[Scan]
initial_time=2016-01-18T20:24:47
final_time=2016-01-18T20:25:07
ip_count=19
run=1024
dataset=6
scan=472
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36649E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.95217E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=8.96454E-11
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-7.43985E-11
mult1=-1.00655E-8
mult2=-2.76851E-9
rf_tmon=-5.69605E-3
rf_agc=3.25225E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.6865E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.8216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.54544E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31849E0
lens1_imon=2.54496E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.48883E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.92251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.33137E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.37493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63281E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.97657E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.3362E-8
tplens_vset=1.4E-1
tplens_vmon=1.64624E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.97982E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.04397E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.77434E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52187E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.42995E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.99854E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.80646E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.21904E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92708E3
multa_neg_imon=7.92716E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.43345E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65706E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.96269E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63165E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81003E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.27767E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.87233E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.16798E-1	-7.98082E-1	-9.13255E0	-9.14266E0	4.33922E-3	9.52959E-2	2.73411E1	-3.26789E1	-3.25948E1	2.68175E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.9978E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0934E0	-8.16655E-1	-7.98178E-1	-9.13262E0	-9.14261E0	4.14848E-3	9.50098E-2	2.73357E1	-3.2675E1	-3.26695E1	2.68637E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16584E-1	-7.98273E-1	-9.1325E0	-9.14271E0	4.12464E-3	9.52721E-2	2.72981E1	-3.26625E1	-3.26133E1	2.68418E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00942E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16536E-1	-7.98106E-1	-9.13246E0	-9.14268E0	4.02927E-3	9.5129E-2	2.7349E1	-3.26699E1	-3.25906E1	2.68364E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.1687E-1	-7.98011E-1	-9.13253E0	-9.14254E0	3.91006E-3	9.49144E-2	2.73287E1	-3.26756E1	-3.26178E1	2.68364E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.17037E-1	-7.98035E-1	-9.13253E0	-9.1423E0	4.05312E-3	9.49144E-2	2.73267E1	-3.26795E1	-3.26032E1	2.68226E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16846E-1	-7.98273E-1	-9.13212E0	-9.14259E0	4.36306E-3	9.4986E-2	2.7332E1	-3.26291E1	-3.26095E1	2.68064E1	1.19913E-7	2.52099E-3	2.52099E-3	6.27461E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17108E-1	-7.98035E-1	-9.13219E0	-9.14271E0	4.31538E-3	9.49383E-2	2.73177E1	-3.26554E1	-3.26074E1	2.68538E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16774E-1	-7.98106E-1	-9.13248E0	-9.14292E0	3.95775E-3	9.50098E-2	2.73446E1	-3.26649E1	-3.26089E1	2.68448E1	1.20226E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16727E-1	-7.97606E-1	-9.13239E0	-9.14242E0	4.12464E-3	9.52244E-2	2.73033E1	-3.26284E1	-3.26278E1	2.68442E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16631E-1	-7.97844E-1	-9.13217E0	-9.14254E0	4.12464E-3	9.50575E-2	2.73273E1	-3.26506E1	-3.26284E1	2.68214E1	1.2054E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16679E-1	-7.97606E-1	-9.13196E0	-9.14252E0	4.17233E-3	9.49621E-2	2.7346E1	-3.26687E1	-3.26573E1	2.68707E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.17084E-1	-7.98106E-1	-9.1321E0	-9.14247E0	4.36306E-3	9.48191E-2	2.73249E1	-3.26362E1	-3.26567E1	2.68424E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.17108E-1	-7.98059E-1	-9.13224E0	-9.14259E0	4.31538E-3	9.49144E-2	2.73399E1	-3.26873E1	-3.25984E1	2.68286E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.16536E-1	-7.98035E-1	-9.13203E0	-9.14261E0	4.36306E-3	9.49621E-2	2.73201E1	-3.26861E1	-3.26332E1	2.68725E1	1.20174E-7	2.52647E-3	2.52647E-3	6.28552E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.16846E-1	-7.97772E-1	-9.13184E0	-9.14264E0	4.36306E-3	9.52482E-2	2.73576E1	-3.26673E1	-3.26331E1	2.68389E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00824E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16941E-1	-7.97987E-1	-9.13215E0	-9.14233E0	4.24385E-3	9.53436E-2	2.73009E1	-3.26669E1	-3.26164E1	2.6846E1	1.20414E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16751E-1	-7.97796E-1	-9.13212E0	-9.14247E0	4.43459E-3	9.50813E-2	2.73375E1	-3.26469E1	-3.26637E1	2.68725E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99175E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16679E-1	-7.98178E-1	-9.13184E0	-9.14271E0	4.45843E-3	9.49383E-2	2.73104E1	-3.26744E1	-3.26065E1	2.68496E1	1.20055E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16631E-1	-7.9813E-1	-9.13193E0	-9.14288E0	4.22001E-3	9.51529E-2	2.73357E1	-3.26717E1	-3.26536E1	2.68388E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1