[Scan]
initial_time=2016-01-18T20:27:46
final_time=2016-01-18T20:28:15
ip_count=19
run=1024
dataset=6
scan=477
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.35507E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.00433E-9
ql3_vset=
ql3_vmon=-9.13255E0
ql3_imon=1.07014E-10
ql4_vset=
ql4_vmon=-9.14259E0
ql4_imon=-5.76019E-11
mult1=-9.45207E-9
mult2=-2.77421E-9
rf_tmon=-5.68928E-3
rf_agc=3.33445E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.70259E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.99147E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.82073E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04593E1
cs_ea1_imon=2.55565E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64806E1
os_ef1alow_imon=2.9704E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.48356E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8435E1
cs_ef1a_imon=2.9382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.32809E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.26901E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=2.37797E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.07195E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21788E0
cs_ionrep_imon=1.18873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.97252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.34227E-8
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-4.47542E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.52179E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27009E1
iondef2_imon=1.55647E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.02631E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31994E0
ionrepsh_imon=1.7607E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.15145E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74625E1
cs_ef2b_imon=3.12822E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50929E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71382E1
cs_ef2a_imon=3.15475E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06547E0
os_ef2alow_imon=-2.48164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11184E-1
os_ef2bup_imon=-5.24869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11306E1
os_restr2_imon=3.41943E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01974E1
cs_anode2_imon=2.24679E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73352E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68575E1
iondef4_imon=1.09786E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.03531E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.78043E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14371E0
cs_ionaccel_imon=-1.80225E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56576E1
einzel_imon=7.69846E-6
window_vset=0.0E0
window_vmon=2.49658E-1
window_imon=-8.68107E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39123E-4
mask2_vset=0.0E0
mask2_vmon=-1.86427E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.69664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.38706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.42756E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65574E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30868E1
cs_fil1_imon=9.9703E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62737E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67072E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7751E-2
os_fil2_imon=-2.75017E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79672E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0027E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.31376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53141E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20466E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61902E-1
res40_imon=-2.42856E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16822E-1	-7.97892E-1	-9.13217E0	-9.14271E0	4.41074E-3	9.49621E-2	2.73555E1	-3.2695E1	-3.26069E1	2.6854E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16512E-1	-7.98082E-1	-9.13241E0	-9.14295E0	4.72069E-3	9.50813E-2	2.731E1	-3.26499E1	-3.26407E1	2.68346E1	1.1993E-7	2.52093E-3	2.52093E-3	6.323E-3	3.00247E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16751E-1	-7.9782E-1	-9.13262E0	-9.1429E0	4.673E-3	9.48429E-2	2.73248E1	-3.26787E1	-3.26011E1	2.68094E1	1.19713E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00144E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.1687E-1	-7.98035E-1	-9.13246E0	-9.1433E0	4.17233E-3	9.47714E-2	2.73267E1	-3.26795E1	-3.2596E1	2.68482E1	1.19851E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.1687E-1	-7.9782E-1	-9.13239E0	-9.14309E0	4.43459E-3	9.45807E-2	2.73617E1	-3.26762E1	-3.26089E1	2.68244E1	1.19953E-7	2.52061E-3	2.52061E-3	6.35601E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16703E-1	-7.97629E-1	-9.13236E0	-9.14273E0	4.60148E-3	9.47952E-2	2.73253E1	-3.26738E1	-3.26009E1	2.68425E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16774E-1	-7.9782E-1	-9.13219E0	-9.14311E0	4.52995E-3	9.49144E-2	2.7337E1	-3.26626E1	-3.26148E1	2.6836E1	1.201E-7	2.51611E-3	2.51611E-3	6.34164E-3	3.00251E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16607E-1	-7.98273E-1	-9.13234E0	-9.14292E0	4.57764E-3	9.48668E-2	2.73171E1	-3.26561E1	-3.2617E1	2.6828E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16417E-1	-7.98225E-1	-9.13196E0	-9.14249E0	4.55379E-3	9.49621E-2	2.73369E1	-3.26879E1	-3.2623E1	2.68238E1	1.20209E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16631E-1	-7.97868E-1	-9.13234E0	-9.14268E0	4.43459E-3	9.4986E-2	2.73664E1	-3.26567E1	-3.26502E1	2.68569E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16631E-1	-7.98202E-1	-9.13229E0	-9.14295E0	4.48227E-3	9.52005E-2	2.72823E1	-3.26867E1	-3.26735E1	2.68041E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16488E-1	-7.98321E-1	-9.13227E0	-9.1428E0	4.45843E-3	9.55105E-2	2.72835E1	-3.26807E1	-3.26362E1	2.68424E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16607E-1	-7.98464E-1	-9.13258E0	-9.14261E0	4.48227E-3	9.50575E-2	2.73009E1	-3.26146E1	-3.26591E1	2.68484E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.97963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16774E-1	-7.98202E-1	-9.13243E0	-9.1429E0	4.95911E-3	9.49144E-2	2.73334E1	-3.26826E1	-3.26343E1	2.68593E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16798E-1	-7.98273E-1	-9.13191E0	-9.14249E0	4.81606E-3	9.52005E-2	2.7288E1	-3.26193E1	-3.26395E1	2.68394E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16751E-1	-7.98464E-1	-9.13198E0	-9.14302E0	4.673E-3	9.49144E-2	2.73287E1	-3.26897E1	-3.25865E1	2.68466E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16417E-1	-7.98392E-1	-9.13224E0	-9.14278E0	4.17233E-3	9.5129E-2	2.73458E1	-3.26573E1	-3.26366E1	2.68364E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16393E-1	-7.98655E-1	-9.13219E0	-9.14266E0	4.50611E-3	9.51052E-2	2.73171E1	-3.26831E1	-3.26308E1	2.68208E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16512E-1	-7.98345E-1	-9.13243E0	-9.14273E0	4.52995E-3	9.51052E-2	2.7321E1	-3.26714E1	-3.26225E1	2.68482E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16703E-1	-7.98297E-1	-9.13255E0	-9.14259E0	4.673E-3	9.49621E-2	2.73352E1	-3.27009E1	-3.25894E1	2.68575E1	1.20466E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00197E-1