[Scan]
initial_time=2016-01-18T20:26:27
final_time=2016-01-18T20:26:56
ip_count=19
run=1024
dataset=6
scan=475
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.36094E-8
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=1.98523E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=1.11783E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-4.87447E-11
mult1=-9.46389E-9
mult2=-2.7017E-9
rf_tmon=-5.51821E-3
rf_agc=3.19051E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.67352E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.24575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.82701E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.52814E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34072E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03594E1
cs_ea2_imon=1.50253E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.32664E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.25274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.37205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=1.17484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.98126E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.34701E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.56634E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.0288E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=1.79633E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.16007E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49483E0
os_ea2_imon=-8.36484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68659E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.00139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.77935E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.18093E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.4477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.34819E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.43225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.96299E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67157E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94279E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9917E-1
chamber_ion_pmon=1.20154E-7
chamber_cvt_pmon=2.51611E-3
foreline_cvt_pmon=2.51611E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83318E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16584E-1	-7.97868E-1	-9.13212E0	-9.1424E0	4.22001E-3	9.49383E-2	2.73283E1	-3.26735E1	-3.25994E1	2.68453E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03449E-1
2.0E0	4.9E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.16655E-1	-7.97701E-1	-9.1321E0	-9.14233E0	4.07696E-3	9.51052E-2	2.73075E1	-3.26627E1	-3.26542E1	2.68456E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09317E0	-8.16751E-1	-7.9782E-1	-9.13217E0	-9.1424E0	4.14848E-3	9.51767E-2	2.73145E1	-3.26472E1	-3.26349E1	2.68088E1	1.19766E-7	2.51359E-3	2.51359E-3	6.29067E-3	2.98819E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-8.16774E-1	-7.97772E-1	-9.132E0	-9.14223E0	4.43459E-3	9.53197E-2	2.73381E1	-3.26482E1	-3.26476E1	2.67998E1	1.19941E-7	2.51077E-3	2.51077E-3	6.29684E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16607E-1	-7.97987E-1	-9.13196E0	-9.14218E0	4.36306E-3	9.48906E-2	2.72933E1	-3.26608E1	-3.2659E1	2.68146E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16917E-1	-7.98178E-1	-9.13205E0	-9.14228E0	4.55379E-3	9.52959E-2	2.73291E1	-3.26543E1	-3.26218E1	2.68328E1	1.20209E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16798E-1	-7.98059E-1	-9.13196E0	-9.14266E0	4.55379E-3	9.54151E-2	2.73181E1	-3.26472E1	-3.26107E1	2.68713E1	1.2033E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.04241E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16822E-1	-7.98059E-1	-9.132E0	-9.14249E0	4.31538E-3	9.52959E-2	2.73309E1	-3.26705E1	-3.26272E1	2.68286E1	1.20278E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16894E-1	-7.98059E-1	-9.13219E0	-9.14247E0	4.26769E-3	9.53197E-2	2.73351E1	-3.26591E1	-3.25996E1	2.68448E1	1.2033E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16941E-1	-7.9813E-1	-9.13193E0	-9.14271E0	4.26769E-3	9.54151E-2	2.73243E1	-3.26428E1	-3.25882E1	2.68803E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.97963E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.17013E-1	-7.97963E-1	-9.13219E0	-9.14266E0	4.19617E-3	9.50098E-2	2.731E1	-3.26487E1	-3.26425E1	2.68304E1	1.20363E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16798E-1	-7.98082E-1	-9.13198E0	-9.14259E0	4.19617E-3	9.52244E-2	2.73416E1	-3.26822E1	-3.26202E1	2.68346E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99613E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16822E-1	-7.97844E-1	-9.13205E0	-9.14235E0	4.3869E-3	9.52005E-2	2.73645E1	-3.26597E1	-3.26517E1	2.6837E1	1.19953E-7	2.52707E-3	2.52707E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17037E-1	-7.98035E-1	-9.13227E0	-9.14264E0	4.45843E-3	9.4986E-2	2.73182E1	-3.26522E1	-3.26613E1	2.68199E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02133E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16631E-1	-7.98059E-1	-9.13224E0	-9.14273E0	4.43459E-3	9.50813E-2	2.73735E1	-3.27145E1	-3.25818E1	2.68178E1	1.20127E-7	2.51472E-3	2.51472E-3	6.3282E-3	3.02977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16917E-1	-7.98106E-1	-9.13243E0	-9.14249E0	4.55379E-3	9.51052E-2	2.73285E1	-3.26524E1	-3.2596E1	2.67974E1	1.20069E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.03712E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16846E-1	-7.98011E-1	-9.13241E0	-9.14259E0	4.17233E-3	9.52721E-2	2.73153E1	-3.26386E1	-3.26452E1	2.68496E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16679E-1	-7.97963E-1	-9.13231E0	-9.14264E0	4.05312E-3	9.52482E-2	2.73437E1	-3.26624E1	-3.25701E1	2.68267E1	1.19902E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16822E-1	-7.97939E-1	-9.13239E0	-9.14261E0	4.14848E-3	9.50098E-2	2.73204E1	-3.26387E1	-3.26095E1	2.68331E1	1.19979E-7	2.51783E-3	2.51783E-3	6.3126E-3	2.97296E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16989E-1	-7.97844E-1	-9.13222E0	-9.14295E0	4.26769E-3	9.52005E-2	2.73299E1	-3.26714E1	-3.26136E1	2.68659E1	1.20154E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.9917E-1