[Scan]
initial_time=2016-01-18T20:31:57
final_time=2016-01-18T20:32:26
ip_count=19
run=1024
dataset=7
scan=483
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.83484E-6
ql1_vset=
ql1_vmon=-8.79999E1
ql1_imon=-1.50406E-9
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.45311E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-5.01773E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.61413E-8
mult1=-1.52565E-8
mult2=-2.74677E-9
rf_tmon=-4.79853E-3
rf_agc=3.24361E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=6.21879E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=2.00722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.82485E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.53643E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95364E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65257E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.92468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.32127E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14813E1
os_ea1_imon=2.39151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20463E0
cs_ionrep_imon=1.19683E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.98126E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=4.01537E-8
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.51226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.55048E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.64558E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30978E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50685E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.13407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52685E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.42094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28234E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.23992E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.10923E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.06899E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.76559E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47507E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.55089E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.85972E1
mask2_imon=-9.11223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.38784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.576E0
defgridb_imon=6.31574E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.43573E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65268E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.95549E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6293E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79597E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.20059E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.85217E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79714E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.024E3	3.0E0	1.47E2	4.1E1	-7.30146E-2	-8.79994E1	2.14577E-4	-8.80015E1	5.72205E-4	4.673E-3	9.53436E-2	2.73178E1	-3.26637E1	-3.26144E1	2.67972E1	1.20414E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.99175E-1
2.0E0	1.06939E5	9.3E1	3.16E2	1.6E2	-7.22418E-2	-8.79994E1	1.43051E-4	-8.80015E1	6.19888E-4	4.8399E-3	9.51052E-2	2.73369E1	-3.26597E1	-3.26358E1	2.68352E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01738E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.79992E1	1.19209E-4	-8.80017E1	6.91414E-4	4.8399E-3	9.51529E-2	2.73416E1	-3.26782E1	-3.26295E1	2.68454E1	1.19872E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.0041E-1
4.0E0	2.3795E4	1.9E1	6.55E2	3.98E2	-7.27053E-2	-8.79992E1	-2.14577E-4	-8.80016E1	1.14441E-3	4.673E-3	9.50336E-2	2.73478E1	-3.26645E1	-3.2614E1	2.6825E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.79992E1	-4.76837E-5	-8.80016E1	8.58307E-4	4.43459E-3	9.52482E-2	2.73273E1	-3.2638E1	-3.26416E1	2.68419E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.79994E1	-2.86102E-4	-8.80016E1	9.05991E-4	4.00543E-3	9.49144E-2	2.73297E1	-3.2647E1	-3.26146E1	2.68418E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.79994E1	2.38419E-5	-8.80013E1	5.48363E-4	4.12464E-3	9.52482E-2	2.73333E1	-3.26573E1	-3.25972E1	2.6837E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.79994E1	-4.76837E-5	-8.80013E1	8.34465E-4	4.02927E-3	9.51767E-2	2.73339E1	-3.26681E1	-3.26549E1	2.68313E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03449E-1
1.2E1	1.11E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.79992E1	-4.29153E-4	-8.80016E1	6.67572E-4	4.41074E-3	9.52005E-2	2.73207E1	-3.26422E1	-3.26278E1	2.68314E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.04241E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.79992E1	-7.15256E-5	-8.80012E1	8.58307E-4	4.55379E-3	9.52721E-2	2.73484E1	-3.26639E1	-3.26134E1	2.68581E1	1.19809E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
1.4E1	3.412E3	1.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79993E1	-3.8147E-4	-8.80015E1	5.48363E-4	4.14848E-3	9.47475E-2	2.73309E1	-3.2653E1	-3.25924E1	2.68356E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.99E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.79992E1	-1.43051E-4	-8.80013E1	7.62939E-4	4.60148E-3	9.5129E-2	2.73021E1	-3.26687E1	-3.26278E1	2.68629E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97963E-1
1.6E1	4.56E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.79995E1	4.76837E-5	-8.8001E1	5.48363E-4	4.43459E-3	9.49383E-2	2.73357E1	-3.26452E1	-3.26074E1	2.68319E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.7E1	8.46E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.79992E1	-1.90735E-4	-8.8001E1	7.86781E-4	4.57764E-3	9.52721E-2	2.73375E1	-3.2653E1	-3.26356E1	2.6828E1	1.19757E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02922E-1
1.8E1	3.597E3	2.0E0	7.27E2	5.0E2	-7.33239E-2	-8.79995E1	-2.38419E-5	-8.80013E1	7.15256E-4	4.45843E-3	9.4986E-2	2.73267E1	-3.26603E1	-3.26266E1	2.68166E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
1.9E1	1.961E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.79992E1	1.19209E-4	-8.80013E1	6.67572E-4	4.673E-3	9.48906E-2	2.73139E1	-3.26703E1	-3.26278E1	2.6846E1	1.20158E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.98156E-1
2.0E1	2.655E4	1.5E1	8.08E2	5.58E2	-7.29374E-2	-8.79997E1	1.66893E-4	-8.80014E1	6.91414E-4	4.3869E-3	9.49383E-2	2.73069E1	-3.26669E1	-3.26272E1	2.68424E1	1.19913E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.99E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.79998E1	3.57628E-4	-8.80014E1	5.24521E-4	4.62532E-3	9.52959E-2	2.73075E1	-3.26627E1	-3.26278E1	2.68196E1	1.20122E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9926E-1
2.2E1	1.861E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.79998E1	1.66893E-4	-8.80013E1	4.52995E-4	4.43459E-3	9.51052E-2	2.73375E1	-3.26997E1	-3.26307E1	2.68204E1	1.198E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00197E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.79999E1	1.19209E-4	-8.80013E1	3.57628E-4	4.64916E-3	9.52244E-2	2.73364E1	-3.26526E1	-3.2616E1	2.68442E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1