[Scan]
initial_time=2016-01-18T20:29:05
final_time=2016-01-18T20:29:34
ip_count=19
run=1024
dataset=6
scan=479
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.36395E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.93627E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.03021E-10
ql4_vset=
ql4_vmon=-9.14261E0
ql4_imon=-6.1357E-11
mult1=-9.70427E-9
mult2=-2.68268E-9
rf_tmon=-4.63259E-3
rf_agc=3.30812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.67364E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54432E1
cs_ef1b_imon=2.82822E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=2.53751E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34372E0
lens1_imon=2.68556E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.48703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84435E1
cs_ef1a_imon=2.93213E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.3229E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=4.26419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.36952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64203E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21725E0
cs_ionrep_imon=1.19034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01688E1
cs_anode1_imon=2.96306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.33982E-8
tplens_vset=1.4E-1
tplens_vmon=1.70873E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03062E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.03169E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30677E0
ionrepsh_imon=1.79021E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52728E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71443E1
cs_ef2a_imon=3.15733E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02444E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13449E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11222E1
os_restr2_imon=3.41727E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.25237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.01671E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.76427E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.7857E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.95196E-6
window_vset=0.0E0
window_vmon=2.41433E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.77214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.42125E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07468E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65531E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.94161E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67379E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0124E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22627E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01488E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16822E-1	-7.98011E-1	-9.13198E0	-9.14266E0	4.50611E-3	9.50813E-2	2.72968E1	-3.26378E1	-3.26425E1	2.68256E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9952E-1
2.0E0	2.5E1	1.0E0	3.16E2	1.6E2	-2.09565E0	-8.16822E-1	-7.98035E-1	-9.13222E0	-9.14247E0	4.43459E-3	9.52482E-2	2.73265E1	-3.26554E1	-3.2634E1	2.68382E1	1.20069E-7	2.52045E-3	2.52045E-3	6.32936E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16607E-1	-7.97725E-1	-9.13215E0	-9.1429E0	4.17233E-3	9.52244E-2	2.73132E1	-3.26127E1	-3.26312E1	2.68227E1					
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16751E-1	-7.97915E-1	-9.13219E0	-9.14285E0	4.26769E-3	9.51529E-2	2.73045E1	-3.26585E1	-3.26314E1	2.68436E1	1.19841E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.1687E-1	-7.97939E-1	-9.13224E0	-9.14257E0	4.12464E-3	9.49383E-2	2.73405E1	-3.26402E1	-3.2626E1	2.68394E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16822E-1	-7.98035E-1	-9.13208E0	-9.14266E0	4.33922E-3	9.49383E-2	2.73308E1	-3.26719E1	-3.26205E1	2.68106E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16989E-1	-7.98011E-1	-9.13205E0	-9.14259E0	4.64916E-3	9.5439E-2	2.73057E1	-3.26613E1	-3.26215E1	2.68435E1	1.19713E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.17323E-1	-7.98106E-1	-9.13229E0	-9.14278E0	4.69685E-3	9.52244E-2	2.73093E1	-3.26693E1	-3.26404E1	2.68388E1	1.1993E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.00741E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.17132E-1	-7.97629E-1	-9.13193E0	-9.14245E0	4.45843E-3	9.52005E-2	2.73009E1	-3.26735E1	-3.26194E1	2.6837E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.17084E-1	-7.97963E-1	-9.13196E0	-9.1428E0	4.64916E-3	9.50098E-2	2.73328E1	-3.2682E1	-3.25942E1	2.68166E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17132E-1	-7.97844E-1	-9.13215E0	-9.14261E0	4.45843E-3	9.52005E-2	2.73496E1	-3.26825E1	-3.25455E1	2.68435E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17132E-1	-7.98273E-1	-9.13227E0	-9.14257E0	4.60148E-3	9.52005E-2	2.73216E1	-3.26596E1	-3.2636E1	2.68412E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97704E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17084E-1	-7.98154E-1	-9.13241E0	-9.14304E0	4.91142E-3	9.50575E-2	2.72915E1	-3.26938E1	-3.26396E1	2.68184E1	1.19933E-7	2.51593E-3	2.51593E-3	6.33188E-3	2.98445E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16894E-1	-7.98202E-1	-9.13239E0	-9.14299E0	4.76837E-3	9.4986E-2	2.73308E1	-3.26566E1	-3.2634E1	2.68382E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16846E-1	-7.97987E-1	-9.13212E0	-9.14304E0	4.72069E-3	9.4986E-2	2.73393E1	-3.26837E1	-3.2614E1	2.684E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17132E-1	-7.97749E-1	-9.13258E0	-9.1429E0	4.76837E-3	9.49144E-2	2.73213E1	-3.26554E1	-3.2626E1	2.68244E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17251E-1	-7.98225E-1	-9.13231E0	-9.14264E0	4.57764E-3	9.52482E-2	2.73315E1	-3.26476E1	-3.26068E1	2.68466E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17156E-1	-7.98154E-1	-9.13208E0	-9.14273E0	4.3869E-3	9.53197E-2	2.73549E1	-3.26857E1	-3.25715E1	2.68262E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.98792E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16917E-1	-7.98082E-1	-9.13219E0	-9.14259E0	4.76837E-3	9.52005E-2	2.73201E1	-3.26651E1	-3.26056E1	2.68052E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16774E-1	-7.98035E-1	-9.13231E0	-9.14261E0	4.76837E-3	9.50575E-2	2.73159E1	-3.26657E1	-3.2635E1	2.68238E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1