[Scan]
initial_time=2016-01-18T20:44:55
final_time=2016-01-18T20:45:15
ip_count=19
run=1024
dataset=7
scan=509
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.79097E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.63142E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.39447E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.51468E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.59301E-8
mult1=-2.11549E-8
mult2=-2.51301E-9
rf_tmon=-4.60255E-3
rf_agc=3.27388E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.64468E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64524E0
bslens_imon=2.49164E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19499E1
lens5a_imon=1.99456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.0495E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54216E1
cs_ef1b_imon=2.81635E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04768E1
cs_ea1_imon=2.53522E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01512E0
lens1_imon=1.62114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64739E1
os_ef1alow_imon=2.97354E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03751E1
cs_ea2_imon=1.5134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.9189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.31248E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.25612E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15257E1
os_ea1_imon=2.36149E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63648E1
os_ef1bup_imon=3.08095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24169E0
cs_ionrep_imon=1.17659E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93585E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01534E1
cs_anode1_imon=2.97466E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=4.00521E-8
tplens_vset=1.4E-1
tplens_vmon=1.65612E0
tplens_imon=-3.07168E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25791E1
iondef3_imon=1.49724E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.56703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98089E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=8.9848E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27414E0
ionrepsh_imon=1.7628E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33731E1
lens5b_imon=2.17527E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74888E1
cs_ef2b_imon=3.11688E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47615E0
os_ea2_imon=-7.62616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00476E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71083E1
cs_ef2a_imon=3.17077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06766E0
os_ef2alow_imon=-2.63794E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2882E-1
os_ef2bup_imon=-5.34008E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11254E1
os_restr2_imon=3.42414E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.30663E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.21379E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.09101E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.0869E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.05047E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.72341E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15197E0
cs_ionaccel_imon=-1.852E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47361E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5658E1
einzel_imon=7.81134E-6
window_vset=0.0E0
window_vmon=2.48785E-1
window_imon=-9.98689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86388E1
mask2_imon=-8.78926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.60809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.40702E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.38036E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37291E0
defgridb_imon=5.96994E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.42339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06144E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65157E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.95783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62927E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66647E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60737E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.27331E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35164E-1
