[Scan]
initial_time=2016-01-18T20:31:18
final_time=2016-01-18T20:31:47
ip_count=19
run=1024
dataset=7
scan=482
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.76873E-6
ql1_vset=
ql1_vmon=-8.79993E1
ql1_imon=-1.84516E-9
ql2_vset=
ql2_vmon=1.90735E-4
ql2_imon=1.45689E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-5.99889E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.62478E-8
mult1=-2.71752E-8
mult2=-2.7246E-9
rf_tmon=-6.43507E-3
rf_agc=3.0696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=6.78587E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67646E0
bslens_imon=2.43654E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19762E1
lens5a_imon=1.98391E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04986E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=2.8216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.53669E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99125E0
lens1_imon=1.48891E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03427E1
cs_ea2_imon=1.49834E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=2.91819E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.32219E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14994E1
os_ea1_imon=2.38132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63257E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.227E0
cs_ionrep_imon=1.18834E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.9371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.9827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=4.0224E-8
tplens_vset=1.4E-1
tplens_vmon=1.65919E0
tplens_imon=-2.55746E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26747E1
iondef3_imon=1.50642E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.55344E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98078E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=9.38714E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26801E0
ionrepsh_imon=1.76353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33627E1
lens5b_imon=2.18151E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51594E0
os_ea2_imon=-6.70792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.15461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27457E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7364E1
iondef1_imon=1.10717E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68595E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.05487E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.76727E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47569E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-5.86866E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.9864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.47681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.06081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37597E0
defgridb_imon=5.97361E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.44294E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07804E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65479E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.95525E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62576E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6686E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89647E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.04085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22561E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.578E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.976E3	2.0E0	1.47E2	4.1E1	-7.30146E-2	-8.79988E1	9.53674E-5	-8.80016E1	5.24521E-4	4.81606E-3	9.52005E-2	2.73128E1	-3.26567E1	-3.26172E1	2.68058E1	1.20191E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.01209E-1
2.0E0	1.07127E5	1.05E2	3.16E2	1.6E2	-7.30146E-2	-8.79987E1	9.53674E-5	-8.80014E1	5.24521E-4	4.50611E-3	9.52005E-2	2.73159E1	-3.26567E1	-3.26176E1	2.68354E1	1.20209E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.99941E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.7999E1	2.86102E-4	-8.80013E1	8.82149E-4	4.55379E-3	9.52244E-2	2.73234E1	-3.26744E1	-3.26266E1	2.68322E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01347E-1
4.0E0	2.3614E4	1.1E1	6.55E2	3.98E2	-7.22418E-2	-8.79987E1	2.38419E-5	-8.80018E1	5.72205E-4	4.48227E-3	9.52005E-2	2.73222E1	-3.2672E1	-3.2606E1	2.68304E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.79991E1	9.53674E-5	-8.80016E1	7.86781E-4	4.69685E-3	9.48668E-2	2.73247E1	-3.26499E1	-3.26517E1	2.68196E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.7999E1	0.0E0	-8.80017E1	5.96046E-4	4.64916E-3	9.52244E-2	2.7308E1	-3.26962E1	-3.26378E1	2.68394E1	1.19965E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.79994E1	-7.15256E-5	-8.80017E1	7.39098E-4	4.45843E-3	9.51767E-2	2.73291E1	-3.2617E1	-3.26164E1	2.68352E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.79993E1	2.86102E-4	-8.80016E1	6.19888E-4	4.60148E-3	9.56059E-2	2.72992E1	-3.26785E1	-3.25765E1	2.68603E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1
1.2E1	8.9E1	1.0E0	4.85E2	3.23E2	-7.17779E-2	-8.79989E1	2.14577E-4	-8.80018E1	5.48363E-4	4.673E-3	9.54151E-2	2.73155E1	-3.26646E1	-3.26334E1	2.68292E1	1.19493E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0148E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.79989E1	2.38419E-4	-8.80018E1	6.19888E-4	4.48227E-3	9.52721E-2	2.73216E1	-3.26508E1	-3.26225E1	2.68436E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00563E-1
1.4E1	3.479E3	1.0E0	5.66E2	3.82E2	-7.201E-2	-8.79988E1	7.15256E-5	-8.80017E1	4.05312E-4	4.76837E-3	9.47475E-2	2.73327E1	-3.26543E1	-3.25641E1	2.68581E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.79986E1	4.76837E-5	-8.80017E1	5.48363E-4	4.86374E-3	9.48668E-2	2.73363E1	-3.26609E1	-3.26068E1	2.68106E1	1.19705E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02396E-1
1.6E1	3.96E2	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.79989E1	-2.38419E-5	-8.80016E1	7.39098E-4	4.55379E-3	9.54151E-2	2.73333E1	-3.26843E1	-3.26302E1	2.67932E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.7E1	8.04E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.79989E1	2.14577E-4	-8.80015E1	8.34465E-4	4.72069E-3	9.52959E-2	2.73482E1	-3.26938E1	-3.26413E1	2.68743E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.8E1	3.44E3	0.0E0	7.27E2	5.0E2	-7.11597E-2	-8.79987E1	-7.15256E-5	-8.80016E1	6.4373E-4	4.14848E-3	9.50098E-2	2.73351E1	-3.26933E1	-3.26038E1	2.68448E1	1.198E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.00453E-1
1.9E1	1.899E3	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.79992E1	2.14577E-4	-8.80016E1	5.96046E-4	4.14848E-3	9.50336E-2	2.73243E1	-3.26711E1	-3.26332E1	2.68308E1	1.20017E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00563E-1
2.0E1	2.6146E4	1.7E1	8.08E2	5.58E2	-7.30146E-2	-8.79994E1	-7.15256E-5	-8.80014E1	9.29832E-4	4.17233E-3	9.5129E-2	2.73476E1	-3.26832E1	-3.26408E1	2.68316E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
2.1E1	4.2E1	1.0E0	8.49E2	5.88E2	-7.21643E-2	-8.79993E1	7.15256E-5	-8.80015E1	1.43051E-4	4.55379E-3	9.50575E-2	2.73117E1	-3.26488E1	-3.2638E1	2.68208E1	1.19749E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99686E-1
2.2E1	1.888E3	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.79993E1	3.09944E-4	-8.80018E1	5.00679E-4	4.45843E-3	9.49144E-2	2.73098E1	-3.26413E1	-3.26236E1	2.68478E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.79993E1	1.90735E-4	-8.80017E1	6.67572E-4	4.72069E-3	9.50813E-2	2.7364E1	-3.26729E1	-3.26747E1	2.68595E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0071E-1