[Scan]
initial_time=2016-01-18T20:35:15
final_time=2016-01-18T20:35:37
ip_count=19
run=1024
dataset=7
scan=489
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.82975E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-1.03575E-9
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.41611E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.3785E-9
ql4_vset=
ql4_vmon=8.82149E-4
ql4_imon=1.59898E-8
mult1=-1.78809E-8
mult2=-2.64878E-9
rf_tmon=-3.81339E-3
rf_agc=3.39934E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.72085E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68799E0
bslens_imon=2.49222E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19439E1
lens5a_imon=1.9821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04837E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5348E1
cs_ef1b_imon=2.78405E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04425E1
cs_ea1_imon=2.54357E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03655E0
lens1_imon=1.6145E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64547E1
os_ef1alow_imon=2.98906E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03628E1
cs_ea2_imon=1.49373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85177E1
cs_ef1a_imon=2.93403E-5
olens2_vset=9.7E-1
olens2_vmon=9.69648E-1
olens2_imon=1.32361E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=4.2309E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14765E1
os_ea1_imon=2.37383E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63691E1
os_ef1bup_imon=3.0753E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21168E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02056E1
cs_anode1_imon=2.99242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=4.008E-8
tplens_vset=1.4E-1
tplens_vmon=1.6642E0
tplens_imon=-2.87772E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.49578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.55725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98185E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.18794E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29877E0
ionrepsh_imon=1.78061E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33441E1
lens5b_imon=2.15867E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.1206E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49913E0
os_ea2_imon=-7.41996E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00537E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70648E1
cs_ef2a_imon=3.1357E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06183E0
os_ef2alow_imon=-2.0932E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86426E-1
os_ef2bup_imon=-5.04597E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.43668E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29894E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02257E1
cs_anode2_imon=2.27469E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73222E1
iondef1_imon=1.11259E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68383E1
iondef4_imon=1.05869E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.07214E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.79152E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15363E0
cs_ionaccel_imon=-1.74424E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47528E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56612E1
einzel_imon=7.52342E-6
window_vset=0.0E0
window_vmon=2.87351E-1
window_imon=-7.71166E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.3953E-4
mask2_vset=0.0E0
mask2_vmon=-1.86322E1
mask2_imon=-1.17382E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=8.30833E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.529E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.03787E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24501E0
defgridb_imon=5.88353E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.43136E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07201E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65291E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30939E1
cs_fil1_imon=9.97018E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61868E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66788E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73555E-2
os_fil2_imon=-2.51E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14284E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.2554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34353E-1
cs_fil2_imon=-2.87351E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5109E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22707E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86529E-1
res40_imon=-2.1536E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.966E3	3.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80007E1	-9.53674E-5	-8.80009E1	5.96046E-4	4.05312E-3	9.5129E-2	2.73326E1	-3.26572E1	-3.26578E1	2.68247E1	1.1993E-7	2.51886E-3	2.51886E-3	6.3282E-3	3.00989E-1
2.0E0	1.07227E5	9.0E1	3.16E2	1.6E2	-7.37874E-2	-8.80008E1	-2.38419E-4	-8.8001E1	5.48363E-4	4.12464E-3	9.50336E-2	2.73082E1	-3.26915E1	-3.26291E1	2.68676E1	1.2006E-7	2.51874E-3	2.51874E-3	6.33065E-3	3.01748E-1
3.0E0	1.5E1	1.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80009E1	-4.05312E-4	-8.80007E1	4.29153E-4	4.07696E-3	9.50813E-2	2.73108E1	-3.26738E1	-3.26232E1	2.68281E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9926E-1
4.0E0	2.3546E4	1.0E1	6.55E2	3.98E2	-7.37103E-2	-8.80013E1	-1.66893E-4	-8.80012E1	5.72205E-4	4.05312E-3	9.51052E-2	2.73282E1	-3.2664E1	-3.26414E1	2.68131E1	1.1979E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.97843E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80013E1	-1.43051E-4	-8.80006E1	1.66893E-4	4.22001E-3	9.47952E-2	2.73032E1	-3.2651E1	-3.26185E1	2.68481E1	1.20003E-7	2.51723E-3	2.51723E-3	6.3074E-3	2.98389E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80012E1	-5.00679E-4	-8.80012E1	2.6226E-4	4.19617E-3	9.50813E-2	2.73562E1	-3.26627E1	-3.2614E1	2.68382E1	1.20154E-7	2.51952E-3	2.51952E-3	6.33021E-3	2.989E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.8001E1	-3.8147E-4	-8.8001E1	7.15256E-4	4.43459E-3	9.4986E-2	2.73364E1	-3.2662E1	-3.26012E1	2.68466E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.08504E-2	-8.8001E1	3.09944E-4	-8.80009E1	4.05312E-4	4.29153E-3	9.51529E-2	2.73285E1	-3.26693E1	-3.26651E1	2.68059E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80007E1	-1.43051E-4	-8.80008E1	6.19888E-4	4.22001E-3	9.51052E-2	2.73381E1	-3.2641E1	-3.26302E1	2.68381E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.98665E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80007E1	1.66893E-4	-8.80011E1	6.91414E-4	4.12464E-3	9.52244E-2	2.73216E1	-3.26701E1	-3.26095E1	2.68545E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.9829E-1
1.4E1	3.53E3	1.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80007E1	-2.6226E-4	-8.80008E1	6.4373E-4	4.17233E-3	9.52005E-2	2.73123E1	-3.26843E1	-3.26933E1	2.68364E1	1.19705E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.98222E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80009E1	-1.19209E-4	-8.80013E1	4.76837E-4	4.05312E-3	9.52005E-2	2.73375E1	-3.26614E1	-3.26313E1	2.68448E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9874E-1
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80009E1	4.76837E-5	-8.80013E1	7.39098E-4	4.17233E-3	9.4986E-2	2.72973E1	-3.26921E1	-3.26146E1	2.6831E1	1.20017E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
1.7E1	8.78E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80008E1	1.66893E-4	-8.80011E1	8.82149E-4	3.91006E-3	9.50575E-2	2.73505E1	-3.26844E1	-3.26284E1	2.68279E1	1.19653E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
1.8E1	3.554E3	3.0E0	7.27E2	5.0E2	-7.201E-2	-8.8001E1	-4.76837E-5	-8.80012E1	6.67572E-4	4.24385E-3	9.50575E-2	2.73189E1	-3.27029E1	-3.2629E1	2.68442E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.02253E-1
1.9E1	1.996E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.80012E1	-1.90735E-4	-8.80011E1	4.05312E-4	4.43459E-3	9.52244E-2	2.73448E1	-3.26579E1	-3.2647E1	2.6822E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
2.0E1	2.6374E4	2.8E1	8.08E2	5.58E2	-7.21643E-2	-8.8001E1	-1.43051E-4	-8.8001E1	3.57628E-4	4.64916E-3	9.53674E-2	2.73234E1	-3.26585E1	-3.26119E1	2.68659E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.97445E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80013E1	4.76837E-5	-8.80009E1	5.24521E-4	4.52995E-3	9.53674E-2	2.73087E1	-3.26458E1	-3.26032E1	2.67995E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.96671E-1
2.2E1	1.862E3	1.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80012E1	2.38419E-5	-8.80011E1	8.58307E-4	4.33922E-3	9.52244E-2	2.73334E1	-3.26685E1	-3.26201E1	2.69061E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98156E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.8001E1	-2.6226E-4	-8.80011E1	8.82149E-4	4.3869E-3	9.52721E-2	2.73222E1	-3.26885E1	-3.2593E1	2.68383E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9892E-1