[Scan]
initial_time=2016-01-18T20:46:45
final_time=2016-01-18T20:47:05
ip_count=19
run=1024
dataset=7
scan=513
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81437E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.1485E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.39619E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.47761E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.59336E-8
mult1=-2.34787E-8
mult2=-2.71861E-9
rf_tmon=-5.17333E-3
rf_agc=3.28049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.5759E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.2955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19476E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53848E1
cs_ef1b_imon=2.81329E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04534E1
cs_ea1_imon=2.55069E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97638E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.96651E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.48604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84403E1
cs_ef1a_imon=2.93325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.31576E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.25627E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15093E1
os_ea1_imon=2.38717E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.07655E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01874E1
cs_anode1_imon=2.95908E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=4.00546E-8
tplens_vset=1.4E-1
tplens_vmon=1.66739E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98052E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=9.19879E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=1.76601E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74613E1
cs_ef2b_imon=3.13175E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45797E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71093E1
cs_ef2a_imon=3.15829E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06901E0
os_ef2alow_imon=-2.5241E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92313E-1
os_ef2bup_imon=-5.20977E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11059E1
os_restr2_imon=3.41448E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.27274E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23405E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.10768E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68833E1
iondef4_imon=1.09857E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.03721E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.70798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15019E0
cs_ionaccel_imon=-1.71733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47393E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56458E1
einzel_imon=7.71969E-6
window_vset=0.0E0
window_vmon=2.37863E-1
window_imon=-7.72569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86421E1
mask2_imon=-7.51338E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=7.02061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.2561E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56206E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.42167E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07223E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65154E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.95202E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62796E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66113E-2
os_fil2_imon=-2.80325E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83211E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.26973E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34165E-1
cs_fil2_imon=-1.95402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.34937E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22608E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.97344E-1
chamber_ion_pmon=1.1979E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.37055E-1
res40_imon=-2.50287E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.051E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80023E1	-3.8147E-4	-8.80009E1	7.15256E-5	4.3869E-3	9.51529E-2	2.73187E1	-3.26461E1	-3.25947E1	2.68666E1	1.19941E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.02115E-1
2.0E0	1.07065E5	1.04E2	3.16E2	1.6E2	-7.26282E-2	-8.80021E1	-6.4373E-4	-8.80008E1	3.8147E-4	4.05312E-3	9.5439E-2	2.73219E1	-3.26663E1	-3.26248E1	2.6843E1	1.19902E-7	2.50882E-3	2.50882E-3	6.30202E-3	3.01223E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80024E1	-5.24521E-4	-8.80008E1	5.24521E-4	4.24385E-3	9.50813E-2	2.7337E1	-3.2672E1	-3.26154E1	2.68298E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00942E-1
4.0E0	2.3421E4	6.0E0	6.55E2	3.98E2	-7.201E-2	-8.80023E1	-4.29153E-4	-8.80006E1	2.14577E-4	4.12464E-3	9.52721E-2	2.73116E1	-3.26661E1	-3.2639E1	2.68447E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80025E1	-7.39098E-4	-8.80006E1	4.76837E-4	4.41074E-3	9.51529E-2	2.72898E1	-3.26719E1	-3.2615E1	2.68382E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00197E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80024E1	-4.05312E-4	-8.80006E1	3.09944E-4	4.33922E-3	9.5439E-2	2.73429E1	-3.26777E1	-3.26218E1	2.68238E1	1.20174E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80023E1	-3.09944E-4	-8.80007E1	4.05312E-4	4.72069E-3	9.49621E-2	2.73243E1	-3.26536E1	-3.26176E1	2.68406E1	1.20226E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80025E1	-3.09944E-4	-8.80004E1	3.57628E-4	4.3869E-3	9.49144E-2	2.72945E1	-3.26284E1	-3.2649E1	2.688E1	1.19653E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.97963E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80025E1	-2.86102E-4	-8.80003E1	2.86102E-4	4.673E-3	9.52482E-2	2.73105E1	-3.26524E1	-3.26663E1	2.6816E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9952E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80022E1	-4.29153E-4	-8.80004E1	2.6226E-4	4.57764E-3	9.52005E-2	2.72654E1	-3.26488E1	-3.26573E1	2.68713E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
1.4E1	3.515E3	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80021E1	-2.14577E-4	-8.80004E1	2.38419E-4	4.62532E-3	9.54866E-2	2.73171E1	-3.26717E1	-3.26122E1	2.68418E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02659E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80023E1	-4.05312E-4	-8.80008E1	3.09944E-4	4.62532E-3	9.52959E-2	2.732E1	-3.26657E1	-3.26487E1	2.68187E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.6E1	4.86E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80023E1	-4.05312E-4	-8.80007E1	4.52995E-4	4.52995E-3	9.54151E-2	2.7349E1	-3.26543E1	-3.26681E1	2.68316E1	1.19923E-7	2.5145E-3	2.5145E-3	6.32652E-3	3.01381E-1
1.7E1	9.16E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80025E1	-1.90735E-4	-8.80007E1	3.33786E-4	4.55379E-3	9.52482E-2	2.73213E1	-3.26386E1	-3.26356E1	2.68478E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.8E1	3.738E3	2.0E0	7.27E2	5.0E2	-7.201E-2	-8.80023E1	-5.96046E-4	-8.8001E1	7.15256E-5	4.36306E-3	9.52005E-2	2.73488E1	-3.26992E1	-3.26254E1	2.68314E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00824E-1
1.9E1	2.08E3	2.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80021E1	-5.24521E-4	-8.80007E1	2.14577E-4	4.62532E-3	9.5439E-2	2.73081E1	-3.26615E1	-3.26278E1	2.68064E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
2.0E1	2.6193E4	2.5E1	8.08E2	5.58E2	-7.31692E-2	-8.80021E1	-5.24521E-4	-8.80009E1	5.00679E-4	4.50611E-3	9.54628E-2	2.73482E1	-3.26614E1	-3.26555E1	2.68581E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00453E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80023E1	-3.57628E-4	-8.8001E1	1.19209E-4	4.29153E-3	9.52959E-2	2.73267E1	-3.26933E1	-3.26182E1	2.6825E1	1.19705E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02396E-1
2.2E1	1.881E3	2.0E0	8.89E2	6.17E2	-7.17779E-2	-8.8002E1	-4.05312E-4	-8.80009E1	2.38419E-4	4.55379E-3	9.50098E-2	2.7308E1	-3.26868E1	-3.26242E1	2.68377E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80023E1	-1.66893E-4	-8.80009E1	2.86102E-4	4.62532E-3	9.53674E-2	2.73357E1	-3.26549E1	-3.26242E1	2.68833E1	1.1979E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.97344E-1