[Scan]
initial_time=2016-01-18T20:22:07
final_time=2016-01-18T20:22:26
ip_count=19
run=1024
dataset=6
scan=466
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08723E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.36362E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.97221E-9
ql3_vset=
ql3_vmon=-9.13215E0
ql3_imon=1.11759E-10
ql4_vset=
ql4_vmon=-9.1428E0
ql4_imon=-5.88059E-11
mult1=-1.00655E-8
mult2=-2.76053E-9
rf_tmon=-4.77679E-3
rf_agc=3.30812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.69494E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68176E0
bslens_imon=2.33227E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.82377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04604E1
cs_ea1_imon=2.53211E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35694E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65083E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.48631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.33257E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.25346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14861E1
os_ea1_imon=2.37565E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63281E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.97117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.34374E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.05027E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=1.78372E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53809E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1143E1
os_restr2_imon=3.42995E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.02727E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.80902E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.63202E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56597E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.80819E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.42389E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.43207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06146E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65726E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.96383E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94924E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.41873E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16631E-1	-7.97892E-1	-9.13188E0	-9.14266E0	4.1008E-3	9.51529E-2	2.73075E1	-3.26478E1	-3.25942E1	2.68563E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16679E-1	-7.97749E-1	-9.1321E0	-9.1428E0	4.3869E-3	9.53674E-2	2.73118E1	-3.26407E1	-3.26205E1	2.68424E1	1.20363E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.16488E-1	-7.97987E-1	-9.13205E0	-9.14216E0	4.45843E-3	9.52244E-2	2.73193E1	-3.26697E1	-3.26531E1	2.68679E1	1.20297E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.01475E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16822E-1	-7.97892E-1	-9.13217E0	-9.14273E0	4.60148E-3	9.50813E-2	2.73428E1	-3.26337E1	-3.2606E1	2.6837E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16703E-1	-7.98225E-1	-9.13205E0	-9.1429E0	4.45843E-3	9.52482E-2	2.73045E1	-3.26626E1	-3.2629E1	2.68418E1	1.20055E-7	2.52599E-3	2.52599E-3	6.28592E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16798E-1	-7.97796E-1	-9.13205E0	-9.14266E0	4.19617E-3	9.50336E-2	2.73237E1	-3.26567E1	-3.26008E1	2.68088E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16894E-1	-7.97915E-1	-9.13231E0	-9.14264E0	3.91006E-3	9.51767E-2	2.73177E1	-3.26627E1	-3.26476E1	2.6852E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17394E-1	-7.97868E-1	-9.13239E0	-9.1428E0	4.26769E-3	9.52005E-2	2.73165E1	-3.26398E1	-3.25713E1	2.68771E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.03027E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17013E-1	-7.97725E-1	-9.1325E0	-9.14257E0	4.36306E-3	9.53197E-2	2.73187E1	-3.2659E1	-3.26136E1	2.68623E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17323E-1	-7.97701E-1	-9.13217E0	-9.14259E0	4.24385E-3	9.52005E-2	2.73171E1	-3.26633E1	-3.26416E1	2.68094E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16941E-1	-7.9751E-1	-9.13205E0	-9.14264E0	4.3869E-3	9.55582E-2	2.73165E1	-3.26687E1	-3.25773E1	2.68334E1	1.19653E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16846E-1	-7.97653E-1	-9.1321E0	-9.14268E0	4.14848E-3	9.51767E-2	2.73303E1	-3.26909E1	-3.26428E1	2.68184E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.1687E-1	-7.9782E-1	-9.13224E0	-9.14276E0	4.07696E-3	9.52482E-2	2.7357E1	-3.26272E1	-3.26195E1	2.684E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.16798E-1	-7.9782E-1	-9.13203E0	-9.14283E0	4.14848E-3	9.53197E-2	2.73117E1	-3.26344E1	-3.26633E1	2.68244E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16965E-1	-7.97796E-1	-9.13203E0	-9.14266E0	4.33922E-3	9.52244E-2	2.73163E1	-3.2649E1	-3.25794E1	2.68424E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.1706E-1	-7.97749E-1	-9.13255E0	-9.14283E0	4.17233E-3	9.52005E-2	2.73454E1	-3.26506E1	-3.26032E1	2.68352E1	1.19965E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16989E-1	-7.97892E-1	-9.13231E0	-9.14259E0	4.1008E-3	9.52482E-2	2.73063E1	-3.26531E1	-3.26638E1	2.68617E1	1.20226E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16798E-1	-7.97987E-1	-9.13227E0	-9.14266E0	4.26769E-3	9.47952E-2	2.73267E1	-3.2653E1	-3.26164E1	2.68364E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9892E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16798E-1	-7.98273E-1	-9.13222E0	-9.14242E0	4.22001E-3	9.4986E-2	2.73177E1	-3.26837E1	-3.25936E1	2.68192E1	1.20363E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16512E-1	-7.97915E-1	-9.13215E0	-9.1428E0	4.3869E-3	9.50813E-2	2.73039E1	-3.265E1	-3.26224E1	2.68556E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1