[Scan]
initial_time=2016-01-18T20:23:27
final_time=2016-01-18T20:23:47
ip_count=19
run=1024
dataset=6
scan=469
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.36444E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.93253E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=1.07884E-10
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=-5.92589E-11
mult1=-1.01016E-8
mult2=-2.82041E-9
rf_tmon=-4.80683E-3
rf_agc=3.38443E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.66743E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53939E1
cs_ef1b_imon=2.82162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=2.5468E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34896E0
lens1_imon=2.6636E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.49064E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=2.93282E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.32823E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.27288E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=2.36275E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63954E1
os_ef1bup_imon=3.07878E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=2.9714E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.3363E-8
tplens_vset=1.4E-1
tplens_vmon=1.64674E0
tplens_imon=-4.86476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.52568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.02979E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29634E0
ionrepsh_imon=1.74937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.16808E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.12084E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50163E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.15698E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04529E0
os_ef2alow_imon=-2.45295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.22968E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.42422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.28194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24889E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.09754E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.00964E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.78656E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-1.73357E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.80252E-6
window_vset=0.0E0
window_vmon=2.59968E-1
window_imon=-8.54332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.25421E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.59234E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.40995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26677E0
defgridb_imon=6.10744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.42988E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06854E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65595E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.96327E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63466E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67065E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99004E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.66919E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.48201E-1
res40_imon=-2.60933E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16631E-1	-7.97677E-1	-9.13224E0	-9.14285E0	4.33922E-3	9.53674E-2	2.73219E1	-3.26272E1	-3.26458E1	2.68532E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
2.0E0	2.6E1	1.0E0	3.16E2	1.6E2	-2.09433E0	-8.16798E-1	-7.98035E-1	-9.13217E0	-9.14278E0	4.14848E-3	9.50575E-2	2.73321E1	-3.26639E1	-3.25785E1	2.68563E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97704E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16512E-1	-7.98082E-1	-9.13205E0	-9.14268E0	4.33922E-3	9.4986E-2	2.73184E1	-3.26324E1	-3.25878E1	2.68586E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.16679E-1	-7.98154E-1	-9.13229E0	-9.14285E0	4.17233E-3	9.53197E-2	2.73602E1	-3.26891E1	-3.26389E1	2.68321E1	1.19941E-7	2.51603E-3	2.51603E-3	6.2863E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16536E-1	-7.98082E-1	-9.13229E0	-9.14288E0	4.05312E-3	9.5129E-2	2.7349E1	-3.26609E1	-3.26122E1	2.68211E1	1.20137E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.98819E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16464E-1	-7.9844E-1	-9.13208E0	-9.14299E0	4.24385E-3	9.52244E-2	2.73375E1	-3.26561E1	-3.2608E1	2.6849E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.16298E-1	-7.98154E-1	-9.13193E0	-9.14264E0	4.07696E-3	9.49383E-2	2.73225E1	-3.26825E1	-3.26308E1	2.68424E1	1.20017E-7	2.52318E-3	2.52318E-3	6.28006E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-8.1625E-1	-7.98059E-1	-9.13188E0	-9.14302E0	4.41074E-3	9.53674E-2	2.73169E1	-3.26567E1	-3.26632E1	2.68611E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09302E0	-8.16441E-1	-7.97868E-1	-9.13198E0	-9.1428E0	4.36306E-3	9.52721E-2	2.73279E1	-3.26669E1	-3.26458E1	2.6837E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16369E-1	-7.97892E-1	-9.13188E0	-9.14273E0	4.41074E-3	9.53674E-2	2.73339E1	-3.26693E1	-3.2587E1	2.68394E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16393E-1	-7.97915E-1	-9.13203E0	-9.1424E0	4.50611E-3	9.50098E-2	2.73363E1	-3.26933E1	-3.26314E1	2.68575E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.16369E-1	-7.97725E-1	-9.13208E0	-9.14261E0	4.52995E-3	9.52482E-2	2.73195E1	-3.26639E1	-3.26086E1	2.68701E1	1.19705E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16393E-1	-7.97963E-1	-9.13229E0	-9.14247E0	4.24385E-3	9.57251E-2	2.73213E1	-3.26759E1	-3.26146E1	2.68406E1	1.20226E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16679E-1	-7.97963E-1	-9.13239E0	-9.14223E0	4.22001E-3	9.50575E-2	2.73269E1	-3.26585E1	-3.26673E1	2.6834E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.16917E-1	-7.97844E-1	-9.13222E0	-9.14207E0	3.98159E-3	9.53197E-2	2.73009E1	-3.2644E1	-3.25906E1	2.68285E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02253E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16703E-1	-7.97725E-1	-9.13215E0	-9.14237E0	3.95775E-3	9.53913E-2	2.73175E1	-3.2652E1	-3.25924E1	2.68412E1	1.19965E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16774E-1	-7.97892E-1	-9.13212E0	-9.1424E0	4.36306E-3	9.52005E-2	2.73255E1	-3.26711E1	-3.26218E1	2.68322E1	1.20055E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16512E-1	-7.97939E-1	-9.13234E0	-9.1429E0	4.41074E-3	9.54151E-2	2.73511E1	-3.26773E1	-3.26378E1	2.68274E1	1.19913E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-8.16584E-1	-7.97844E-1	-9.13196E0	-9.14259E0	4.43459E-3	9.54151E-2	2.73092E1	-3.2626E1	-3.26478E1	2.68325E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-8.16703E-1	-7.97939E-1	-9.13253E0	-9.14235E0	4.22001E-3	9.52244E-2	2.73435E1	-3.26512E1	-3.26573E1	2.68286E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1