[Scan]
initial_time=2016-01-18T20:41:14
final_time=2016-01-18T20:41:34
ip_count=19
run=1024
dataset=7
scan=501
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.88471E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.97415E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.41279E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.67482E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.5904E-8
mult1=-2.32259E-8
mult2=-2.52499E-9
rf_tmon=-4.30214E-3
rf_agc=3.26667E-2
counter1=2
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.67818E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68863E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19323E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.8162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04416E1
cs_ea1_imon=2.53901E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96458E0
lens1_imon=1.54161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.46162E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.92432E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.31719E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.26319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.36204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63353E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.96144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=4.00755E-8
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.48427E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.54727E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98084E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=9.24289E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=1.76919E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.1603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51106E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04975E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.41301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.10839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.04388E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.75404E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56711E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.59753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.35331E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31402E0
defgridb_imon=5.95171E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.43393E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08212E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65309E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.95909E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63615E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66686E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.14191E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20043E-7
chamber_cvt_pmon=2.51716E-3
foreline_cvt_pmon=2.51716E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82117E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.073E3	1.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80021E1	-3.33786E-4	-8.80011E1	6.4373E-4	4.41074E-3	9.49144E-2	2.73544E1	-3.26506E1	-3.26476E1	2.6814E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
2.0E0	1.06922E5	7.8E1	3.16E2	1.6E2	-7.30146E-2	-8.80024E1	-5.00679E-4	-8.80011E1	7.39098E-4	4.3869E-3	9.49383E-2	2.73087E1	-3.26524E1	-3.2647E1	2.68581E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80019E1	-1.90735E-4	-8.8001E1	5.24521E-4	4.3869E-3	9.51052E-2	2.73328E1	-3.26449E1	-3.2629E1	2.68172E1	1.20031E-7	2.52473E-3	2.52473E-3	6.31299E-3	3.01742E-1
4.0E0	2.3374E4	1.3E1	6.55E2	3.98E2	-7.30146E-2	-8.80019E1	-2.14577E-4	-8.8001E1	1.90735E-4	4.55379E-3	9.52482E-2	2.7344E1	-3.26213E1	-3.26567E1	2.68522E1	1.20394E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80021E1	-3.8147E-4	-8.8001E1	6.4373E-4	4.26769E-3	9.48668E-2	2.73273E1	-3.26705E1	-3.26573E1	2.68448E1	1.20174E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97187E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80022E1	-4.52995E-4	-8.80006E1	5.48363E-4	4.3869E-3	9.47237E-2	2.73213E1	-3.26549E1	-3.26398E1	2.68538E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9714E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80019E1	-1.43051E-4	-8.80011E1	4.76837E-4	4.50611E-3	9.50575E-2	2.73099E1	-3.26633E1	-3.26482E1	2.68454E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80022E1	2.38419E-5	-8.80009E1	4.76837E-4	4.79221E-3	9.53913E-2	2.73027E1	-3.26597E1	-3.26038E1	2.6828E1	1.20031E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.00942E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80018E1	-4.29153E-4	-8.80009E1	9.53674E-5	4.62532E-3	9.50336E-2	2.73177E1	-3.2641E1	-3.26404E1	2.68352E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80021E1	-8.10623E-4	-8.80011E1	4.29153E-4	4.76837E-3	9.50575E-2	2.73314E1	-3.2667E1	-3.26468E1	2.68363E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02659E-1
1.4E1	3.37E3	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80021E1	-2.14577E-4	-8.80009E1	3.09944E-4	4.52995E-3	9.50813E-2	2.73345E1	-3.27011E1	-3.25984E1	2.68382E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02659E-1
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80019E1	-5.00679E-4	-8.80007E1	2.6226E-4	4.31538E-3	9.49144E-2	2.73117E1	-3.26716E1	-3.26229E1	2.68251E1	1.19925E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.01209E-1
1.6E1	4.71E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80021E1	-6.67572E-4	-8.80006E1	2.38419E-4	4.45843E-3	9.49621E-2	2.73063E1	-3.265E1	-3.26164E1	2.6855E1	1.20058E-7	2.51948E-3	2.51948E-3	6.31675E-3	3.01683E-1
1.7E1	8.55E2	1.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80023E1	-8.82149E-4	-8.80009E1	4.05312E-4	4.43459E-3	9.47237E-2	2.73152E1	-3.26545E1	-3.26294E1	2.68541E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
1.8E1	3.714E3	3.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80021E1	-4.29153E-4	-8.80009E1	2.86102E-4	4.17233E-3	9.47714E-2	2.73081E1	-3.26518E1	-3.2596E1	2.68046E1	1.20226E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01485E-1
1.9E1	2.093E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.8002E1	-5.48363E-4	-8.80009E1	2.86102E-4	4.48227E-3	9.51052E-2	2.73411E1	-3.26573E1	-3.26518E1	2.6855E1	1.20158E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.03286E-1
2.0E1	2.6563E4	1.6E1	8.08E2	5.58E2	-7.26282E-2	-8.80017E1	-5.24521E-4	-8.80009E1	3.8147E-4	4.69685E-3	9.4986E-2	2.73523E1	-3.2667E1	-3.25981E1	2.68462E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02133E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80015E1	-4.76837E-4	-8.80006E1	4.52995E-4	4.48227E-3	9.50575E-2	2.73112E1	-3.26425E1	-3.26383E1	2.684E1	1.20243E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.03129E-1
2.2E1	1.944E3	2.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80019E1	-7.62939E-4	-8.80007E1	3.09944E-4	4.673E-3	9.49383E-2	2.72516E1	-3.25533E1	-3.26549E1	2.68052E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
2.3E1	2.0E0	1.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80018E1	-4.52995E-4	-8.80009E1	2.38419E-4	4.62532E-3	9.48906E-2	2.73183E1	-3.26446E1	-3.26302E1	2.68406E1	1.20043E-7	2.51716E-3	2.51716E-3	6.33486E-3	3.01085E-1