[Scan]
initial_time=2016-01-18T20:47:12
final_time=2016-01-18T20:47:33
ip_count=19
run=1024
dataset=7
scan=514
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.77823E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.90484E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.37477E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.34957E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.59609E-8
mult1=-2.28933E-8
mult2=-2.86828E-9
rf_tmon=-4.58026E-3
rf_agc=3.40465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.59771E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.32028E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=2.00916E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=2.81476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04339E1
cs_ea1_imon=2.56273E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97992E0
lens1_imon=1.60885E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.48002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.92179E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.31242E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11664E1
os_restr1_imon=4.25706E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=2.39107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62963E1
os_ef1bup_imon=3.06487E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=1.20926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.95711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.00168E-8
tplens_vset=1.4E-1
tplens_vmon=1.66444E0
tplens_imon=-4.33385E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2682E1
iondef2_imon=1.55789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98123E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.2572E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=1.76884E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33899E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53761E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01552E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.11865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68511E1
iondef4_imon=1.10684E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.05779E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.69476E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16678E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.48602E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.87007E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.18177E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.05954E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.42264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06903E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64934E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.94251E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66352E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88906E-2
os_fil2_imon=-2.81013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.36464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64698E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.001E3	0.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80024E1	-2.14577E-4	-8.80009E1	2.86102E-4	4.64916E-3	9.50098E-2	2.72892E1	-3.2639E1	-3.26201E1	2.68418E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1
2.0E0	1.06274E5	1.05E2	3.16E2	1.6E2	-7.17007E-2	-8.80025E1	-5.72205E-4	-8.8001E1	5.00679E-4	4.62532E-3	9.48906E-2	2.73424E1	-3.26731E1	-3.26223E1	2.68496E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00966E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80025E1	-4.76837E-4	-8.80011E1	4.05312E-4	4.81606E-3	9.51529E-2	2.73145E1	-3.26419E1	-3.26296E1	2.6816E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
4.0E0	2.3779E4	1.1E1	6.55E2	3.98E2	-7.14689E-2	-8.80022E1	-4.29153E-4	-8.80008E1	3.33786E-4	4.45843E-3	9.50575E-2	2.73135E1	-3.26621E1	-3.26675E1	2.68178E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80023E1	-4.05312E-4	-8.80009E1	3.33786E-4	4.60148E-3	9.50813E-2	2.73243E1	-3.26801E1	-3.25924E1	2.68548E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80023E1	-6.67572E-4	-8.80007E1	3.09944E-4	4.91142E-3	9.55105E-2	2.73021E1	-3.26113E1	-3.26667E1	2.6807E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.04505E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13143E-2	-8.80023E1	-5.00679E-4	-8.80006E1	4.29153E-4	4.69685E-3	9.52482E-2	2.73315E1	-3.26651E1	-3.26344E1	2.68556E1	1.19953E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80023E1	-4.05312E-4	-8.80008E1	5.24521E-4	4.8399E-3	9.52721E-2	2.73387E1	-3.2635E1	-3.26277E1	2.68429E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00302E-1
1.2E1	1.0E2	1.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80025E1	-3.8147E-4	-8.80008E1	3.09944E-4	4.31538E-3	9.54628E-2	2.72837E1	-3.26649E1	-3.26312E1	2.68549E1	1.20226E-7	2.51886E-3	2.51886E-3	6.33341E-3	2.9926E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80023E1	-4.05312E-4	-8.80009E1	5.96046E-4	4.36306E-3	9.5129E-2	2.73187E1	-3.26744E1	-3.26319E1	2.68208E1	1.1995E-7	2.51874E-3	2.51874E-3	6.3074E-3	3.00639E-1
1.4E1	3.404E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80025E1	-4.05312E-4	-8.8001E1	5.24521E-4	4.52995E-3	9.4986E-2	2.73417E1	-3.26815E1	-3.26213E1	2.68041E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80025E1	-3.09944E-4	-8.80008E1	4.76837E-4	4.57764E-3	9.53913E-2	2.73641E1	-3.26844E1	-3.25694E1	2.68514E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99941E-1
1.6E1	4.71E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80023E1	-2.86102E-4	-8.80006E1	5.24521E-4	4.673E-3	9.48906E-2	2.73412E1	-3.26989E1	-3.25715E1	2.68004E1	1.19965E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
1.7E1	9.35E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80025E1	-6.19888E-4	-8.80007E1	5.96046E-4	4.36306E-3	9.50813E-2	2.73327E1	-3.26446E1	-3.26308E1	2.68478E1	1.19913E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00563E-1
1.8E1	3.642E3	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80024E1	-5.24521E-4	-8.80005E1	4.52995E-4	4.48227E-3	9.53197E-2	2.73228E1	-3.26543E1	-3.26225E1	2.68052E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1
1.9E1	2.11E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80023E1	-6.67572E-4	-8.80008E1	3.8147E-4	4.55379E-3	9.50575E-2	2.73201E1	-3.26416E1	-3.26398E1	2.68372E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9943E-1
2.0E1	2.6279E4	7.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80023E1	-7.15256E-4	-8.80009E1	2.14577E-4	4.57764E-3	9.49383E-2	2.73339E1	-3.26807E1	-3.26182E1	2.68388E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80025E1	-4.76837E-4	-8.80014E1	5.96046E-4	4.48227E-3	9.51529E-2	2.73034E1	-3.26544E1	-3.26474E1	2.68569E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
2.2E1	1.87E3	1.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80023E1	-5.72205E-4	-8.80013E1	4.05312E-4	4.36306E-3	9.51767E-2	2.73532E1	-3.26759E1	-3.26458E1	2.67998E1	1.19697E-7	2.51632E-3	2.51632E-3	6.28056E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80021E1	-5.72205E-4	-8.80009E1	6.91414E-4	4.36306E-3	9.50336E-2	2.73322E1	-3.2682E1	-3.26296E1	2.68511E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1