[Scan]
initial_time=2016-01-18T20:35:45
final_time=2016-01-18T20:36:07
ip_count=19
run=1024
dataset=7
scan=490
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.83164E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-9.39453E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.43807E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-3.28146E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.5946E-8
mult1=-2.03878E-8
mult2=-2.67188E-9
rf_tmon=-4.14663E-3
rf_agc=3.37499E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=5.51975E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.40168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53334E1
cs_ef1b_imon=2.8025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04404E1
cs_ea1_imon=2.54822E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96694E0
lens1_imon=1.48497E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64236E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.4825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85151E1
cs_ef1a_imon=2.96828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.32858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.24589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14904E1
os_ea1_imon=2.37266E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.22058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02464E1
cs_anode1_imon=2.99243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.01087E-8
tplens_vset=1.4E-1
tplens_vmon=1.66857E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26305E1
iondef3_imon=1.51223E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98087E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=9.69493E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=1.78087E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70849E1
cs_ef2a_imon=3.14668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.30956E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-4.82873E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11628E1
os_restr2_imon=3.45914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02163E1
cs_anode2_imon=2.28353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7342E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68363E1
iondef4_imon=1.02935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.06804E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.7902E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.53471E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0218E2
cs_ionfocb_imon=1.47633E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.43556E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.39574E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-8.31936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.4595E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.42949E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65544E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.9493E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.08496E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.23009E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33297E-3
inlet_lpb_pmon=3.00878E-1
chamber_ion_pmon=1.20016E-7
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.32843E-1
res40_imon=-2.06449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.957E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80012E1	-5.00679E-4	-8.80009E1	5.48363E-4	4.72069E-3	9.50336E-2	2.73202E1	-3.26509E1	-3.26167E1	2.67682E1	1.19749E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
2.0E0	1.08039E5	1.08E2	3.16E2	1.6E2	-7.16233E-2	-8.8001E1	-5.48363E-4	-8.80012E1	4.76837E-4	4.43459E-3	9.52721E-2	2.7351E1	-3.26407E1	-3.26113E1	2.68148E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80013E1	-6.91414E-4	-8.8001E1	3.8147E-4	4.48227E-3	9.53197E-2	2.7326E1	-3.26561E1	-3.26231E1	2.68661E1	1.20122E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.01085E-1
4.0E0	2.3746E4	1.5E1	6.55E2	3.98E2	-7.10825E-2	-8.80013E1	-5.00679E-4	-8.80011E1	2.6226E-4	4.31538E-3	9.53436E-2	2.7344E1	-3.26644E1	-3.26331E1	2.6849E1	1.20142E-7	2.52342E-3	2.52342E-3	6.32328E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80012E1	-4.29153E-4	-8.80011E1	4.52995E-4	4.52995E-3	9.52244E-2	2.72968E1	-3.26708E1	-3.26189E1	2.68518E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8001E1	-1.66893E-4	-8.80012E1	5.24521E-4	4.57764E-3	9.52005E-2	2.73443E1	-3.26578E1	-3.26658E1	2.68149E1	1.19697E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8001E1	-1.90735E-4	-8.80012E1	5.24521E-4	4.8399E-3	9.54628E-2	2.73228E1	-3.26431E1	-3.26178E1	2.6852E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80008E1	-2.6226E-4	-8.80012E1	5.72205E-4	4.60148E-3	9.56535E-2	2.73261E1	-3.2644E1	-3.2608E1	2.68377E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80008E1	-5.00679E-4	-8.80014E1	6.4373E-4	4.45843E-3	9.52721E-2	2.73177E1	-3.26765E1	-3.2632E1	2.68406E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80009E1	-5.24521E-4	-8.80012E1	5.96046E-4	4.36306E-3	9.52721E-2	2.72856E1	-3.26508E1	-3.26543E1	2.678E1	1.20278E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.00302E-1
1.4E1	3.47E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80011E1	-4.29153E-4	-8.80011E1	5.48363E-4	4.57764E-3	9.51052E-2	2.73435E1	-3.26975E1	-3.26362E1	2.6825E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.5E1	1.05E2	1.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80008E1	-1.90735E-4	-8.80011E1	3.57628E-4	4.62532E-3	9.50575E-2	2.73045E1	-3.26807E1	-3.26278E1	2.68545E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02133E-1
1.6E1	4.5E2	1.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80011E1	-4.76837E-4	-8.80012E1	3.09944E-4	4.69685E-3	9.50575E-2	2.73346E1	-3.26767E1	-3.26272E1	2.68847E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.7E1	8.5E2	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.8001E1	-3.8147E-4	-8.80008E1	4.52995E-4	4.52995E-3	9.53197E-2	2.73311E1	-3.26691E1	-3.26195E1	2.68394E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.9892E-1
1.8E1	3.624E3	3.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80011E1	-4.76837E-4	-8.80008E1	4.29153E-4	4.31538E-3	9.50098E-2	2.73129E1	-3.26338E1	-3.26356E1	2.68046E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.97901E-1
1.9E1	2.053E3	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80014E1	-9.53674E-5	-8.80006E1	5.24521E-4	4.81606E-3	9.48429E-2	2.73195E1	-3.26759E1	-3.25984E1	2.684E1	1.19757E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
2.0E1	2.6753E4	1.7E1	8.08E2	5.58E2	-7.10825E-2	-8.80012E1	-3.09944E-4	-8.80008E1	5.48363E-4	4.48227E-3	9.48429E-2	2.73544E1	-3.26338E1	-3.26014E1	2.68436E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.09279E-2	-8.80013E1	-2.6226E-4	-8.8001E1	6.19888E-4	4.64916E-3	9.51529E-2	2.73219E1	-3.26729E1	-3.25936E1	2.6849E1	1.19965E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.02133E-1
2.2E1	1.888E3	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80012E1	-3.09944E-4	-8.80009E1	4.29153E-4	4.29153E-3	9.49621E-2	2.73571E1	-3.2687E1	-3.26227E1	2.68211E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9874E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80012E1	-1.43051E-4	-8.80009E1	8.58307E-4	4.12464E-3	9.50813E-2	2.7342E1	-3.2675E1	-3.26305E1	2.68363E1	1.20016E-7	2.5165E-3	2.5165E-3	6.33297E-3	3.00878E-1