[Scan]
initial_time=2016-01-18T20:42:37
final_time=2016-01-18T20:42:57
ip_count=19
run=1024
dataset=7
scan=504
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.81325E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-8.24213E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.41097E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.56267E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.59157E-8
mult1=-1.57607E-8
mult2=-2.76851E-9
rf_tmon=-4.4944E-3
rf_agc=3.34057E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=6.01614E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6773E0
bslens_imon=2.27047E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19214E1
lens5a_imon=2.01555E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53955E1
cs_ef1b_imon=2.82073E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04577E1
cs_ea1_imon=2.53525E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0128E0
lens1_imon=1.4918E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65042E1
os_ef1alow_imon=2.99022E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03847E1
cs_ea2_imon=1.47466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84403E1
cs_ef1a_imon=2.92334E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.31452E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11176E1
os_restr1_imon=4.26335E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15213E1
os_ea1_imon=2.36596E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63856E1
os_ef1bup_imon=3.08115E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25789E0
cs_ionrep_imon=1.18787E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93437E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01974E1
cs_anode1_imon=2.95943E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=4.00408E-8
tplens_vset=1.4E-1
tplens_vmon=1.6704E0
tplens_imon=-2.8454E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.49864E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.54453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98134E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=9.10723E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2857E0
ionrepsh_imon=1.78821E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34185E1
lens5b_imon=2.15912E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7469E1
cs_ef2b_imon=3.13175E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5076E0
os_ea2_imon=-7.46875E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00682E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.17315E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.52763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02928E-1
os_ef2bup_imon=-5.29469E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11064E1
os_restr2_imon=3.41943E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.2826E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01733E1
cs_anode2_imon=2.24679E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.08671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.09432E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.11659E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.71534E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14253E0
cs_ionaccel_imon=-1.85179E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47276E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56258E1
einzel_imon=7.74092E-6
window_vset=0.0E0
window_vmon=2.31966E-1
window_imon=-7.018E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39162E-4
mask2_vset=0.0E0
mask2_vmon=-1.86067E1
mask2_imon=-8.07953E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.40135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.85211E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.2623E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13969E0
defgridb_imon=6.04911E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.4219E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06804E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65279E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.95172E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66679E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81716E-2
os_fil2_imon=-2.51427E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03262E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.17978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33783E-1
cs_fil2_imon=-2.6735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47244E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22485E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20286E-1
res40_imon=-2.48871E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.038E3	1.0E0	1.47E2	4.1E1	-7.11597E-2	-8.80026E1	-3.8147E-4	-8.80009E1	4.29153E-4	4.22001E-3	9.50575E-2	2.73237E1	-3.26681E1	-3.2635E1	2.68601E1	1.19749E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99686E-1
2.0E0	1.07577E5	1.11E2	3.16E2	1.6E2	-7.06187E-2	-8.80023E1	-3.57628E-4	-8.80007E1	0.0E0	4.43459E-3	9.5129E-2	2.73201E1	-3.26729E1	-3.26278E1	2.6834E1	1.198E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.01738E-1
3.0E0	1.6E1	1.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80024E1	-4.76837E-4	-8.80009E1	1.90735E-4	4.45843E-3	9.46999E-2	2.7321E1	-3.26815E1	-3.26207E1	2.6819E1	1.20191E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.00942E-1
4.0E0	2.3294E4	1.4E1	6.55E2	3.98E2	-7.18554E-2	-8.80024E1	-4.05312E-4	-8.80011E1	1.90735E-4	4.43459E-3	9.51767E-2	2.73424E1	-3.26326E1	-3.26675E1	2.68268E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80022E1	-5.24521E-4	-8.80008E1	3.8147E-4	4.43459E-3	9.52244E-2	2.73381E1	-3.26609E1	-3.2635E1	2.684E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.11597E-2	-8.80021E1	-5.96046E-4	-8.80009E1	4.52995E-4	4.43459E-3	9.52005E-2	2.73267E1	-3.25966E1	-3.26284E1	2.6795E1	1.19913E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80021E1	-4.76837E-4	-8.80009E1	4.05312E-4	4.22001E-3	9.48429E-2	2.73357E1	-3.26524E1	-3.26224E1	2.68376E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80021E1	-4.76837E-4	-8.80006E1	2.86102E-4	4.33922E-3	9.51052E-2	2.73201E1	-3.26651E1	-3.2635E1	2.68412E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80021E1	-3.09944E-4	-8.80007E1	3.57628E-4	4.07696E-3	9.49144E-2	2.73246E1	-3.26396E1	-3.26248E1	2.6847E1	1.20122E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.03185E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.08504E-2	-8.80019E1	-3.8147E-4	-8.80009E1	6.19888E-4	4.12464E-3	9.4986E-2	2.73039E1	-3.26446E1	-3.26482E1	2.68328E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
1.4E1	3.562E3	2.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80021E1	2.38419E-5	-8.80007E1	4.52995E-4	4.60148E-3	9.4986E-2	2.73544E1	-3.26398E1	-3.26651E1	2.68556E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.5E1	1.13E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.8002E1	-2.38419E-5	-8.80006E1	3.33786E-4	4.64916E-3	9.52482E-2	2.73387E1	-3.26512E1	-3.26482E1	2.68502E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01871E-1
1.6E1	4.96E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80022E1	-2.6226E-4	-8.80009E1	4.52995E-4	4.64916E-3	9.51052E-2	2.7364E1	-3.26554E1	-3.25918E1	2.6828E1	1.19978E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.99879E-1
1.7E1	8.88E2	2.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80021E1	-3.33786E-4	-8.80008E1	2.6226E-4	4.3869E-3	9.4986E-2	2.73417E1	-3.26236E1	-3.2647E1	2.6828E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
1.8E1	3.62E3	1.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80023E1	-7.15256E-5	-8.80007E1	3.33786E-4	4.26769E-3	9.53674E-2	2.73493E1	-3.26549E1	-3.26183E1	2.68382E1	1.20174E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01085E-1
1.9E1	2.04E3	1.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80023E1	-1.66893E-4	-8.80011E1	3.8147E-4	4.64916E-3	9.52005E-2	2.73231E1	-3.26506E1	-3.2623E1	2.68689E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
2.0E1	2.6489E4	1.7E1	8.08E2	5.58E2	-7.22418E-2	-8.80023E1	-5.96046E-4	-8.8001E1	6.67572E-4	4.43459E-3	9.51529E-2	2.73076E1	-3.26803E1	-3.2626E1	2.68356E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98481E-1
2.1E1	5.8E1	2.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80022E1	-3.57628E-4	-8.80008E1	5.24521E-4	4.62532E-3	9.54628E-2	2.73269E1	-3.26797E1	-3.26531E1	2.67995E1	1.20255E-7	2.51867E-3	2.51867E-3	6.31666E-3	2.99845E-1
2.2E1	1.805E3	1.0E0	8.89E2	6.17E2	-7.11597E-2	-8.80023E1	-2.86102E-4	-8.80009E1	5.48363E-4	4.60148E-3	9.54628E-2	2.73163E1	-3.26667E1	-3.25965E1	2.68304E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.8002E1	-2.86102E-4	-8.80011E1	5.48363E-4	4.31538E-3	9.50575E-2	2.73399E1	-3.26921E1	-3.26128E1	2.68556E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1