[Scan]
initial_time=2016-01-18T20:47:40
final_time=2016-01-18T20:48:00
ip_count=19
run=1024
dataset=7
scan=515
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.84289E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.46524E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.35312E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.37134E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.59091E-8
mult1=-1.52017E-8
mult2=-2.82901E-9
rf_tmon=-4.69337E-3
rf_agc=3.3142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.50151E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.38398E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04792E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.80142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=2.56591E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98346E0
lens1_imon=1.49559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.48746E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.91783E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.31097E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.26355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=2.37656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.95711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=4.00615E-8
tplens_vset=1.4E-1
tplens_vmon=1.67506E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=8.95488E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=1.76318E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48275E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.15533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.28017E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73226E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68525E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.04693E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.7071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56669E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.741E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.4209E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0647E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64965E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.95302E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66448E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.35705E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22515E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=3.01237E-1
chamber_ion_pmon=1.20028E-7
chamber_cvt_pmon=2.52509E-3
foreline_cvt_pmon=2.52509E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.1186E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.015E3	2.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80027E1	-3.57628E-4	-8.8001E1	4.29153E-4	4.62532E-3	9.5129E-2	2.73228E1	-3.2659E1	-3.2629E1	2.68192E1	1.19851E-7	2.5131E-3	2.5131E-3	6.35059E-3	3.02253E-1
2.0E0	1.0647E5	1.02E2	3.16E2	1.6E2	-7.30146E-2	-8.80025E1	-9.53674E-5	-8.80009E1	2.86102E-4	4.22001E-3	9.52244E-2	2.73161E1	-3.26236E1	-3.26401E1	2.686E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80024E1	-9.53674E-5	-8.80012E1	3.33786E-4	4.3869E-3	9.52721E-2	2.73181E1	-3.26726E1	-3.26366E1	2.68406E1	1.20114E-7	2.52297E-3	2.52297E-3	6.30469E-3	2.99088E-1
4.0E0	2.3193E4	2.0E1	6.55E2	3.98E2	-7.37874E-2	-8.80024E1	9.53674E-5	-8.80012E1	2.86102E-4	3.91006E-3	9.53674E-2	2.73466E1	-3.26603E1	-3.26657E1	2.68382E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80021E1	7.15256E-5	-8.80012E1	5.24521E-4	4.24385E-3	9.52959E-2	2.73364E1	-3.26431E1	-3.26219E1	2.67986E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80022E1	-7.15256E-5	-8.80011E1	4.05312E-4	4.29153E-3	9.52482E-2	2.73669E1	-3.2708E1	-3.26401E1	2.68587E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80023E1	-2.6226E-4	-8.8001E1	0.0E0	4.57764E-3	9.50098E-2	2.7288E1	-3.26467E1	-3.2613E1	2.681E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80022E1	-3.57628E-4	-8.8001E1	3.33786E-4	4.62532E-3	9.50813E-2	2.73393E1	-3.26651E1	-3.25996E1	2.68274E1	1.19601E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80021E1	-5.48363E-4	-8.80009E1	7.15256E-5	4.17233E-3	9.51052E-2	2.72973E1	-3.26344E1	-3.26627E1	2.68528E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02922E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80024E1	-5.00679E-4	-8.80009E1	2.6226E-4	4.22001E-3	9.51529E-2	2.73069E1	-3.26526E1	-3.26419E1	2.68671E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01995E-1
1.4E1	3.45E3	1.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80024E1	-1.43051E-4	-8.80011E1	9.53674E-5	4.22001E-3	9.53913E-2	2.73458E1	-3.26885E1	-3.26154E1	2.68334E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9892E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80023E1	-5.96046E-4	-8.80009E1	3.09944E-4	4.48227E-3	9.51529E-2	2.73227E1	-3.26693E1	-3.26215E1	2.68334E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
1.6E1	4.73E2	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80023E1	-2.6226E-4	-8.8001E1	2.6226E-4	4.33922E-3	9.52244E-2	2.73243E1	-3.26476E1	-3.26609E1	2.68334E1	1.1993E-7	2.52717E-3	2.52717E-3	6.29703E-3	2.99506E-1
1.7E1	9.57E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80027E1	-1.90735E-4	-8.8001E1	3.33786E-4	4.52995E-3	9.52482E-2	2.73273E1	-3.26326E1	-3.26176E1	2.68532E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9926E-1
1.8E1	3.737E3	1.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80027E1	-1.90735E-4	-8.80008E1	1.43051E-4	4.31538E-3	9.51529E-2	2.73502E1	-3.26777E1	-3.26284E1	2.68376E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02396E-1
1.9E1	2.068E3	4.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80022E1	-3.33786E-4	-8.80011E1	7.15256E-5	4.43459E-3	9.53197E-2	2.73267E1	-3.26699E1	-3.26284E1	2.68472E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
2.0E1	2.6266E4	8.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80025E1	-2.6226E-4	-8.8001E1	-9.53674E-5	4.52995E-3	9.50336E-2	2.73149E1	-3.26376E1	-3.26416E1	2.68469E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9892E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80024E1	-5.24521E-4	-8.80007E1	4.29153E-4	4.31538E-3	9.48429E-2	2.73365E1	-3.26475E1	-3.26365E1	2.68197E1	1.20265E-7	2.52401E-3	2.52401E-3	6.31974E-3	2.9965E-1
2.2E1	1.898E3	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80023E1	-5.24521E-4	-8.80008E1	3.57628E-4	4.43459E-3	9.49144E-2	2.72906E1	-3.26277E1	-3.26187E1	2.68473E1	1.19958E-7	2.51615E-3	2.51615E-3	6.33565E-3	3.00153E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80023E1	-2.14577E-4	-8.80007E1	2.14577E-4	4.48227E-3	9.52244E-2	2.73226E1	-3.26803E1	-3.26166E1	2.68525E1	1.20028E-7	2.52509E-3	2.52509E-3	6.3126E-3	3.01237E-1