[Scan]
initial_time=2016-01-18T20:39:15
final_time=2016-01-18T20:39:37
ip_count=19
run=1024
dataset=7
scan=497
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.84043E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-8.60286E-10
ql2_vset=
ql2_vmon=1.66893E-4
ql2_imon=1.45903E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.78857E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.59722E-8
mult1=-2.99084E-8
mult2=-2.74456E-9
rf_tmon=-4.72271E-3
rf_agc=3.3658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.60999E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62468E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54241E1
cs_ef1b_imon=2.79746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.57392E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93201E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64374E1
os_ef1alow_imon=2.94918E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.46648E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=2.95964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.32525E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12E1
os_restr1_imon=4.27004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.37169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63137E1
os_ef1bup_imon=3.04072E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=2.98991E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=4.0042E-8
tplens_vset=1.4E-1
tplens_vmon=1.6204E0
tplens_imon=-4.79594E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26891E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.97967E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.44138E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.79021E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.17161E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.753E1
cs_ef2b_imon=3.16074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5477E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06055E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.12938E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.9975E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.49681E-1
os_ef2bup_imon=-5.04858E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11622E1
os_restr2_imon=3.44977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.25025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02494E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.11608E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68731E1
iondef4_imon=1.06287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.067E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.78238E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07488E0
cs_ionaccel_imon=-2.12936E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47806E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56892E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=3.04438E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.3939E-4
mask2_vset=0.0E0
mask2_vmon=-1.87131E1
mask2_imon=-3.74232E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.68923E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.20399E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.09081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42474E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07149E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65364E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30944E1
cs_fil1_imon=9.95723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62936E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66861E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.50262E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.18254E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31283E-3
inlet_lpb_pmon=2.98831E-1
chamber_ion_pmon=1.19933E-7
chamber_cvt_pmon=2.51755E-3
foreline_cvt_pmon=2.51755E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.41562E-2
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.049E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80017E1	7.15256E-5	-8.8001E1	8.34465E-4	4.50611E-3	9.53436E-2	2.73327E1	-3.26176E1	-3.26512E1	2.69157E1	1.19757E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
2.0E0	1.07332E5	9.2E1	3.16E2	1.6E2	-7.23964E-2	-8.80017E1	-4.05312E-4	-8.80011E1	4.29153E-4	4.76837E-3	9.52244E-2	2.73241E1	-3.26578E1	-3.26107E1	2.68268E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80014E1	-5.48363E-4	-8.80011E1	3.33786E-4	4.45843E-3	9.51052E-2	2.73333E1	-3.26783E1	-3.26068E1	2.6813E1	1.20084E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.0041E-1
4.0E0	2.3552E4	1.2E1	6.55E2	3.98E2	-7.17779E-2	-8.80015E1	-4.76837E-4	-8.80009E1	3.33786E-4	4.55379E-3	9.5439E-2	2.73329E1	-3.26492E1	-3.25953E1	2.68253E1	1.19965E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80017E1	-3.33786E-4	-8.80009E1	5.48363E-4	4.60148E-3	9.54151E-2	2.73455E1	-3.26719E1	-3.26285E1	2.68419E1	1.19841E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80017E1	-5.48363E-4	-8.8001E1	3.8147E-4	4.55379E-3	9.53913E-2	2.73175E1	-3.26543E1	-3.25888E1	2.68534E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80015E1	-3.8147E-4	-8.80011E1	5.72205E-4	4.41074E-3	9.5439E-2	2.73075E1	-3.26651E1	-3.26272E1	2.68208E1	1.20017E-7	2.52538E-3	2.52538E-3	6.29645E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80018E1	-5.24521E-4	-8.80011E1	6.19888E-4	4.45843E-3	9.5439E-2	2.73207E1	-3.26488E1	-3.26158E1	2.68653E1	1.20055E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.8002E1	-2.38419E-4	-8.80013E1	6.91414E-4	4.52995E-3	9.52244E-2	2.73111E1	-3.26476E1	-3.26398E1	2.68334E1	1.20031E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.99348E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80022E1	-3.57628E-4	-8.8001E1	5.72205E-4	4.60148E-3	9.52482E-2	2.73291E1	-3.26458E1	-3.26428E1	2.68773E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.4E1	3.482E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80021E1	-2.6226E-4	-8.8001E1	6.67572E-4	4.43459E-3	9.50575E-2	2.73243E1	-3.26945E1	-3.27095E1	2.68517E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.8002E1	-4.76837E-5	-8.8001E1	5.48363E-4	4.8399E-3	9.52482E-2	2.73381E1	-3.26392E1	-3.26657E1	2.68064E1	1.20174E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9952E-1
1.6E1	4.56E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80016E1	0.0E0	-8.80008E1	3.09944E-4	4.64916E-3	9.53436E-2	2.73165E1	-3.26669E1	-3.26092E1	2.68286E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.7E1	8.05E2	2.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80016E1	-4.76837E-5	-8.80008E1	4.52995E-4	4.60148E-3	9.53436E-2	2.7344E1	-3.26726E1	-3.26172E1	2.68623E1	1.20226E-7	2.51771E-3	2.51771E-3	6.35692E-3	3.00302E-1
1.8E1	3.669E3	2.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80016E1	-2.86102E-4	-8.8001E1	4.29153E-4	4.41074E-3	9.54866E-2	2.73161E1	-3.26566E1	-3.26536E1	2.6828E1	1.20142E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99594E-1
1.9E1	2.014E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80017E1	-2.38419E-4	-8.80006E1	4.05312E-4	4.43459E-3	9.53674E-2	2.73201E1	-3.26386E1	-3.26422E1	2.6834E1	1.201E-7	2.51838E-3	2.51838E-3	6.3245E-3	3.01337E-1
2.0E1	2.6388E4	2.1E1	8.08E2	5.58E2	-7.201E-2	-8.80015E1	-1.66893E-4	-8.80007E1	4.29153E-4	4.3869E-3	9.48906E-2	2.73598E1	-3.26849E1	-3.26248E1	2.68556E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.01995E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80019E1	2.38419E-5	-8.8001E1	8.58307E-4	4.36306E-3	9.50813E-2	2.73269E1	-3.26296E1	-3.2603E1	2.6819E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02396E-1
2.2E1	1.904E3	5.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8002E1	-4.76837E-5	-8.80008E1	5.24521E-4	4.62532E-3	9.53197E-2	2.73535E1	-3.26933E1	-3.26166E1	2.68111E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.8002E1	1.66893E-4	-8.80008E1	4.29153E-4	4.36306E-3	9.52244E-2	2.73147E1	-3.26891E1	-3.26302E1	2.68731E1	1.19933E-7	2.51755E-3	2.51755E-3	6.31283E-3	2.98831E-1