[Scan]
initial_time=2016-01-18T20:43:32
final_time=2016-01-18T20:43:53
ip_count=19
run=1024
dataset=7
scan=506
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.7862E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.97462E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.39811E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.61487E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.59709E-8
mult1=-2.00351E-8
mult2=-2.60683E-9
rf_tmon=-4.45835E-3
rf_agc=3.31593E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.34308E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.81953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04563E1
cs_ea1_imon=2.53335E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98995E0
lens1_imon=1.60531E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.97974E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.51789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.91336E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.3135E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.26246E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.3447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63201E1
os_ef1bup_imon=3.07183E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20845E0
cs_ionrep_imon=1.20112E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93643E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.96827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=4.00826E-8
tplens_vset=1.4E-1
tplens_vmon=1.68627E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.54515E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.07183E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.79361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33475E1
lens5b_imon=2.1603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47036E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.1674E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.42862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09973E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1139E1
os_restr2_imon=3.41171E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.23638E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.11546E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.08955E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.97793E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.73206E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.8199E-6
window_vset=0.0E0
window_vmon=2.50122E-1
window_imon=-7.22272E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.39053E-4
mask2_vset=0.0E0
mask2_vmon=-1.86489E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.74808E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50182E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=5.9871E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.42768E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65171E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.95366E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63136E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66635E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.68646E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.21531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.48384E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.48146E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22536E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.31404E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.958E3	2.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80023E1	-8.34465E-4	-8.80004E1	5.48363E-4	4.57764E-3	9.52005E-2	2.73246E1	-3.26472E1	-3.26325E1	2.68478E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
2.0E0	1.07189E5	8.9E1	3.16E2	1.6E2	-7.18554E-2	-8.80023E1	-2.86102E-4	-8.80009E1	8.82149E-4	4.22001E-3	9.51529E-2	2.73219E1	-3.26879E1	-3.25918E1	2.67992E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99941E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.8002E1	-6.67572E-4	-8.80007E1	7.15256E-4	4.57764E-3	9.50813E-2	2.73576E1	-3.2675E1	-3.26107E1	2.68319E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
4.0E0	2.3484E4	1.6E1	6.55E2	3.98E2	-7.11597E-2	-8.80023E1	-8.58307E-4	-8.80009E1	6.67572E-4	4.45843E-3	9.53674E-2	2.73375E1	-3.26667E1	-3.26006E1	2.68418E1	1.20209E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.8002E1	-5.72205E-4	-8.80012E1	6.4373E-4	4.43459E-3	9.53436E-2	2.73297E1	-3.26903E1	-3.26242E1	2.68424E1	1.20158E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80021E1	-5.96046E-4	-8.80008E1	4.76837E-4	4.52995E-3	9.52721E-2	2.73015E1	-3.26825E1	-3.26092E1	2.68683E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.8002E1	-7.15256E-4	-8.80008E1	3.57628E-4	4.50611E-3	9.54628E-2	2.73117E1	-3.26693E1	-3.2629E1	2.68412E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80021E1	-7.15256E-4	-8.80008E1	3.09944E-4	4.62532E-3	9.51529E-2	2.73177E1	-3.26488E1	-3.2617E1	2.68262E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
1.2E1	1.08E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80021E1	-5.72205E-4	-8.80009E1	4.76837E-4	4.72069E-3	9.51767E-2	2.73393E1	-3.27068E1	-3.259E1	2.68209E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80023E1	-7.39098E-4	-8.80009E1	6.4373E-4	4.72069E-3	9.52244E-2	2.73617E1	-3.2649E1	-3.26413E1	2.68352E1	1.20055E-7	2.51578E-3	2.51578E-3	6.31009E-3	2.99302E-1
1.4E1	3.54E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80023E1	-5.48363E-4	-8.80008E1	3.8147E-4	4.74453E-3	9.5439E-2	2.73496E1	-3.26849E1	-3.26296E1	2.68034E1					
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.06187E-2	-8.80026E1	-6.4373E-4	-8.80008E1	6.19888E-4	4.673E-3	9.50336E-2	2.73117E1	-3.26633E1	-3.262E1	2.6855E1	1.20278E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.99E-1
1.6E1	4.37E2	0.0E0	6.47E2	4.41E2	-7.09279E-2	-8.80026E1	-2.6226E-4	-8.80006E1	5.24521E-4	4.55379E-3	9.52005E-2	2.73285E1	-3.26753E1	-3.26422E1	2.68635E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
1.7E1	8.83E2	1.0E0	6.87E2	4.7E2	-7.0464E-2	-8.80024E1	-2.38419E-5	-8.8001E1	5.24521E-4	4.60148E-3	9.51529E-2	2.73216E1	-3.26579E1	-3.26136E1	2.6843E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.8E1	3.73E3	5.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80022E1	-1.19209E-4	-8.8001E1	5.48363E-4	4.48227E-3	9.51529E-2	2.73267E1	-3.26627E1	-3.26302E1	2.68196E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
1.9E1	2.093E3	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80026E1	-2.6226E-4	-8.80009E1	5.72205E-4	4.50611E-3	9.48668E-2	2.73544E1	-3.26561E1	-3.26549E1	2.68833E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00041E-1
2.0E1	2.6166E4	1.7E1	8.08E2	5.58E2	-7.10051E-2	-8.80026E1	-3.8147E-4	-8.80007E1	5.48363E-4	4.76837E-3	9.50098E-2	2.73311E1	-3.2675E1	-3.26042E1	2.68316E1	1.20122E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.9874E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80027E1	-7.15256E-5	-8.80007E1	8.82149E-4	4.48227E-3	9.52005E-2	2.7298E1	-3.26614E1	-3.26042E1	2.68377E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
2.2E1	1.878E3	1.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80027E1	-3.33786E-4	-8.80008E1	5.72205E-4	4.57764E-3	9.5439E-2	2.73464E1	-3.26667E1	-3.26189E1	2.68442E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80026E1	-4.76837E-4	-8.80013E1	5.00679E-4	4.50611E-3	9.5129E-2	2.73075E1	-3.26549E1	-3.26284E1	2.6822E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1