[Scan]
initial_time=2016-01-18T20:24:21
final_time=2016-01-18T20:24:40
ip_count=19
run=1024
dataset=6
scan=471
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.3635E-8
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=1.96676E-9
ql3_vset=
ql3_vmon=-9.13239E0
ql3_imon=7.9155E-11
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=-5.97358E-11
mult1=-9.26292E-9
mult2=-2.7115E-9
rf_tmon=-5.36483E-3
rf_agc=3.28549E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.67142E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62138E0
bslens_imon=2.24949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=2.01837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.82377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.55317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38377E0
lens1_imon=2.60343E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03437E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.33085E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.37266E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21316E0
cs_ionrep_imon=1.17068E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.97477E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.34423E-8
tplens_vset=1.4E-1
tplens_vmon=1.65972E0
tplens_imon=-4.51082E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.56497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.97911E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.06562E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=1.77946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33953E1
lens5b_imon=2.15959E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54115E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.142E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.41806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73222E1
iondef1_imon=1.08998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68575E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.03392E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.81195E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-7.38233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92715E3
multa_neg_imon=6.98876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.60296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50076E3
multb_neg_imon=7.27191E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.43195E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07227E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65483E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.95795E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63141E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67195E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7751E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.05585E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.70801E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22617E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70104E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=226
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16774E-1	-7.98011E-1	-9.13196E0	-9.14247E0	4.57764E-3	9.52482E-2	2.73099E1	-3.25984E1	-3.26326E1	2.68346E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02922E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16822E-1	-7.97939E-1	-9.13198E0	-9.14235E0	4.24385E-3	9.54628E-2	2.7321E1	-3.26499E1	-3.26327E1	2.6822E1	1.20017E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16751E-1	-7.97987E-1	-9.13193E0	-9.14283E0	4.14848E-3	9.4986E-2	2.72993E1	-3.2681E1	-3.26202E1	2.6849E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.99613E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16655E-1	-7.98273E-1	-9.13193E0	-9.1423E0	4.31538E-3	9.53436E-2	2.73195E1	-3.26765E1	-3.26476E1	2.68395E1	1.19841E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16989E-1	-7.98178E-1	-9.13208E0	-9.1429E0	4.3869E-3	9.53197E-2	2.73204E1	-3.26649E1	-3.26248E1	2.68172E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16941E-1	-7.98011E-1	-9.13198E0	-9.14299E0	4.29153E-3	9.53913E-2	2.73424E1	-3.26416E1	-3.26458E1	2.68641E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16917E-1	-7.98082E-1	-9.13231E0	-9.1429E0	4.62532E-3	9.55343E-2	2.73111E1	-3.26729E1	-3.26355E1	2.68229E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16989E-1	-7.97987E-1	-9.13219E0	-9.1428E0	4.57764E-3	9.5439E-2	2.73293E1	-3.26749E1	-3.26265E1	2.68378E1	1.19841E-7	2.5157E-3	2.5157E-3	6.3074E-3	3.00105E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16774E-1	-7.98082E-1	-9.13231E0	-9.14254E0	4.60148E-3	9.53913E-2	2.73387E1	-3.26457E1	-3.26301E1	2.68615E1	1.20279E-7	2.51934E-3	2.51934E-3	6.29907E-3	2.99524E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16846E-1	-7.97915E-1	-9.13231E0	-9.14276E0	4.3869E-3	9.53197E-2	2.73307E1	-3.26741E1	-3.25892E1	2.683E1	1.20192E-7	2.51814E-3	2.51814E-3	6.33919E-3	3.00097E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16798E-1	-7.98011E-1	-9.13217E0	-9.14254E0	4.33922E-3	9.52721E-2	2.73061E1	-3.26537E1	-3.26756E1	2.68492E1	1.20154E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16822E-1	-7.97725E-1	-9.13208E0	-9.14252E0	4.69685E-3	9.53674E-2	2.73616E1	-3.26813E1	-3.26308E1	2.6831E1	1.1995E-7	2.5228E-3	2.5228E-3	6.27268E-3	2.97887E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16798E-1	-7.98059E-1	-9.13224E0	-9.14242E0	4.52995E-3	9.51767E-2	2.73063E1	-3.26714E1	-3.25806E1	2.68064E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16536E-1	-7.97915E-1	-9.13222E0	-9.14295E0	4.14848E-3	9.51529E-2	2.73399E1	-3.26621E1	-3.26819E1	2.68557E1	1.20158E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16512E-1	-7.98059E-1	-9.13229E0	-9.1424E0	4.3869E-3	9.52244E-2	2.7332E1	-3.26878E1	-3.26321E1	2.68282E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.17251E-1	-7.97939E-1	-9.132E0	-9.14249E0	4.26769E-3	9.5129E-2	2.73092E1	-3.27145E1	-3.25859E1	2.68505E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.97704E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16917E-1	-7.97963E-1	-9.1321E0	-9.14249E0	4.00543E-3	9.5439E-2	2.73057E1	-3.26651E1	-3.2608E1	2.68307E1	1.19965E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16822E-1	-7.97915E-1	-9.13248E0	-9.14264E0	4.33922E-3	9.47237E-2	2.7337E1	-3.267E1	-3.26017E1	2.68322E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16798E-1	-7.97868E-1	-9.13224E0	-9.14237E0	4.22001E-3	9.49383E-2	2.73141E1	-3.2641E1	-3.2632E1	2.68358E1	1.19831E-7	2.5199E-3	2.5199E-3	6.34385E-3	2.99506E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16631E-1	-7.97749E-1	-9.13239E0	-9.1424E0	4.14848E-3	9.50575E-2	2.73222E1	-3.26779E1	-3.26331E1	2.68575E1	1.19925E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01209E-1