cs_fil2_imon=-2.24458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.43047E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50028E-1
res40_imon=-2.44332E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.083E3	2.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80022E1	-5.96046E-4	-8.80009E1	1.90735E-4	4.3869E-3	9.53674E-2	2.73417E1	-3.26767E1	-3.26349E1	2.6829E1	1.20208E-7	2.52407E-3	2.52407E-3	6.3074E-3	3.00794E-1
2.0E0	1.06876E5	9.8E1	3.16E2	1.6E2	-7.14689E-2	-8.8002E1	-2.86102E-4	-8.80009E1	5.72205E-4	4.72069E-3	9.53674E-2	2.73277E1	-3.26383E1	-3.2615E1	2.68176E1	1.20004E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99175E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80021E1	-1.90735E-4	-8.80009E1	3.33786E-4	4.33922E-3	9.50575E-2	2.73364E1	-3.26869E1	-3.26141E1	2.68501E1	1.19872E-7	2.51915E-3	2.51915E-3	6.35223E-3	2.9829E-1
4.0E0	2.3314E4	1.4E1	6.55E2	3.98E2	-7.15461E-2	-8.80021E1	-3.09944E-4	-8.80009E1	3.57628E-4	4.26769E-3	9.52959E-2	2.72821E1	-3.26425E1	-3.26272E1	2.68454E1	1.20226E-7	2.51575E-3	2.51575E-3	6.29703E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.09279E-2	-8.80022E1	-9.53674E-5	-8.80011E1	2.6226E-4	4.31538E-3	9.52482E-2	2.73063E1	-3.26419E1	-3.2648E1	2.68496E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10825E-2	-8.80021E1	-1.43051E-4	-8.80008E1	4.29153E-4	4.62532E-3	9.51767E-2	2.73092E1	-3.26425E1	-3.26325E1	2.6831E1	1.20269E-7	2.51755E-3	2.51755E-3	6.31827E-3	3.01804E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.06187E-2	-8.80023E1	-3.57628E-4	-8.80009E1	4.76837E-4	4.673E-3	9.52005E-2	2.73302E1	-3.2656E1	-3.2607E1	2.68268E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80024E1	-6.67572E-4	-8.8001E1	6.4373E-4	4.43459E-3	9.50336E-2	2.73529E1	-3.26319E1	-3.26172E1	2.68316E1	1.19766E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.02545E-1
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.11597E-2	-8.80021E1	-1.43051E-4	-8.80008E1	9.05991E-4	4.48227E-3	9.52244E-2	2.73177E1	-3.26645E1	-3.26278E1	2.68484E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.06187E-2	-8.80021E1	-3.33786E-4	-8.80008E1	2.86102E-4	4.57764E-3	9.52482E-2	2.72943E1	-3.26422E1	-3.26687E1	2.6849E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
1.4E1	3.412E3	1.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80021E1	-7.39098E-4	-8.80011E1	4.29153E-4	4.22001E-3	9.53436E-2	2.73428E1	-3.26679E1	-3.2626E1	2.68209E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00041E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80019E1	-5.48363E-4	-8.80009E1	6.19888E-4	4.36306E-3	9.52005E-2	2.73508E1	-3.26512E1	-3.26663E1	2.68262E1	1.198E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.98156E-1
1.6E1	4.49E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80019E1	-5.72205E-4	-8.80012E1	5.00679E-4	4.36306E-3	9.52482E-2	2.73339E1	-3.26759E1	-3.26044E1	2.68502E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99686E-1
1.7E1	8.64E2	4.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80019E1	-3.33786E-4	-8.80008E1	4.52995E-4	4.45843E-3	9.5439E-2	2.73404E1	-3.26596E1	-3.26351E1	2.68511E1	1.19978E-7	2.51025E-3	2.51025E-3	6.31299E-3	3.01209E-1
1.8E1	3.544E3	2.0E0	7.27E2	5.0E2	-7.05415E-2	-8.8002E1	-4.29153E-4	-8.80007E1	5.96046E-4	4.36306E-3	9.55105E-2	2.734E1	-3.26884E1	-3.26098E1	2.68232E1	1.1993E-7	2.51472E-3	2.51472E-3	6.33341E-3	3.00741E-1
1.9E1	2.092E3	0.0E0	7.68E2	5.29E2	-7.06187E-2	-8.80025E1	-6.91414E-4	-8.80009E1	3.33786E-4	4.55379E-3	9.52721E-2	2.73265E1	-3.26425E1	-3.26211E1	2.68334E1	1.19937E-7	2.51384E-3	2.51384E-3	6.30171E-3	2.9971E-1
2.0E1	2.6552E4	1.0E1	8.08E2	5.58E2	-7.03094E-2	-8.80026E1	-4.05312E-4	-8.80007E1	5.24521E-4	4.41074E-3	9.50813E-2	2.73269E1	-3.26632E1	-3.26048E1	2.6825E1	1.19965E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02133E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-6.98458E-2	-8.80024E1	-4.76837E-4	-8.80011E1	4.29153E-4	4.33922E-3	9.5129E-2	2.73428E1	-3.26927E1	-3.26036E1	2.68516E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00824E-1
2.2E1	1.932E3	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80023E1	-8.34465E-4	-8.80011E1	6.4373E-4	4.673E-3	9.50098E-2	2.73122E1	-3.26638E1	-3.26543E1	2.68508E1	1.19749E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01995E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80022E1	-4.76837E-4	-8.80009E1	4.05312E-4	4.43459E-3	9.53674E-2	2.73099E1	-3.26795E1	-3.25791E1	2.68208E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.02253E-1