[Scan]
initial_time=2016-01-18T20:29:44
final_time=2016-01-18T20:30:13
ip_count=19
run=1024
dataset=6
scan=480
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=1.36207E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.94222E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=9.46522E-11
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-5.93424E-11
mult1=-9.49958E-9
mult2=-2.71462E-9
rf_tmon=-4.00773E-3
rf_agc=3.39464E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.67388E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19334E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54101E1
cs_ef1b_imon=2.8244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=2.55013E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33711E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97209E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.49893E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.9297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.32796E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.25968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14951E1
os_ea1_imon=2.36411E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64214E1
os_ef1bup_imon=3.08574E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23167E0
cs_ionrep_imon=1.19719E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.96514E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.32392E-8
tplens_vset=1.4E-1
tplens_vmon=1.63002E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.04232E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30737E0
ionrepsh_imon=1.76966E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50685E0
os_ea2_imon=-9.26608E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.17157E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10669E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06498E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.41971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.27837E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.01518E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.78045E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17532E0
cs_ionaccel_imon=-1.77527E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=2.37379E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39015E-4
mask2_vset=0.0E0
mask2_vmon=-1.86471E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.18454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52788E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.41992E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07138E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65432E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.95812E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62685E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67046E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02241E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.18125E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.25216E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.74469E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=226
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16751E-1	-7.97772E-1	-9.13217E0	-9.14268E0	4.48227E-3	9.50575E-2	2.73128E1	-3.27104E1	-3.26272E1	2.68364E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03185E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09309E0	-8.16798E-1	-7.97844E-1	-9.13212E0	-9.14278E0	4.52995E-3	9.47714E-2	2.73069E1	-3.26585E1	-3.26331E1	2.68232E1	1.2026E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09286E0	-8.16894E-1	-7.98273E-1	-9.13224E0	-9.14283E0	4.43459E-3	9.52244E-2	2.72815E1	-3.26679E1	-3.26337E1	2.68146E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09255E0	-8.16894E-1	-7.97749E-1	-9.13234E0	-9.14261E0	4.29153E-3	9.50098E-2	2.73219E1	-3.26837E1	-3.26579E1	2.68352E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.16917E-1	-7.97677E-1	-9.13246E0	-9.14283E0	4.07696E-3	9.52482E-2	2.73155E1	-3.2637E1	-3.26113E1	2.68304E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31563E-3	3.00432E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.17037E-1	-7.9782E-1	-9.13227E0	-9.1428E0	4.43459E-3	9.52244E-2	2.73027E1	-3.26425E1	-3.2593E1	2.6852E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.1706E-1	-7.97677E-1	-9.13215E0	-9.14283E0	4.29153E-3	9.48191E-2	2.73105E1	-3.26603E1	-3.26398E1	2.6849E1	1.198E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17084E-1	-7.97677E-1	-9.13231E0	-9.14259E0	4.48227E-3	9.4986E-2	2.7285E1	-3.2687E1	-3.26003E1	2.68775E1	1.19965E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16751E-1	-7.97868E-1	-9.13212E0	-9.1423E0	4.43459E-3	9.50336E-2	2.73108E1	-3.26502E1	-3.26107E1	2.68757E1	1.20375E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01485E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16679E-1	-7.97772E-1	-9.13196E0	-9.14252E0	4.48227E-3	9.48668E-2	2.7329E1	-3.26468E1	-3.26064E1	2.6816E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.00522E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16751E-1	-7.98249E-1	-9.13208E0	-9.14249E0	4.55379E-3	9.52721E-2	2.73478E1	-3.26044E1	-3.25816E1	2.68479E1	1.19925E-7	2.52697E-3	2.52697E-3	6.3074E-3	2.98819E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16679E-1	-7.97939E-1	-9.13219E0	-9.14226E0	4.673E-3	9.51529E-2	2.73235E1	-3.26667E1	-3.25967E1	2.68257E1	1.19683E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.00741E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1687E-1	-7.97629E-1	-9.13229E0	-9.1424E0	4.62532E-3	9.4986E-2	2.73198E1	-3.26862E1	-3.26319E1	2.68406E1	1.1984E-7	2.52454E-3	2.52454E-3	6.3074E-3	3.00087E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16846E-1	-7.98202E-1	-9.1326E0	-9.14266E0	4.86374E-3	9.48906E-2	2.73273E1	-3.26639E1	-3.26242E1	2.68304E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16965E-1	-7.97987E-1	-9.13248E0	-9.14266E0	4.64916E-3	9.50098E-2	2.73189E1	-3.26741E1	-3.2617E1	2.68285E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17037E-1	-7.97892E-1	-9.13253E0	-9.14285E0	4.55379E-3	9.49144E-2	2.73291E1	-3.26759E1	-3.26062E1	2.68406E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9952E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1718E-1	-7.97772E-1	-9.13222E0	-9.1429E0	4.50611E-3	9.52482E-2	2.73417E1	-3.26807E1	-3.26687E1	2.6834E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16941E-1	-7.9782E-1	-9.13217E0	-9.14283E0	4.72069E-3	9.53674E-2	2.73081E1	-3.26585E1	-3.26392E1	2.68406E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16989E-1	-7.97606E-1	-9.13241E0	-9.14259E0	4.45843E-3	9.5129E-2	2.7337E1	-3.26758E1	-3.26515E1	2.68514E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.17227E-1	-7.97987E-1	-9.13236E0	-9.14283E0	4.41074E-3	9.49383E-2	2.73363E1	-3.26729E1	-3.26494E1	2.68004E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1