[Scan]
initial_time=2016-01-18T20:45:23
final_time=2016-01-18T20:45:43
ip_count=19
run=1024
dataset=7
scan=510
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.764E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.83312E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.43481E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.54228E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.59087E-8
mult1=-1.98304E-8
mult2=-2.76452E-9
rf_tmon=-5.65399E-3
rf_agc=3.22641E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.63955E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.46539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19465E1
lens5a_imon=2.0127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.80214E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04422E1
cs_ea1_imon=2.53901E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99172E0
lens1_imon=1.38233E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03519E1
cs_ea2_imon=1.48533E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.92648E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.31397E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.25382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.38222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=1.19687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.96216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=4.01395E-8
tplens_vset=1.4E-1
tplens_vmon=1.69452E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.53347E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=9.17423E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=1.78406E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.15888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53702E0
os_ea2_imon=-5.11252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.15173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.40689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72847E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.11346E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.72906E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=8.1603E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.50032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24905E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.4376E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07095E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65084E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.95675E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62906E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66606E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78776E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19506E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.906E3	1.0E0	1.47E2	4.1E1	-7.05415E-2	-8.80023E1	-4.05312E-4	-8.80008E1	1.19209E-4	4.52995E-3	9.52959E-2	2.73532E1	-3.26711E1	-3.26122E1	2.68047E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00453E-1
2.0E0	1.06159E5	1.02E2	3.16E2	1.6E2	-7.09279E-2	-8.80023E1	-3.09944E-4	-8.80006E1	2.14577E-4	4.26769E-3	9.53436E-2	2.73411E1	-3.26362E1	-3.26134E1	2.68253E1	1.198E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0071E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.12368E-2	-8.80023E1	-4.05312E-4	-8.80009E1	-2.38419E-5	4.3869E-3	9.50575E-2	2.73028E1	-3.2655E1	-3.26249E1	2.68244E1	1.20297E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00676E-1
4.0E0	2.3381E4	1.5E1	6.55E2	3.98E2	-7.13915E-2	-8.80023E1	-2.86102E-4	-8.80008E1	1.43051E-4	4.43459E-3	9.50098E-2	2.73405E1	-3.26639E1	-3.26392E1	2.68478E1	1.20192E-7	2.51603E-3	2.51603E-3	6.30212E-3	3.006E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80023E1	-4.76837E-4	-8.80006E1	0.0E0	4.31538E-3	9.51529E-2	2.73279E1	-3.26849E1	-3.26068E1	2.68581E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-5.48363E-4	-8.80009E1	1.66893E-4	4.31538E-3	9.53436E-2	2.73225E1	-3.26422E1	-3.26272E1	2.68094E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80022E1	-2.86102E-4	-8.80005E1	2.38419E-5	4.31538E-3	9.5129E-2	2.73454E1	-3.26771E1	-3.25972E1	2.68214E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80022E1	-1.43051E-4	-8.80007E1	2.38419E-4	4.48227E-3	9.5439E-2	2.73147E1	-3.26657E1	-3.26332E1	2.68556E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
1.2E1	1.12E2	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80023E1	7.15256E-5	-8.8001E1	0.0E0	4.45843E-3	9.51529E-2	2.73075E1	-3.26572E1	-3.2656E1	2.68436E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9978E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80021E1	3.09944E-4	-8.80011E1	3.33786E-4	4.57764E-3	9.53436E-2	2.73484E1	-3.26591E1	-3.26416E1	2.68232E1	1.1966E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99879E-1
1.4E1	3.567E3	2.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80023E1	-1.66893E-4	-8.80013E1	2.86102E-4	4.3869E-3	9.53674E-2	2.73099E1	-3.26777E1	-3.26218E1	2.68268E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80021E1	-4.52995E-4	-8.80011E1	5.48363E-4	4.45843E-3	9.55105E-2	2.73375E1	-3.2653E1	-3.26363E1	2.68524E1	1.20106E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.0071E-1
1.6E1	4.76E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80018E1	4.76837E-5	-8.80011E1	6.67572E-4	4.45843E-3	9.54151E-2	2.73247E1	-3.26473E1	-3.26232E1	2.68468E1	1.1997E-7	2.5199E-3	2.5199E-3	6.33887E-3	3.00539E-1
1.7E1	8.85E2	1.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80017E1	2.38419E-5	-8.80011E1	6.4373E-4	4.74453E-3	9.5582E-2	2.73032E1	-3.26642E1	-3.26222E1	2.68212E1	1.20078E-7	2.52197E-3	2.52197E-3	6.3126E-3	2.98031E-1
1.8E1	3.745E3	4.0E0	7.27E2	5.0E2	-7.11597E-2	-8.80019E1	1.66893E-4	-8.80007E1	6.19888E-4	4.43459E-3	9.55105E-2	2.73333E1	-3.26212E1	-3.2611E1	2.68322E1	1.1995E-7	2.51874E-3	2.51874E-3	6.32483E-3	2.99535E-1
1.9E1	2.071E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80019E1	2.38419E-4	-8.80005E1	5.96046E-4	4.36306E-3	9.54151E-2	2.73299E1	-3.26484E1	-3.26284E1	2.6858E1	1.19757E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00824E-1
2.0E1	2.6283E4	1.1E1	8.08E2	5.58E2	-7.11597E-2	-8.80022E1	1.90735E-4	-8.80007E1	5.72205E-4	4.64916E-3	9.53197E-2	2.73225E1	-3.26849E1	-3.26062E1	2.68172E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80022E1	1.90735E-4	-8.80008E1	6.91414E-4	4.33922E-3	9.53197E-2	2.73488E1	-3.26815E1	-3.26266E1	2.68545E1	1.19861E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.99E-1
2.2E1	1.808E3	1.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80018E1	-4.76837E-5	-8.80008E1	5.00679E-4	4.55379E-3	9.52244E-2	2.7278E1	-3.26708E1	-3.26349E1	2.6854E1	1.19891E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.00348E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80021E1	-9.53674E-5	-8.80008E1	9.53674E-5	4.88758E-3	9.53197E-2	2.72847E1	-3.26579E1	-3.26446E1	2.68545E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1