[Scan]
initial_time=2016-01-18T20:38:45
final_time=2016-01-18T20:39:07
ip_count=19
run=1024
dataset=7
scan=496
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.80341E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-8.6478E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.42055E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.87627E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.59753E-8
mult1=-2.03871E-8
mult2=-2.7213E-9
rf_tmon=-3.92547E-3
rf_agc=3.39049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.42247E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1967E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04736E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5363E1
cs_ef1b_imon=2.84762E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.55554E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98728E0
lens1_imon=1.43824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65372E1
os_ef1alow_imon=2.99659E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.49532E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84362E1
cs_ef1a_imon=2.90211E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.31934E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10899E1
os_restr1_imon=4.25132E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.36952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.10522E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0175E1
cs_anode1_imon=2.95943E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=4.01145E-8
tplens_vset=1.4E-1
tplens_vmon=1.69551E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98101E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.24551E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.7675E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.15683E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74236E1
cs_ef2b_imon=3.09849E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49964E0
os_ea2_imon=-8.61719E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00349E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71446E1
cs_ef2a_imon=3.18731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09614E0
os_ef2alow_imon=-2.32594E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5398E-1
os_ef2bup_imon=-5.47515E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1064E1
os_restr2_imon=3.38157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01373E1
cs_anode2_imon=2.23901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.10995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.1106E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.03854E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.74802E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20445E0
cs_ionaccel_imon=-1.59349E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.46993E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55851E1
einzel_imon=7.75507E-6
window_vset=0.0E0
window_vmon=1.96582E-1
window_imon=-5.77955E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.38921E-4
mask2_vset=0.0E0
mask2_vmon=-1.85524E1
mask2_imon=-1.00611E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.80459E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.44915E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.09269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65473E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.96782E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66881E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.63812E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.26262E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.03044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3391E-1
cs_fil2_imon=-2.96248E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.93911E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.14901E-1
res40_imon=-2.55948E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=145
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.896E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80013E1	2.38419E-4	-8.8001E1	5.24521E-4	4.64916E-3	9.50813E-2	2.73161E1	-3.26909E1	-3.26179E1	2.68725E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02133E-1
2.0E0	1.07464E5	1.18E2	3.16E2	1.6E2	-7.20871E-2	-8.80017E1	1.66893E-4	-8.8001E1	3.33786E-4	4.50611E-3	9.52959E-2	2.73131E1	-3.2694E1	-3.26352E1	2.68327E1	1.19941E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00348E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80019E1	0.0E0	-8.80008E1	5.00679E-4	4.19617E-3	9.49144E-2	2.73399E1	-3.26567E1	-3.2626E1	2.68487E1	1.20084E-7	2.51136E-3	2.51136E-3	6.31299E-3	2.99879E-1
4.0E0	2.3634E4	1.5E1	6.55E2	3.98E2	-7.22418E-2	-8.80018E1	7.15256E-5	-8.80009E1	4.76837E-4	4.05312E-3	9.48906E-2	2.72998E1	-3.26826E1	-3.26384E1	2.684E1	1.19953E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80017E1	4.76837E-5	-8.80014E1	3.09944E-4	4.22001E-3	9.50575E-2	2.73327E1	-3.26308E1	-3.26152E1	2.68244E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80019E1	-1.19209E-4	-8.8001E1	2.6226E-4	4.60148E-3	9.50575E-2	2.73381E1	-3.26735E1	-3.26086E1	2.68232E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80016E1	1.90735E-4	-8.80009E1	5.00679E-4	4.45843E-3	9.50813E-2	2.73075E1	-3.26278E1	-3.26248E1	2.68436E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.8002E1	-1.43051E-4	-8.80009E1	4.52995E-4	4.14848E-3	9.53197E-2	2.73103E1	-3.26596E1	-3.26277E1	2.68412E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00302E-1
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-3.57628E-4	-8.8001E1	4.05312E-4	4.26769E-3	9.49621E-2	2.73235E1	-3.26499E1	-3.26542E1	2.68424E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.01104E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80021E1	-1.90735E-4	-8.80008E1	1.90735E-4	4.3869E-3	9.48429E-2	2.73122E1	-3.26443E1	-3.26614E1	2.68292E1	1.19809E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01347E-1
1.4E1	3.543E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80017E1	-9.53674E-5	-8.80009E1	4.52995E-4	4.24385E-3	9.5129E-2	2.73303E1	-3.26675E1	-3.26927E1	2.68575E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80018E1	-1.19209E-4	-8.80009E1	6.91414E-4	4.22001E-3	9.4986E-2	2.73033E1	-3.26621E1	-3.26146E1	2.68496E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.6E1	4.42E2	1.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80017E1	-2.38419E-4	-8.80009E1	5.96046E-4	4.29153E-3	9.4986E-2	2.73291E1	-3.26536E1	-3.2647E1	2.6822E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.7E1	8.29E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	-2.38419E-4	-8.80009E1	6.67572E-4	4.673E-3	9.52244E-2	2.73273E1	-3.26404E1	-3.26146E1	2.68394E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.8E1	3.519E3	1.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80019E1	-3.09944E-4	-8.80009E1	5.00679E-4	4.62532E-3	9.51529E-2	2.73184E1	-3.2644E1	-3.26347E1	2.68319E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03449E-1
1.9E1	1.999E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80018E1	-5.00679E-4	-8.80007E1	6.4373E-4	4.45843E-3	9.50336E-2	2.73467E1	-3.26652E1	-3.25795E1	2.68424E1	1.1974E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.006E-1
2.0E1	2.6399E4	1.1E1	8.08E2	5.58E2	-7.286E-2	-8.80015E1	-4.05312E-4	-8.80007E1	5.00679E-4	4.91142E-3	9.51767E-2	2.73369E1	-3.26621E1	-3.26332E1	2.68448E1	1.19653E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80017E1	-2.86102E-4	-8.80006E1	4.29153E-4	4.55379E-3	9.54151E-2	2.73445E1	-3.271E1	-3.26069E1	2.68516E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
2.2E1	1.809E3	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80017E1	-1.43051E-4	-8.8001E1	4.29153E-4	4.50611E-3	9.53197E-2	2.73057E1	-3.26597E1	-3.26434E1	2.68478E1	1.20466E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80018E1	-2.14577E-4	-8.80011E1	6.91414E-4	4.91142E-3	9.50336E-2	2.73287E1	-3.26885E1	-3.26107E1	2.6855E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1