[Scan]
initial_time=2016-01-18T20:28:25
final_time=2016-01-18T20:28:54
ip_count=19
run=1024
dataset=6
scan=478
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.36446E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.95359E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.03188E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-4.30346E-11
mult1=-9.60364E-9
mult2=-2.85092E-9
rf_tmon=-5.2656E-3
rf_agc=3.1895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.6636E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62708E0
bslens_imon=2.18807E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19574E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=2.82953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.55554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35153E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65173E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.49244E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.92251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.32419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11652E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14723E1
os_ea1_imon=2.38719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63383E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.17376E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.00108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.34077E-8
tplens_vset=1.4E-1
tplens_vmon=1.66246E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26167E1
iondef3_imon=1.52236E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26724E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.97996E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.02853E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=1.76137E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.17161E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52668E0
os_ea2_imon=-8.65324E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00738E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70927E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.43074E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11424E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2672E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.23524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73265E1
iondef1_imon=1.1323E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68296E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.04718E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.76516E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08629E0
cs_ionaccel_imon=-2.00323E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47806E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-6.94985E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.85876E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.45622E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08134E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65355E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.96414E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67301E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.20832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22724E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83919E-1
res40_imon=-2.28433E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16965E-1	-7.97772E-1	-9.13231E0	-9.14285E0	4.43459E-3	9.53197E-2	2.7352E1	-3.26687E1	-3.2635E1	2.68791E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
2.0E0	3.6E1	2.0E0	3.16E2	1.6E2	-2.09495E0	-8.16846E-1	-7.97868E-1	-9.13241E0	-9.14285E0	4.26769E-3	9.48668E-2	2.73105E1	-3.265E1	-3.26194E1	2.68818E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16798E-1	-7.98106E-1	-9.13236E0	-9.14254E0	4.3869E-3	9.49621E-2	2.73128E1	-3.26467E1	-3.26195E1	2.68076E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16822E-1	-7.98059E-1	-9.13222E0	-9.14261E0	4.69685E-3	9.51052E-2	2.73267E1	-3.26579E1	-3.26302E1	2.68316E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16822E-1	-7.98082E-1	-9.13227E0	-9.14252E0	4.29153E-3	9.49144E-2	2.73309E1	-3.26488E1	-3.26236E1	2.68478E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16703E-1	-7.98082E-1	-9.13222E0	-9.1424E0	4.1008E-3	9.53197E-2	2.73484E1	-3.26609E1	-3.26609E1	2.68719E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3514E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16751E-1	-7.98035E-1	-9.13184E0	-9.14249E0	4.36306E-3	9.49383E-2	2.73269E1	-3.26543E1	-3.26425E1	2.6843E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16679E-1	-7.97892E-1	-9.13234E0	-9.14257E0	4.55379E-3	9.5129E-2	2.73352E1	-3.26526E1	-3.26396E1	2.68929E1	1.198E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1656E-1	-7.97987E-1	-9.13196E0	-9.14259E0	4.76837E-3	9.49383E-2	2.72951E1	-3.26384E1	-3.25924E1	2.68176E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02511E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16917E-1	-7.98297E-1	-9.13205E0	-9.14247E0	4.72069E-3	9.47714E-2	2.73302E1	-3.26566E1	-3.26211E1	2.68394E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16727E-1	-7.98225E-1	-9.13191E0	-9.14295E0	4.673E-3	9.49383E-2	2.73622E1	-3.26933E1	-3.26603E1	2.68286E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.03081E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16536E-1	-7.98035E-1	-9.13188E0	-9.14247E0	4.55379E-3	9.47952E-2	2.73122E1	-3.26555E1	-3.26183E1	2.6837E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16774E-1	-7.97677E-1	-9.13196E0	-9.14271E0	4.57764E-3	9.49383E-2	2.73448E1	-3.26536E1	-3.26717E1	2.68418E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16631E-1	-7.97987E-1	-9.13217E0	-9.14266E0	4.8399E-3	9.48191E-2	2.73393E1	-3.26693E1	-3.25852E1	2.68406E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16607E-1	-7.9813E-1	-9.13222E0	-9.14283E0	4.55379E-3	9.48668E-2	2.73484E1	-3.26524E1	-3.26242E1	2.68544E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16894E-1	-7.9813E-1	-9.13222E0	-9.14271E0	4.74453E-3	9.48906E-2	2.73177E1	-3.26464E1	-3.25858E1	2.68499E1	1.20084E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00942E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16679E-1	-7.97987E-1	-9.13193E0	-9.14278E0	4.48227E-3	9.50336E-2	2.73322E1	-3.26526E1	-3.2616E1	2.6825E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16703E-1	-7.98202E-1	-9.1321E0	-9.1424E0	4.45843E-3	9.48668E-2	2.73075E1	-3.26639E1	-3.26452E1	2.68665E1	1.20435E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16917E-1	-7.98202E-1	-9.13222E0	-9.14245E0	4.673E-3	9.50098E-2	2.73511E1	-3.26732E1	-3.26089E1	2.68372E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16536E-1	-7.98225E-1	-9.13224E0	-9.14264E0	4.60148E-3	9.50336E-2	2.73265E1	-3.26724E1	-3.26167E1	2.68296E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00966E-1