[Scan]
initial_time=2016-01-18T20:32:37
final_time=2016-01-18T20:33:02
ip_count=19
run=1024
dataset=7
scan=484
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.82847E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-1.30634E-9
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.40572E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-4.42456E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.60961E-8
mult1=-1.92163E-8
mult2=-2.81043E-9
rf_tmon=-5.1493E-3
rf_agc=3.31053E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.55015E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68014E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1945E1
lens5a_imon=1.99493E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04972E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.8144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04804E1
cs_ea1_imon=2.54661E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96064E0
lens1_imon=1.34567E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.50238E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=2.93369E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.32381E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15091E1
os_ea1_imon=2.36443E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64368E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18905E0
cs_ionrep_imon=1.18724E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93479E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.95567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=4.00131E-8
tplens_vset=1.4E-1
tplens_vmon=1.6347E0
tplens_imon=-3.98992E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.49908E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.56372E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98214E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=9.27079E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29617E0
ionrepsh_imon=1.77345E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3386E1
lens5b_imon=2.17968E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52329E0
os_ea2_imon=-7.58944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.42274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28386E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.11084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.06638E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.7839E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.72572E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.27017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.46579E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.43178E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44645E0
defgridb_imon=6.09482E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.45393E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.96534E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66826E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73878E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.03691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22566E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.21761E-1
res40_imon=-2.76366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.983E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.79995E1	9.53674E-5	-8.80012E1	3.57628E-4	4.72069E-3	9.47952E-2	2.73352E1	-3.26561E1	-3.26307E1	2.68478E1	1.19872E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00942E-1
2.0E0	1.07088E5	9.5E1	3.16E2	1.6E2	-7.18554E-2	-8.79996E1	1.43051E-4	-8.80017E1	5.96046E-4	4.72069E-3	9.51529E-2	2.73198E1	-3.26554E1	-3.26107E1	2.68313E1	1.20209E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.79995E1	0.0E0	-8.80012E1	7.62939E-4	4.55379E-3	9.51052E-2	2.73321E1	-3.265E1	-3.26302E1	2.68597E1	1.20457E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.0041E-1
4.0E0	2.3325E4	1.0E1	6.55E2	3.98E2	-7.19325E-2	-8.79998E1	1.19209E-4	-8.80013E1	4.76837E-4	4.52995E-3	9.52005E-2	2.73051E1	-3.26826E1	-3.26484E1	2.68466E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.8E1	0.0E0	-8.80014E1	3.57628E-4	4.31538E-3	9.51052E-2	2.73291E1	-3.26693E1	-3.26308E1	2.68214E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.79996E1	-4.76837E-5	-8.80013E1	5.72205E-4	4.33922E-3	9.50813E-2	2.73093E1	-3.26482E1	-3.26308E1	2.68514E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10051E-2	-8.79999E1	-2.38419E-5	-8.80013E1	6.67572E-4	4.69685E-3	9.53197E-2	2.73087E1	-3.26464E1	-3.26032E1	2.6828E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.79998E1	-7.15256E-5	-8.80013E1	4.76837E-4	4.22001E-3	9.52005E-2	2.73161E1	-3.26529E1	-3.26058E1	2.68352E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01995E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.79997E1	0.0E0	-8.80014E1	4.76837E-4	4.26769E-3	9.52721E-2	2.73128E1	-3.26296E1	-3.26083E1	2.68394E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99613E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.79997E1	2.86102E-4	-8.80015E1	5.00679E-4	4.24385E-3	9.52005E-2	2.73393E1	-3.26729E1	-3.26368E1	2.68328E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9874E-1
1.4E1	3.494E3	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79997E1	3.09944E-4	-8.80014E1	5.96046E-4	4.45843E-3	9.53674E-2	2.7373E1	-3.27263E1	-3.26518E1	2.68184E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
1.5E1	8.7E1	1.0E0	6.06E2	4.11E2	-7.26282E-2	-8.79999E1	1.43051E-4	-8.80015E1	4.52995E-4	4.26769E-3	9.52244E-2	2.73305E1	-3.26608E1	-3.26042E1	2.68286E1	1.19766E-7	2.51025E-3	2.51025E-3	6.30182E-3	2.99879E-1
1.6E1	4.69E2	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80003E1	-7.15256E-5	-8.80017E1	5.48363E-4	4.31538E-3	9.51052E-2	2.73375E1	-3.26744E1	-3.25703E1	2.6816E1	1.19646E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
1.7E1	8.09E2	1.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80001E1	-1.43051E-4	-8.80016E1	6.67572E-4	4.60148E-3	9.52482E-2	2.73574E1	-3.26777E1	-3.25996E1	2.68226E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01475E-1
1.8E1	3.487E3	4.0E0	7.27E2	5.0E2	-7.21643E-2	-8.79998E1	-2.86102E-4	-8.80017E1	8.34465E-4	4.33922E-3	9.48429E-2	2.7301E1	-3.2655E1	-3.26654E1	2.68389E1	1.20055E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.02511E-1
1.9E1	2.004E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.79998E1	-1.19209E-4	-8.80017E1	5.48363E-4	4.33922E-3	9.52959E-2	2.73279E1	-3.26368E1	-3.26783E1	2.68316E1	1.20004E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.01995E-1
2.0E1	2.6503E4	1.5E1	8.08E2	5.58E2	-7.18554E-2	-8.79998E1	-2.86102E-4	-8.80013E1	5.00679E-4	4.3869E-3	9.51767E-2	2.73183E1	-3.26681E1	-3.2596E1	2.68388E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
2.1E1	7.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.8E1	-1.43051E-4	-8.80017E1	4.52995E-4	4.86374E-3	9.50098E-2	2.73225E1	-3.2647E1	-3.26549E1	2.68382E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.2E1	1.775E3	2.0E0	8.89E2	6.17E2	-7.19325E-2	-8.79999E1	0.0E0	-8.80018E1	1.00136E-3	4.62532E-3	9.48668E-2	2.73216E1	-3.26797E1	-3.25806E1	2.684E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02922E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.79998E1	-1.19209E-4	-8.80013E1	8.34465E-4	4.43459E-3	9.51052E-2	2.72979E1	-3.26386E1	-3.26248E1	2.68082E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02253E-1