[Scan]
initial_time=2016-01-18T20:25:48
final_time=2016-01-18T20:26:17
ip_count=19
run=1024
dataset=6
scan=474
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09317E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.36592E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=1.95528E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=8.17656E-11
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-6.2871E-11
mult1=-9.56661E-9
mult2=-2.66968E-9
rf_tmon=-3.77585E-3
rf_agc=3.33776E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.68521E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=2.01227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.82701E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02435E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.51697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3263E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.50902E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.33116E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.35871E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19983E0
cs_ionrep_imon=1.19719E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93723E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.97081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.33864E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26045E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26497E1
iondef2_imon=1.55336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.9791E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=4.0496E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.78191E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.15178E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50444E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00792E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.41878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.25242E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73314E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6863E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.01572E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.8105E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=6.91777E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2572E0
defgridb_imon=5.83628E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.43958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65772E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.96311E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62234E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78307E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8487E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.05853E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16631E-1	-7.97653E-1	-9.13212E0	-9.14264E0	4.57764E-3	9.48906E-2	2.73207E1	-3.26693E1	-3.26374E1	2.68538E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16751E-1	-7.97987E-1	-9.13205E0	-9.14264E0	4.22001E-3	9.51052E-2	2.73357E1	-3.26855E1	-3.2599E1	2.67902E1	1.20017E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16274E-1	-7.98273E-1	-9.13186E0	-9.14259E0	4.12464E-3	9.50575E-2	2.73081E1	-3.26663E1	-3.26128E1	2.68587E1	1.2033E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16607E-1	-7.97987E-1	-9.13208E0	-9.14247E0	3.98159E-3	9.49144E-2	2.72939E1	-3.26762E1	-3.26201E1	2.68047E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97704E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16298E-1	-7.98249E-1	-9.13231E0	-9.14261E0	4.31538E-3	9.4986E-2	2.73294E1	-3.26735E1	-3.26324E1	2.68124E1	1.20092E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.96846E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16417E-1	-7.98082E-1	-9.13177E0	-9.14283E0	4.45843E-3	9.51052E-2	2.72985E1	-3.26849E1	-3.25906E1	2.68563E1	1.20106E-7	2.52492E-3	2.52492E-3	6.29665E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16369E-1	-7.97963E-1	-9.13203E0	-9.14271E0	4.41074E-3	9.53436E-2	2.7352E1	-3.26663E1	-3.26284E1	2.6834E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16846E-1	-7.9813E-1	-9.13215E0	-9.14278E0	4.31538E-3	9.51767E-2	2.72919E1	-3.26278E1	-3.2629E1	2.6846E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16584E-1	-7.9782E-1	-9.13239E0	-9.14288E0	4.72069E-3	9.51767E-2	2.73039E1	-3.26506E1	-3.2644E1	2.68502E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.1656E-1	-7.97939E-1	-9.13231E0	-9.14235E0	4.60148E-3	9.52721E-2	2.73207E1	-3.26861E1	-3.26242E1	2.68864E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16584E-1	-7.98011E-1	-9.13215E0	-9.14288E0	4.31538E-3	9.53674E-2	2.73442E1	-3.26807E1	-3.26176E1	2.6822E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.16798E-1	-7.97963E-1	-9.13236E0	-9.14307E0	4.72069E-3	9.51052E-2	2.73287E1	-3.26826E1	-3.26107E1	2.68172E1	1.20363E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.98665E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.16751E-1	-7.97653E-1	-9.13212E0	-9.1429E0	4.41074E-3	9.50336E-2	2.72865E1	-3.26621E1	-3.26434E1	2.68304E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.16655E-1	-7.97939E-1	-9.13212E0	-9.14268E0	4.19617E-3	9.51052E-2	2.73424E1	-3.26873E1	-3.26579E1	2.68298E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16846E-1	-7.97772E-1	-9.13217E0	-9.1424E0	4.14848E-3	9.53197E-2	2.7391E1	-3.2766E1	-3.26765E1	2.68839E1	1.20004E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.17013E-1	-7.97796E-1	-9.132E0	-9.14247E0	4.45843E-3	9.51529E-2	2.73273E1	-3.26675E1	-3.26506E1	2.68713E1	1.19925E-7	2.52585E-3	2.52585E-3	6.34099E-3	3.02545E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.1687E-1	-7.97629E-1	-9.13205E0	-9.14254E0	4.3869E-3	9.51529E-2	2.7359E1	-3.26842E1	-3.26327E1	2.67914E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.16822E-1	-7.98059E-1	-9.13222E0	-9.14257E0	4.14848E-3	9.52244E-2	2.73912E1	-3.2698E1	-3.26219E1	2.68611E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09279E0	-8.16774E-1	-7.97915E-1	-9.13219E0	-9.14292E0	3.93391E-3	9.50813E-2	2.73279E1	-3.26639E1	-3.26807E1	2.684E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09317E0	-8.16512E-1	-7.98011E-1	-9.13231E0	-9.14257E0	4.31538E-3	9.52959E-2	2.73314E1	-3.26497E1	-3.26045E1	2.6863E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9892E-1