[Scan]
initial_time=2016-01-18T20:22:34
final_time=2016-01-18T20:22:53
ip_count=19
run=1024
dataset=6
scan=467
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.0873E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.3618E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.94238E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.12522E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-7.33376E-11
mult1=-9.84561E-9
mult2=-2.73198E-9
rf_tmon=-4.47246E-3
rf_agc=3.30974E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.65715E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67674E0
bslens_imon=2.22641E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19367E1
lens5a_imon=1.98123E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54021E1
cs_ef1b_imon=2.821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0465E1
cs_ea1_imon=2.54576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36342E0
lens1_imon=2.58284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64492E1
os_ef1alow_imon=2.97286E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03754E1
cs_ea2_imon=1.49758E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84323E1
cs_ef1a_imon=2.93997E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.32341E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=4.26033E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=2.35987E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63921E1
os_ef1bup_imon=3.0814E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20183E0
cs_ionrep_imon=1.19049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.97642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.34266E-8
tplens_vset=1.4E-1
tplens_vmon=1.64646E0
tplens_imon=-5.09906E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26274E1
iondef3_imon=1.51403E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26552E1
iondef2_imon=1.56585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.04881E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30328E0
ionrepsh_imon=1.78601E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33473E1
lens5b_imon=2.17014E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74707E1
cs_ef2b_imon=3.13129E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5473E0
os_ea2_imon=-7.78602E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.0065E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71331E1
cs_ef2a_imon=3.15706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06347E0
os_ef2alow_imon=-2.59382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16459E-1
os_ef2bup_imon=-5.30745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11361E1
os_restr2_imon=3.43143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.28228E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01865E1
cs_anode2_imon=2.24922E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73422E1
iondef1_imon=1.11674E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68373E1
iondef4_imon=1.10292E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.01543E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.78489E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15253E0
cs_ionaccel_imon=-1.87841E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47319E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.7317E-6
window_vset=0.0E0
window_vmon=2.58247E-1
window_imon=-7.95693E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86294E1
mask2_imon=-6.64123E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=7.42211E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.35281E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.04648E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45642E0
defgridb_imon=6.04299E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.42534E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0743E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65473E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=9.9545E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63062E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66974E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62903E-2
os_fil2_imon=-2.63272E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.06011E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35609E-1
cs_fil2_imon=-2.418E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.30133E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92751E-1
res40_imon=-2.51981E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=422
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.1656E-1	-7.98178E-1	-9.13236E0	-9.14273E0	4.55379E-3	9.52244E-2	2.73039E1	-3.26404E1	-3.26344E1	2.6825E1	1.19962E-7	2.51602E-3	2.51602E-3	6.3074E-3	3.01509E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09271E0	-8.16703E-1	-7.97629E-1	-9.13243E0	-9.14276E0	4.45843E-3	9.52482E-2	2.73185E1	-3.26608E1	-3.26045E1	2.68325E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16321E-1	-7.97939E-1	-9.13193E0	-9.14261E0	4.31538E-3	9.51529E-2	2.73375E1	-3.26285E1	-3.26297E1	2.68244E1	1.20074E-7	2.51498E-3	2.51498E-3	6.29002E-3	3.0057E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16584E-1	-7.98225E-1	-9.132E0	-9.14288E0	4.52995E-3	9.51767E-2	2.73068E1	-3.26704E1	-3.26371E1	2.68374E1	1.201E-7	2.51498E-3	2.51498E-3	6.3245E-3	2.9863E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1656E-1	-7.98178E-1	-9.13239E0	-9.14302E0	4.24385E-3	9.54151E-2	2.72927E1	-3.26779E1	-3.26231E1	2.68364E1	1.20009E-7	2.51536E-3	2.51536E-3	6.33021E-3	2.989E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16464E-1	-7.98345E-1	-9.132E0	-9.14297E0	4.14848E-3	9.54866E-2	2.73399E1	-3.26963E1	-3.26344E1	2.6837E1	1.19851E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16536E-1	-7.98225E-1	-9.132E0	-9.14271E0	4.14848E-3	9.52244E-2	2.73105E1	-3.26909E1	-3.25966E1	2.6852E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16321E-1	-7.97749E-1	-9.13198E0	-9.14288E0	4.07696E-3	9.53674E-2	2.73482E1	-3.26354E1	-3.2659E1	2.6843E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16679E-1	-7.97915E-1	-9.1321E0	-9.14299E0	4.05312E-3	9.53913E-2	2.73339E1	-3.26434E1	-3.26344E1	2.68599E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16894E-1	-7.98225E-1	-9.13246E0	-9.14257E0	4.14848E-3	9.53436E-2	2.73123E1	-3.26885E1	-3.26164E1	2.68007E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16774E-1	-7.97749E-1	-9.13205E0	-9.14264E0	4.07696E-3	9.52482E-2	2.73123E1	-3.26627E1	-3.26873E1	2.68338E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.1656E-1	-7.97701E-1	-9.13227E0	-9.14249E0	4.12464E-3	9.52244E-2	2.73149E1	-3.2675E1	-3.26529E1	2.68376E1	1.19766E-7	2.52362E-3	2.52362E-3	6.34099E-3	3.01742E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16512E-1	-7.97796E-1	-9.13212E0	-9.14304E0	4.07696E-3	9.5582E-2	2.73177E1	-3.26831E1	-3.26663E1	2.6837E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16321E-1	-7.97749E-1	-9.13239E0	-9.14285E0	4.31538E-3	9.53436E-2	2.73234E1	-3.26608E1	-3.26278E1	2.68184E1	1.19965E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.01609E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16631E-1	-7.97534E-1	-9.13227E0	-9.14299E0	4.41074E-3	9.52482E-2	2.7321E1	-3.26472E1	-3.25936E1	2.68476E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16655E-1	-7.97868E-1	-9.13205E0	-9.14278E0	4.22001E-3	9.5129E-2	2.73399E1	-3.26897E1	-3.26178E1	2.68304E1	1.19697E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.00197E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09294E0	-8.16822E-1	-7.97749E-1	-9.13224E0	-9.14228E0	4.19617E-3	9.51767E-2	2.72959E1	-3.26836E1	-3.26578E1	2.68358E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09286E0	-8.16989E-1	-7.97939E-1	-9.13203E0	-9.14271E0	4.33922E-3	9.48429E-2	2.73458E1	-3.26655E1	-3.26219E1	2.68352E1	1.2033E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.16846E-1	-7.97796E-1	-9.13224E0	-9.14247E0	4.33922E-3	9.49383E-2	2.73183E1	-3.26669E1	-3.25924E1	2.68215E1	1.20055E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16798E-1	-7.97963E-1	-9.13208E0	-9.14295E0	4.41074E-3	9.5129E-2	2.73422E1	-3.26552E1	-3.26274E1	2.68373E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01609E-1