[Scan]
initial_time=2016-01-18T20:34:44
final_time=2016-01-18T20:35:07
ip_count=19
run=1024
dataset=7
scan=488
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.75049E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-1.01074E-9
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.40852E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-3.44986E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.59645E-8
mult1=-2.15522E-8
mult2=-2.63677E-9
rf_tmon=-4.32617E-3
rf_agc=3.30031E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.02927E-3
ql5_imon=5.58984E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.22825E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=2.01093E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04806E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54301E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.0227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04375E1
cs_ea1_imon=2.55565E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99526E0
lens1_imon=1.74335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.95567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84016E1
cs_ef1a_imon=2.92828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.32052E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=2.35638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6405E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.19121E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01533E1
cs_anode1_imon=2.94774E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=4.01977E-8
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.56461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98109E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.29594E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.76707E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74405E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48983E0
os_ea2_imon=-8.54574E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71582E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03894E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28159E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.22947E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72961E1
iondef1_imon=1.11582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.11981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.07416E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.75201E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=8.05544E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82596E2
mask1_imon=2.38915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-4.64331E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.0737E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.0914E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2461E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07407E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65332E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.95909E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66909E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.89422E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.07357E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.26876E-1
res40_imon=-2.76727E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.968E3	3.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80006E1	2.38419E-4	-8.80014E1	5.72205E-4	4.45843E-3	9.51529E-2	2.73081E1	-3.26609E1	-3.26062E1	2.67995E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.04063E-1
2.0E0	1.07571E5	1.02E2	3.16E2	1.6E2	-7.201E-2	-8.80006E1	1.43051E-4	-8.80011E1	5.48363E-4	4.57764E-3	9.5129E-2	2.72818E1	-3.26542E1	-3.26468E1	2.68263E1	1.20004E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.03027E-1
3.0E0	1.0E1	1.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80007E1	-9.53674E-5	-8.80012E1	4.52995E-4	4.24385E-3	9.5439E-2	2.73165E1	-3.26476E1	-3.26545E1	2.68367E1	1.19925E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.00676E-1
4.0E0	2.3291E4	1.1E1	6.55E2	3.98E2	-7.24736E-2	-8.80008E1	-3.8147E-4	-8.80011E1	4.05312E-4	4.55379E-3	9.52005E-2	2.73522E1	-3.26707E1	-3.26487E1	2.68412E1	1.19841E-7	2.51077E-3	2.51077E-3	6.29684E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.8001E1	-3.09944E-4	-8.8001E1	4.76837E-4	4.79221E-3	9.51052E-2	2.73405E1	-3.26554E1	-3.26398E1	2.68208E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80008E1	7.15256E-5	-8.80009E1	2.14577E-4	4.74453E-3	9.49383E-2	2.73435E1	-3.26464E1	-3.26236E1	2.6807E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.8001E1	-9.53674E-5	-8.80009E1	3.33786E-4	4.60148E-3	9.50098E-2	2.73147E1	-3.26603E1	-3.26002E1	2.68226E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80008E1	-3.09944E-4	-8.80013E1	5.00679E-4	4.43459E-3	9.55343E-2	2.73033E1	-3.26711E1	-3.26374E1	2.68827E1	1.20122E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00041E-1
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80009E1	-4.76837E-5	-8.80013E1	4.52995E-4	4.41074E-3	9.52959E-2	2.72883E1	-3.26657E1	-3.26248E1	2.68148E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80008E1	-6.4373E-4	-8.80009E1	2.6226E-4	4.22001E-3	9.51529E-2	2.73231E1	-3.26849E1	-3.2608E1	2.68436E1	1.20069E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.9978E-1
1.4E1	3.529E3	3.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80007E1	-5.00679E-4	-8.8001E1	4.52995E-4	4.33922E-3	9.51529E-2	2.73339E1	-3.27065E1	-3.26326E1	2.68208E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01609E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80009E1	-5.24521E-4	-8.80011E1	6.19888E-4	4.17233E-3	9.50575E-2	2.73243E1	-3.26524E1	-3.2629E1	2.68268E1	1.20226E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.02133E-1
1.6E1	4.55E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80013E1	-4.76837E-4	-8.8001E1	2.86102E-4	4.22001E-3	9.52244E-2	2.73122E1	-3.2662E1	-3.26284E1	2.68267E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.7E1	8.14E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80012E1	-1.66893E-4	-8.80011E1	4.29153E-4	4.00543E-3	9.50575E-2	2.73688E1	-3.26903E1	-3.26164E1	2.68244E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9874E-1
1.8E1	3.493E3	1.0E0	7.27E2	5.0E2	-7.23964E-2	-8.8001E1	-1.66893E-4	-8.80012E1	4.29153E-4	4.33922E-3	9.51767E-2	2.73269E1	-3.26579E1	-3.26301E1	2.68569E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
1.9E1	1.945E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80008E1	-1.90735E-4	-8.80016E1	5.00679E-4	4.33922E-3	9.5129E-2	2.73556E1	-3.27011E1	-3.26482E1	2.68172E1	1.20226E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
2.0E1	2.6499E4	2.0E1	8.08E2	5.58E2	-7.17007E-2	-8.80009E1	1.19209E-4	-8.80011E1	5.48363E-4	4.45843E-3	9.50813E-2	2.73472E1	-3.26741E1	-3.26356E1	2.6825E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.8001E1	2.38419E-5	-8.80014E1	2.86102E-4	4.05312E-3	9.51052E-2	2.73505E1	-3.26543E1	-3.25947E1	2.68302E1	1.19913E-7	2.51826E-3	2.51826E-3	6.32661E-3	3.00171E-1
2.2E1	1.855E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80011E1	-4.76837E-5	-8.80014E1	4.05312E-4	4.24385E-3	9.52244E-2	2.73582E1	-3.26785E1	-3.26213E1	2.68274E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80012E1	-5.00679E-4	-8.80009E1	4.76837E-4	4.02927E-3	9.51529E-2	2.72961E1	-3.26567E1	-3.2638E1	2.6825E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1