[Scan]
initial_time=2016-01-18T20:40:45
final_time=2016-01-18T20:41:06
ip_count=19
run=1024
dataset=7
scan=500
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.82908E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-8.52942E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.43274E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.59107E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.5919E-8
mult1=-1.53511E-8
mult2=-2.74481E-9
rf_tmon=-4.83982E-3
rf_agc=3.23358E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=5.5759E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68136E0
bslens_imon=2.48062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=2.00337E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04858E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.81007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02172E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04413E1
cs_ea1_imon=2.54771E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9839E0
lens1_imon=1.3273E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65041E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03745E1
cs_ea2_imon=1.49504E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.93008E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.31832E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15226E1
os_ea1_imon=2.36259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23741E0
cs_ionrep_imon=1.18798E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02206E1
cs_anode1_imon=2.96108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=4.01309E-8
tplens_vset=1.4E-1
tplens_vmon=1.66102E0
tplens_imon=-2.33709E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.49357E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.55417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.981E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.43124E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28822E0
ionrepsh_imon=1.77088E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33878E1
lens5b_imon=2.16609E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50247E0
os_ea2_imon=-6.59773E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00472E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.32398E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.26733E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.25146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73163E1
iondef1_imon=1.10497E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.10684E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.08747E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.72837E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.39567E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.32894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.34826E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.22977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.06176E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.42204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06747E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65305E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.94972E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63543E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66898E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67308E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.02115E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99302E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49992E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.025E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80022E1	-3.57628E-4	-8.80009E1	5.96046E-4	4.31538E-3	9.52959E-2	2.73263E1	-3.26372E1	-3.26278E1	2.6843E1	1.201E-7	2.51838E-3	2.51838E-3	6.30171E-3	3.01881E-1
2.0E0	1.06865E5	7.5E1	3.16E2	1.6E2	-7.21643E-2	-8.80021E1	-3.09944E-4	-8.80005E1	6.4373E-4	4.36306E-3	9.5129E-2	2.73308E1	-3.26823E1	-3.26389E1	2.68322E1	1.20055E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.02511E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.48227E-3	9.52482E-2	2.73446E1	-3.26874E1	-3.26272E1	2.6843E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01475E-1
4.0E0	2.3615E4	1.2E1	6.55E2	3.98E2	-7.37103E-2	-8.80018E1	-2.86102E-4	-8.80008E1	4.52995E-4	4.55379E-3	9.4986E-2	2.73261E1	-3.26621E1	-3.26398E1	2.68106E1	1.20158E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80016E1	-2.86102E-4	-8.80009E1	4.52995E-4	4.64916E-3	9.52005E-2	2.73129E1	-3.26573E1	-3.26008E1	2.68647E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80018E1	-7.15256E-5	-8.80009E1	1.90735E-4	4.22001E-3	9.52005E-2	2.73381E1	-3.26543E1	-3.26272E1	2.68151E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80018E1	2.6226E-4	-8.8001E1	3.33786E-4	4.3869E-3	9.52244E-2	2.72733E1	-3.27095E1	-3.25816E1	2.68412E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.8002E1	4.76837E-5	-8.80013E1	7.15256E-4	4.69685E-3	9.53674E-2	2.73189E1	-3.26014E1	-3.26518E1	2.6816E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80018E1	1.66893E-4	-8.80011E1	7.86781E-4	4.24385E-3	9.53197E-2	2.73327E1	-3.26693E1	-3.2596E1	2.68611E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80018E1	2.38419E-5	-8.8001E1	5.96046E-4	4.22001E-3	9.52244E-2	2.73273E1	-3.26915E1	-3.26134E1	2.68466E1	1.20158E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.9943E-1
1.4E1	3.352E3	2.0E0	5.66E2	3.82E2	-7.23189E-2	-8.8002E1	-4.29153E-4	-8.80011E1	4.76837E-4	4.62532E-3	9.52721E-2	2.73664E1	-3.27149E1	-3.26026E1	2.67926E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.5E1	1.17E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80018E1	-3.09944E-4	-8.8001E1	4.05312E-4	4.52995E-3	9.51529E-2	2.73364E1	-3.26496E1	-3.26331E1	2.6843E1	1.20226E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9926E-1
1.6E1	4.48E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80017E1	-4.29153E-4	-8.80012E1	3.33786E-4	4.33922E-3	9.53674E-2	2.73159E1	-3.26855E1	-3.2647E1	2.68593E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
1.7E1	8.74E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80018E1	0.0E0	-8.80011E1	3.8147E-4	4.24385E-3	9.51529E-2	2.73405E1	-3.26675E1	-3.26284E1	2.68418E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.8E1	3.659E3	5.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80017E1	-1.66893E-4	-8.80008E1	5.24521E-4	4.31538E-3	9.52005E-2	2.73075E1	-3.26374E1	-3.2644E1	2.68292E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
1.9E1	2.093E3	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80019E1	-4.29153E-4	-8.80008E1	4.05312E-4	4.3869E-3	9.51529E-2	2.73195E1	-3.26681E1	-3.26236E1	2.68478E1	1.198E-7	2.52707E-3	2.52707E-3	6.31817E-3	3.03286E-1
2.0E1	2.6347E4	1.6E1	8.08E2	5.58E2	-7.31692E-2	-8.8002E1	-4.05312E-4	-8.80008E1	5.72205E-4	4.14848E-3	9.48429E-2	2.73321E1	-3.26338E1	-3.26368E1	2.68178E1	1.20031E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.98554E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80023E1	-3.8147E-4	-8.80012E1	5.96046E-4	3.93391E-3	9.52244E-2	2.73357E1	-3.26446E1	-3.26164E1	2.6828E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9952E-1
2.2E1	1.795E3	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80019E1	-4.05312E-4	-8.8001E1	6.67572E-4	4.33922E-3	9.50575E-2	2.72201E1	-3.2524E1	-3.26762E1	2.68285E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.96887E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80017E1	-3.09944E-4	-8.80011E1	7.39098E-4	4.05312E-3	9.51529E-2	2.73163E1	-3.26372E1	-3.26354E1	2.68556E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99302E-1