-3	9.50575E-2	2.73185E1	-3.2654E1	-3.26506E1	2.67814E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17013E-1	-7.97915E-1	-9.13217E0	-9.14273E0	4.36306E-3	9.4986E-2	2.72952E1	-3.26677E1	-3.26498E1	2.68627E1	1.20099E-7	2.51023E-3	2.51023E-3	6.33253E-3	3.00771E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17251E-1	-7.98106E-1	-9.13217E0	-9.14307E0	4.14848E-3	9.52721E-2	2.73157E1	-3.26555E1	-3.2603E1	2.68791E1	1.20841E-7	2.51468E-3	2.51468E-3	6.33767E-3	3.00312E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1706E-1	-7.97892E-1	-9.13205E0	-9.14319E0	4.43459E-3	9.51052E-2	2.73346E1	-3.26455E1	-3.26514E1	2.68105E1	1.20671E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16941E-1	-7.98082E-1	-9.13215E0	-9.14319E0	4.31538E-3	9.51529E-2	2.73111E1	-3.26735E1	-3.26224E1	2.68352E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16727E-1	-7.98082E-1	-9.13231E0	-9.14259E0	4.24385E-3	9.53674E-2	2.73352E1	-3.26614E1	-3.25971E1	2.68689E1	1.19902E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16846E-1	-7.98368E-1	-9.13198E0	-9.14302E0	4.22001E-3	9.4986E-2	2.73257E1	-3.2626E1	-3.26714E1	2.68348E1	1.20017E-7	2.51334E-3	2.51334E-3	6.36244E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1687E-1	-7.98368E-1	-9.13236E0	-9.14264E0	4.52995E-3	9.51529E-2	2.73259E1	-3.26615E1	-3.2615E1	2.68809E1	1.19891E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.00852E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16512E-1	-7.98249E-1	-9.13198E0	-9.14249E0	4.52995E-3	9.52721E-2	2.73333E1	-3.26458E1	-3.26554E1	2.68148E1	1.20244E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.01475E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16631E-1	-7.98368E-1	-9.13205E0	-9.14299E0	4.52995E-3	9.5129E-2	2.73358E1	-3.26791E1	-3.26036E1	2.68124E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16584E-1	-7.98512E-1	-9.13229E0	-9.14299E0	4.88758E-3	9.54151E-2	2.73027E1	-3.26795E1	-3.25924E1	2.68346E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99941E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16679E-1	-7.98059E-1	-9.13198E0	-9.14257E0	4.55379E-3	9.53436E-2	2.73452E1	-3.26402E1	-3.26378E1	2.68605E1	1.2138E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16679E-1	-7.98082E-1	-9.13208E0	-9.14283E0	4.52995E-3	9.53436E-2	2.73605E1	-3.26644E1	-3.27027E1	2.68215E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16464E-1	-7.97653E-1	-9.13229E0	-9.14264E0	4.52995E-3	9.5582E-2	2.73765E1	-3.26431E1	-3.26136E1	2.68581E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16441E-1	-7.98035E-1	-9.13193E0	-9.14261E0	4.72069E-3	9.48668E-2	2.73393E1	-3.26993E1	-3.26915E1	2.68376E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1656E-1	-7.97915E-1	-9.13203E0	-9.14245E0	4.64916E-3	9.51052E-2	2.73098E1	-3.26762E1	-3.26372E1	2.6825E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16703E-1	-7.97915E-1	-9.13196E0	-9.14266E0	4.33922E-3	9.54151E-2	2.7266E1	-3.26711E1	-3.25743E1	2.68376E1	1.20088E-7	2.51701E-3	2.51701E-3	6.30469E-3	2.99475E-1