[Scan]
initial_time=2016-01-18T20:25:14
final_time=2016-01-18T20:25:38
ip_count=19
run=1024
dataset=6
scan=473
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37088E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.90413E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=1.42741E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-6.56366E-11
mult1=-9.68851E-9
mult2=-2.69582E-9
rf_tmon=-4.56257E-3
rf_agc=3.29965E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.69173E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67324E0
bslens_imon=2.35738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19463E1
lens5a_imon=1.99852E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=2.82301E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02288E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0442E1
cs_ea1_imon=2.51821E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3517E0
lens1_imon=2.50338E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04032E1
cs_ea2_imon=1.50386E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84649E1
cs_ef1a_imon=2.93074E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.32942E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.26836E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.36665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63213E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.20038E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93531E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.97939E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.33907E-8
tplens_vset=1.4E-1
tplens_vmon=1.66519E0
tplens_imon=-3.78397E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.4969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27104E1
iondef2_imon=1.54522E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98068E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.03124E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30192E0
ionrepsh_imon=1.77743E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.15808E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12779E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51455E0
os_ea2_imon=-7.50351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.16045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05282E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=3.41797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.27147E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01612E1
cs_anode2_imon=2.25237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09888E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68441E1
iondef4_imon=1.09198E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.04271E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.79902E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1313E0
cs_ionaccel_imon=-1.78918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.77125E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-8.71708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86136E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92687E3
multa_neg_imon=7.04678E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.51492E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.83588E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3891E0
defgridb_imon=6.12211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.43741E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06744E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65674E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30936E1
cs_fil1_imon=9.95684E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63582E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67368E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7301E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93368E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.15948E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.97704E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62885E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16798E-1	-7.98059E-1	-9.13231E0	-9.1423E0	4.24385E-3	9.49383E-2	2.73387E1	-3.26807E1	-3.26512E1	2.68418E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.0071E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16822E-1	-7.98202E-1	-9.13243E0	-9.14254E0	3.98159E-3	9.5439E-2	2.73394E1	-3.26578E1	-3.26505E1	2.68532E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16655E-1	-7.98202E-1	-9.13234E0	-9.14285E0	4.17233E-3	9.53913E-2	2.73555E1	-3.26886E1	-3.2615E1	2.68214E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01085E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16798E-1	-7.98249E-1	-9.13219E0	-9.14261E0	4.26769E-3	9.51767E-2	2.73417E1	-3.26837E1	-3.26326E1	2.68765E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.17108E-1	-7.98297E-1	-9.13222E0	-9.14228E0	4.26769E-3	9.49144E-2	2.73171E1	-3.2638E1	-3.26476E1	2.68202E1	1.19953E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.17013E-1	-7.9782E-1	-9.13227E0	-9.1423E0	4.14848E-3	9.4986E-2	2.72889E1	-3.26735E1	-3.2617E1	2.68406E1	1.20084E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.17084E-1	-7.97939E-1	-9.13217E0	-9.14264E0	4.26769E-3	9.49144E-2	2.73246E1	-3.26449E1	-3.26113E1	2.68418E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16727E-1	-7.97701E-1	-9.13208E0	-9.1423E0	4.22001E-3	9.52005E-2	2.73193E1	-3.26396E1	-3.26136E1	2.6813E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16774E-1	-7.97868E-1	-9.13224E0	-9.1423E0	4.05312E-3	9.52482E-2	2.73342E1	-3.26305E1	-3.2598E1	2.68439E1	1.20311E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16512E-1	-7.97844E-1	-9.13229E0	-9.1428E0	3.93391E-3	9.51767E-2	2.73521E1	-3.26783E1	-3.26201E1	2.68555E1	1.20016E-7	2.51345E-3	2.51345E-3	6.31251E-3	2.98696E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16679E-1	-7.97987E-1	-9.13217E0	-9.14254E0	4.31538E-3	9.53436E-2	2.72933E1	-3.26472E1	-3.26284E1	2.68626E1	1.19851E-7	2.51793E-3	2.51793E-3	6.27788E-3	2.99073E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16655E-1	-7.97892E-1	-9.13231E0	-9.14245E0	4.41074E-3	9.5129E-2	2.73183E1	-3.26645E1	-3.26122E1	2.68484E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16441E-1	-7.9782E-1	-9.13222E0	-9.14261E0	4.45843E-3	9.51767E-2	2.73345E1	-3.26434E1	-3.26092E1	2.68412E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16774E-1	-7.98011E-1	-9.13196E0	-9.14254E0	4.22001E-3	9.52959E-2	2.72868E1	-3.26549E1	-3.2639E1	2.68094E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16846E-1	-7.97844E-1	-9.13191E0	-9.14228E0	4.33922E-3	9.53197E-2	2.72366E1	-3.25894E1	-3.26879E1	2.68358E1	1.20435E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16989E-1	-7.97868E-1	-9.13193E0	-9.1424E0	4.17233E-3	9.51767E-2	2.73369E1	-3.26554E1	-3.25948E1	2.68304E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16703E-1	-7.97963E-1	-9.13241E0	-9.14226E0	4.24385E-3	9.50575E-2	2.73188E1	-3.26277E1	-3.26687E1	2.68311E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16727E-1	-7.98082E-1	-9.13196E0	-9.1424E0	3.86238E-3	9.52482E-2	2.73429E1	-3.26446E1	-3.26044E1	2.68494E1	1.20424E-7	2.51886E-3	2.51886E-3	6.31779E-3	3.0E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16822E-1	-7.97868E-1	-9.13193E0	-9.14211E0	4.29153E-3	9.53197E-2	2.73315E1	-3.26657E1	-3.26362E1	2.68575E1	1.20031E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.99613E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16536E-1	-7.97939E-1	-9.13205E0	-9.14223E0	4.14848E-3	9.50575E-2	2.73057E1	-3.27104E1	-3.2616E1	2.68441E1	1.20174E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.97704E-1