[Scan]
initial_time=2016-01-18T20:43:05
final_time=2016-01-18T20:43:25
ip_count=19
run=1024
dataset=7
scan=505
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13143E-2
qbias_imon=-3.76549E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.8907E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.39517E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.56314E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.59398E-8
mult1=-1.65924E-8
mult2=-2.73698E-9
rf_tmon=-4.3856E-3
rf_agc=3.10498E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=5.25641E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.43354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19252E1
lens5a_imon=2.01872E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53939E1
cs_ef1b_imon=2.82613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04498E1
cs_ea1_imon=2.56167E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01059E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6495E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.49029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.92136E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.31311E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.26176E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.36594E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.18979E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=2.95958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=4.00345E-8
tplens_vset=1.4E-1
tplens_vmon=1.66562E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.48356E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26296E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.52578E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.7522E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53643E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.16601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06846E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.40789E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29291E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.23847E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68111E1
iondef4_imon=1.10484E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.05264E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.72655E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.76137E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-8.89085E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86303E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.98876E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.4165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65209E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30881E1
cs_fil1_imon=9.95418E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63055E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66589E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.77924E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.2963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.61126E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52256E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.075E3	2.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80018E1	-4.05312E-4	-8.80011E1	4.29153E-4	4.48227E-3	9.5129E-2	2.73285E1	-3.26759E1	-3.26302E1	2.68412E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00197E-1
2.0E0	1.06887E5	1.11E2	3.16E2	1.6E2	-7.286E-2	-8.80019E1	-3.09944E-4	-8.80009E1	5.00679E-4	4.31538E-3	9.50813E-2	2.73069E1	-3.26717E1	-3.26122E1	2.68677E1	1.20226E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00302E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80021E1	-3.33786E-4	-8.8001E1	3.33786E-4	4.45843E-3	9.51052E-2	2.73227E1	-3.26328E1	-3.26015E1	2.68123E1	1.20031E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.01209E-1
4.0E0	2.3176E4	1.0E1	6.55E2	3.98E2	-7.15461E-2	-8.80023E1	-3.09944E-4	-8.80009E1	5.00679E-4	4.3869E-3	9.52482E-2	2.73825E1	-3.26335E1	-3.26491E1	2.68718E1	1.20325E-7	2.52197E-3	2.52197E-3	6.323E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80022E1	-3.8147E-4	-8.80011E1	5.00679E-4	4.74453E-3	9.53197E-2	2.7324E1	-3.26514E1	-3.26189E1	2.68673E1	1.20137E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80023E1	-2.14577E-4	-8.80013E1	4.05312E-4	4.81606E-3	9.56297E-2	2.72954E1	-3.26437E1	-3.26106E1	2.6836E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.8002E1	-4.29153E-4	-8.80011E1	5.24521E-4	5.03063E-3	9.54628E-2	2.73291E1	-3.265E1	-3.26046E1	2.68192E1	1.19831E-7	2.52301E-3	2.52301E-3	6.3126E-3	3.0E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80022E1	-1.66893E-4	-8.80011E1	4.52995E-4	4.60148E-3	9.54151E-2	2.72943E1	-3.26597E1	-3.2593E1	2.68418E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32518E-3	3.00479E-1
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80023E1	-5.24521E-4	-8.80007E1	4.76837E-4	4.41074E-3	9.52482E-2	2.73287E1	-3.26596E1	-3.26071E1	2.68742E1	1.20174E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02133E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80021E1	-7.62939E-4	-8.80007E1	5.24521E-4	4.50611E-3	9.53436E-2	2.73327E1	-3.27017E1	-3.26182E1	2.68587E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
1.4E1	3.495E3	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80018E1	-4.52995E-4	-8.80008E1	5.96046E-4	4.43459E-3	9.5129E-2	2.73363E1	-3.26506E1	-3.26218E1	2.68304E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.8002E1	-3.57628E-4	-8.8001E1	1.19209E-4	4.60148E-3	9.52721E-2	2.73358E1	-3.26779E1	-3.26172E1	2.68448E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
1.6E1	4.72E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.8002E1	-4.52995E-4	-8.8001E1	4.29153E-4	4.50611E-3	9.55105E-2	2.73253E1	-3.26664E1	-3.26046E1	2.681E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
1.7E1	9.01E2	1.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80029E1	-4.76837E-4	-8.8001E1	2.38419E-4	4.33922E-3	9.51052E-2	2.73544E1	-3.26645E1	-3.26308E1	2.68424E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.8E1	3.66E3	1.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80022E1	-5.96046E-4	-8.8001E1	3.8147E-4	4.31538E-3	9.50813E-2	2.73193E1	-3.26744E1	-3.26065E1	2.68418E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
1.9E1	2.058E3	0.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80025E1	-2.6226E-4	-8.80009E1	3.09944E-4	4.43459E-3	9.50813E-2	2.72991E1	-3.26585E1	-3.26236E1	2.68689E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1
2.0E1	2.6161E4	1.2E1	8.08E2	5.58E2	-7.09279E-2	-8.80023E1	-3.33786E-4	-8.80006E1	6.4373E-4	4.36306E-3	9.50575E-2	2.73476E1	-3.26697E1	-3.26183E1	2.68563E1	1.19965E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.02396E-1
2.1E1	6.8E1	0.0E0	8.49E2	5.88E2	-7.10825E-2	-8.8002E1	-2.38419E-4	-8.80008E1	4.05312E-4	3.95775E-3	9.5129E-2	2.72811E1	-3.26807E1	-3.2638E1	2.68696E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.2E1	1.805E3	0.0E0	8.89E2	6.17E2	-7.0464E-2	-8.80021E1	-3.8147E-4	-8.80007E1	5.48363E-4	4.41074E-3	9.52244E-2	2.73387E1	-3.27068E1	-3.26183E1	2.68154E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.13143E-2	-8.80023E1	0.0E0	-8.80006E1	1.90735E-4	3.95775E-3	9.52721E-2	2.73216E1	-3.26296E1	-3.26071E1	2.68111E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.0071E-1