[Scan]
initial_time=2016-01-18T20:37:15
final_time=2016-01-18T20:37:37
ip_count=19
run=1024
dataset=7
scan=493
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.75864E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-9.02212E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=1.42435E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.01449E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.59346E-8
mult1=-2.12856E-8
mult2=-2.72326E-9
rf_tmon=-3.92547E-3
rf_agc=3.52499E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.53286E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66556E0
bslens_imon=2.34592E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19435E1
lens5a_imon=1.99554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.0502E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54418E1
cs_ef1b_imon=2.80996E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02044E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04722E1
cs_ea1_imon=2.54348E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9924E0
lens1_imon=1.65022E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64214E1
os_ef1alow_imon=2.93873E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03626E1
cs_ea2_imon=1.5028E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84173E1
cs_ef1a_imon=2.95982E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.32178E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12048E1
os_restr1_imon=4.28352E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15209E1
os_ea1_imon=2.39221E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6343E1
os_ef1bup_imon=3.05193E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24837E0
cs_ionrep_imon=1.19038E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01529E1
cs_anode1_imon=2.97052E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=4.00948E-8
tplens_vset=1.4E-1
tplens_vmon=1.64569E0
tplens_imon=-2.83685E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2606E1
iondef3_imon=1.50504E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.57269E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98234E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=9.1188E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2888E0
ionrepsh_imon=1.7731E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33625E1
lens5b_imon=2.15095E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75063E1
cs_ef2b_imon=3.15475E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48719E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71496E1
cs_ef2a_imon=3.13237E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.97617E0
os_ef2alow_imon=-2.69807E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.7527E-1
os_ef2bup_imon=-5.06263E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11913E1
os_restr2_imon=3.45965E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.28301E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02442E1
cs_anode2_imon=2.24201E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72933E1
iondef1_imon=1.10102E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68296E1
iondef4_imon=1.08309E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.05342E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.77479E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06581E0
cs_ionaccel_imon=-2.03314E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57054E1
einzel_imon=7.82083E-6
window_vset=0.0E0
window_vmon=2.75066E-1
window_imon=-1.17684E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39233E-4
mask2_vset=0.0E0
mask2_vmon=-1.87031E1
mask2_imon=-3.85405E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.53812E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.61584E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.23495E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31494E0
defgridb_imon=6.118E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.41544E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07659E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65339E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.95253E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61572E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77842E-2
os_fil2_imon=-2.99933E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.52004E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.13373E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35595E-1
cs_fil2_imon=-2.06951E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41733E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22662E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.25515E-1
res40_imon=-2.49048E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=331
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.05E3	2.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80016E1	-1.66893E-4	-8.80013E1	3.8147E-4	4.26769E-3	9.49144E-2	2.735E1	-3.2679E1	-3.26422E1	2.68052E1	1.19934E-7	2.51087E-3	2.51087E-3	6.31711E-3	2.99644E-1
2.0E0	1.0794E5	1.1E2	3.16E2	1.6E2	-7.27053E-2	-8.80017E1	1.19209E-4	-8.80007E1	5.96046E-4	4.48227E-3	9.52005E-2	2.72926E1	-3.26522E1	-3.26285E1	2.68711E1	1.201E-7	2.51725E-3	2.51725E-3	6.3131E-3	3.01065E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80018E1	2.38419E-5	-8.80011E1	3.09944E-4	4.43459E-3	9.49621E-2	2.73424E1	-3.26567E1	-3.2599E1	2.68285E1	1.2006E-7	2.51874E-3	2.51874E-3	6.33065E-3	3.01193E-1
4.0E0	2.3687E4	1.5E1	6.55E2	3.98E2	-7.17779E-2	-8.80016E1	-3.09944E-4	-8.80013E1	3.57628E-4	4.86374E-3	9.49621E-2	2.7334E1	-3.26543E1	-3.26136E1	2.68532E1	1.20055E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.00453E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80014E1	-2.14577E-4	-8.80012E1	3.57628E-4	4.24385E-3	9.57012E-2	2.73265E1	-3.26799E1	-3.26223E1	2.68208E1	1.2026E-7	2.52707E-3	2.52707E-3	6.32356E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80015E1	-2.14577E-4	-8.8001E1	6.19888E-4	4.3869E-3	9.53674E-2	2.73452E1	-3.26384E1	-3.26213E1	2.6852E1	1.19925E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.98554E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80014E1	-2.38419E-4	-8.80011E1	7.15256E-4	4.31538E-3	9.52244E-2	2.73255E1	-3.26675E1	-3.2608E1	2.68352E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.97647E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80016E1	-2.14577E-4	-8.8001E1	5.24521E-4	4.48227E-3	9.50813E-2	2.73484E1	-3.26621E1	-3.26476E1	2.68268E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80018E1	-2.86102E-4	-8.8001E1	4.05312E-4	4.50611E-3	9.51052E-2	2.73231E1	-3.26476E1	-3.2599E1	2.68605E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80016E1	-3.33786E-4	-8.80012E1	5.48363E-4	4.36306E-3	9.52005E-2	2.73283E1	-3.26718E1	-3.26196E1	2.68267E1	1.19757E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01347E-1
1.4E1	3.44E3	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80015E1	-2.6226E-4	-8.80014E1	2.38419E-4	4.36306E-3	9.49383E-2	2.73458E1	-3.27009E1	-3.26319E1	2.68154E1	1.20444E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.00852E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80015E1	1.66893E-4	-8.8001E1	3.8147E-4	4.31538E-3	9.50336E-2	2.73137E1	-3.26505E1	-3.26303E1	2.68286E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0148E-1
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80014E1	-3.57628E-4	-8.8001E1	5.24521E-4	4.45843E-3	9.50575E-2	2.73193E1	-3.26649E1	-3.26048E1	2.68441E1	1.20244E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99348E-1
1.7E1	8.34E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80013E1	-4.05312E-4	-8.80013E1	5.96046E-4	4.673E-3	9.49383E-2	2.73153E1	-3.2638E1	-3.26687E1	2.6843E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0071E-1
1.8E1	3.57E3	3.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80017E1	-3.8147E-4	-8.80007E1	5.72205E-4	4.19617E-3	9.50336E-2	2.73016E1	-3.27192E1	-3.27021E1	2.68238E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02396E-1
1.9E1	2.069E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80015E1	2.38419E-5	-8.80009E1	6.4373E-4	4.24385E-3	9.52244E-2	2.73321E1	-3.26488E1	-3.2614E1	2.67932E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
2.0E1	2.6645E4	2.4E1	8.08E2	5.58E2	-7.13915E-2	-8.80018E1	-1.66893E-4	-8.80011E1	7.15256E-4	4.43459E-3	9.51767E-2	2.73411E1	-3.26314E1	-3.26386E1	2.68569E1	1.19705E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00824E-1
2.1E1	6.1E1	1.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80019E1	4.29153E-4	-8.80012E1	6.4373E-4	4.36306E-3	9.51052E-2	2.73151E1	-3.26732E1	-3.25995E1	2.68389E1	1.19913E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01085E-1
2.2E1	1.923E3	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80018E1	1.19209E-4	-8.80014E1	5.96046E-4	4.62532E-3	9.5129E-2	2.72921E1	-3.26272E1	-3.2613E1	2.68318E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.01995E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80017E1	9.53674E-5	-8.80013E1	4.05312E-4	4.45843E-3	9.53197E-2	2.72933E1	-3.26714E1	-3.2606E1	2.68296E1	1.198E-7	2.51096E-3	2.51096E-3	6.33436E-3	2.99175E-1