[Scan]
initial_time=2016-01-18T20:38:15
final_time=2016-01-18T20:38:37
ip_count=19
run=1024
dataset=7
scan=495
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.81206E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-9.09471E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.43027E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.88045E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.59593E-8
mult1=-1.8011E-8
mult2=-2.64878E-9
rf_tmon=-4.47998E-3
rf_agc=3.28136E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.597E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.7798E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04874E1
cs_ea1_imon=2.55842E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96145E0
lens1_imon=1.6978E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6417E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.4773E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.97081E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.32425E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=4.25706E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14921E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62776E1
os_ef1bup_imon=3.04937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=3.00108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=4.01087E-8
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26437E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.59518E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98094E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=9.75716E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30257E0
ionrepsh_imon=1.7848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75168E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52908E0
os_ea2_imon=-9.26608E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70747E1
cs_ef2a_imon=3.12758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.00651E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-4.83234E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11718E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.27225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02308E1
cs_anode2_imon=2.27272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7337E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.06395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.08761E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.76852E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.4772E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.40673E-6
window_vset=0.0E0
window_vmon=2.79811E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39459E-4
mask2_vset=0.0E0
mask2_vmon=-1.86903E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=6.98987E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.42955E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06566E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65372E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.97116E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6215E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66936E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.11294E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22604E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79383E-2
res40_imon=-2.20144E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.147E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80018E1	-9.53674E-5	-8.80009E1	7.15256E-5	4.12464E-3	9.51052E-2	2.7357E1	-3.26579E1	-3.26178E1	2.67879E1	1.20435E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9874E-1
2.0E0	1.07645E5	1.13E2	3.16E2	1.6E2	-7.23189E-2	-8.80018E1	-9.53674E-5	-8.80009E1	7.15256E-5	4.57764E-3	9.50336E-2	2.73394E1	-3.26842E1	-3.25856E1	2.68519E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80019E1	-2.6226E-4	-8.80009E1	2.38419E-5	4.3869E-3	9.52959E-2	2.73022E1	-3.26573E1	-3.26335E1	2.68493E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01742E-1
4.0E0	2.3666E4	6.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80018E1	-1.90735E-4	-8.80013E1	4.52995E-4	4.52995E-3	9.51052E-2	2.73222E1	-3.26773E1	-3.26195E1	2.68134E1	1.19891E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80016E1	-1.43051E-4	-8.80013E1	0.0E0	4.64916E-3	9.52005E-2	2.73237E1	-3.26344E1	-3.26248E1	2.6846E1	1.19749E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80018E1	-2.86102E-4	-8.80007E1	3.57628E-4	4.45843E-3	9.52244E-2	2.72945E1	-3.26508E1	-3.26054E1	2.68136E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80015E1	-3.8147E-4	-8.80009E1	6.19888E-4	4.31538E-3	9.54628E-2	2.73021E1	-3.26446E1	-3.2644E1	2.68412E1	1.20363E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80016E1	-4.29153E-4	-8.80009E1	7.15256E-4	4.26769E-3	9.51529E-2	2.73075E1	-3.26554E1	-3.26302E1	2.68268E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01871E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80015E1	-3.8147E-4	-8.80009E1	5.72205E-4	4.45843E-3	9.50813E-2	2.73213E1	-3.26579E1	-3.2614E1	2.68016E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.03976E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80018E1	-2.14577E-4	-8.80012E1	4.29153E-4	4.64916E-3	9.51529E-2	2.73225E1	-3.26723E1	-3.25936E1	2.68478E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02133E-1
1.4E1	3.572E3	3.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80018E1	-3.57628E-4	-8.8001E1	3.57628E-4	4.62532E-3	9.50575E-2	2.73281E1	-3.26018E1	-3.26697E1	2.68308E1	1.19965E-7	2.5068E-3	2.5068E-3	6.32386E-3	2.98222E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80017E1	-2.38419E-4	-8.80009E1	5.96046E-4	4.62532E-3	9.52244E-2	2.73484E1	-3.26801E1	-3.26254E1	2.6834E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9892E-1
1.6E1	4.73E2	1.0E0	6.47E2	4.41E2	-7.40967E-2	-8.8002E1	-3.57628E-4	-8.80008E1	4.52995E-4	4.72069E-3	9.52005E-2	2.73309E1	-3.27017E1	-3.26176E1	2.68376E1	1.20069E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.98481E-1
1.7E1	8.81E2	2.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80018E1	-5.24521E-4	-8.80008E1	6.19888E-4	4.79221E-3	9.51767E-2	2.73063E1	-3.26729E1	-3.25888E1	2.68172E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.96929E-1
1.8E1	3.543E3	1.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80018E1	-4.05312E-4	-8.80008E1	8.10623E-4	4.60148E-3	9.50336E-2	2.72927E1	-3.26673E1	-3.26402E1	2.68593E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99941E-1
1.9E1	2.062E3	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80019E1	-3.8147E-4	-8.80009E1	6.19888E-4	4.50611E-3	9.48191E-2	2.73363E1	-3.26585E1	-3.26062E1	2.68346E1	1.19913E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.01085E-1
2.0E1	2.6579E4	1.9E1	8.08E2	5.58E2	-7.3401E-2	-8.80018E1	-4.76837E-5	-8.8001E1	5.72205E-4	4.24385E-3	9.47952E-2	2.73303E1	-3.26404E1	-3.26032E1	2.68238E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80019E1	-4.76837E-5	-8.80008E1	6.4373E-4	4.41074E-3	9.52005E-2	2.73411E1	-3.27015E1	-3.25947E1	2.6865E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.02511E-1
2.2E1	1.859E3	2.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80018E1	-4.29153E-4	-8.80009E1	4.05312E-4	4.52995E-3	9.52482E-2	2.73051E1	-3.26231E1	-3.26231E1	2.6831E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02922E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80015E1	-1.43051E-4	-8.80008E1	4.29153E-4	4.673E-3	9.52005E-2	2.7337E1	-3.26502E1	-3.26437E1	2.6846E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.03545E-1