[Scan]
initial_time=2016-01-18T20:48:35
final_time=2016-01-18T20:48:54
ip_count=19
run=1024
dataset=7
scan=517
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.72059E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.60102E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.36515E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.39874E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.5949E-8
mult1=-1.7765E-8
mult2=-2.72744E-9
rf_tmon=-4.43755E-3
rf_agc=3.41153E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=5.73838E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19839E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05179E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.81908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.54184E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95904E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.48667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.92396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.31277E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.25886E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.38755E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.1853E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93687E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.96432E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=4.00545E-8
tplens_vset=1.4E-1
tplens_vmon=1.65946E0
tplens_imon=-6.86289E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25923E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26784E1
iondef2_imon=1.56454E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=9.70876E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52007E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00792E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.41373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.23596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7317E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68481E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.06332E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.70499E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56693E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.2999E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.8673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42012E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65043E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.95344E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66448E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82176E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.27535E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22475E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.323E-3
inlet_lpb_pmon=3.0223E-1
chamber_ion_pmon=1.19782E-7
chamber_cvt_pmon=2.51679E-3
foreline_cvt_pmon=2.51679E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0254E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.968E3	3.0E0	1.47E2	4.1E1	-7.08504E-2	-8.80028E1	-5.24521E-4	-8.80006E1	7.15256E-5	4.3869E-3	9.51052E-2	2.73462E1	-3.26758E1	-3.26295E1	2.68186E1	1.198E-7	2.52707E-3	2.52707E-3	6.29665E-3	3.00453E-1
2.0E0	1.07025E5	9.5E1	3.16E2	1.6E2	-7.201E-2	-8.80026E1	-7.15256E-4	-8.80007E1	4.29153E-4	4.33922E-3	9.50336E-2	2.7329E1	-3.26719E1	-3.26052E1	2.68269E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80027E1	-5.72205E-4	-8.80006E1	3.8147E-4	4.41074E-3	9.48429E-2	2.7344E1	-3.2672E1	-3.26396E1	2.6854E1	1.19819E-7	2.52697E-3	2.52697E-3	6.29624E-3	3.00144E-1
4.0E0	2.3745E4	1.1E1	6.55E2	3.98E2	-7.201E-2	-8.80028E1	-6.67572E-4	-8.80006E1	3.09944E-4	4.55379E-3	9.50575E-2	2.73411E1	-3.26711E1	-3.26158E1	2.68346E1	1.19891E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80028E1	-4.29153E-4	-8.80004E1	9.53674E-5	4.79221E-3	9.51529E-2	2.73275E1	-3.26567E1	-3.26667E1	2.68587E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.09279E-2	-8.80025E1	-5.24521E-4	-8.80005E1	-1.19209E-4	4.74453E-3	9.52005E-2	2.73369E1	-3.26488E1	-3.26609E1	2.68478E1	1.19705E-7	2.51116E-3	2.51116E-3	6.28552E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80028E1	-5.24521E-4	-8.80006E1	2.14577E-4	4.33922E-3	9.48668E-2	2.73261E1	-3.26554E1	-3.26206E1	2.68341E1	1.19953E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80028E1	-3.57628E-4	-8.80007E1	2.14577E-4	4.22001E-3	9.51052E-2	2.73122E1	-3.27127E1	-3.26248E1	2.68047E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98481E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80023E1	-7.15256E-4	-8.80008E1	1.43051E-4	4.43459E-3	9.50336E-2	2.73225E1	-3.26104E1	-3.26518E1	2.68599E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9926E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80024E1	-5.24521E-4	-8.80009E1	2.38419E-4	4.55379E-3	9.53197E-2	2.73129E1	-3.26549E1	-3.26278E1	2.6843E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
1.4E1	3.381E3	1.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80021E1	-2.14577E-4	-8.80008E1	6.4373E-4	4.36306E-3	9.52482E-2	2.73273E1	-3.26789E1	-3.2629E1	2.6846E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
1.5E1	9.3E1	1.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80021E1	-3.33786E-4	-8.80008E1	3.8147E-4	4.14848E-3	9.53197E-2	2.73596E1	-3.26666E1	-3.2648E1	2.68012E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.6E1	4.45E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80024E1	-1.90735E-4	-8.80008E1	4.76837E-4	4.36306E-3	9.52721E-2	2.73267E1	-3.26837E1	-3.26434E1	2.68532E1	1.19941E-7	2.51182E-3	2.51182E-3	6.32858E-3	2.99845E-1
1.7E1	9.26E2	1.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80023E1	-4.05312E-4	-8.80008E1	6.4373E-4	4.02927E-3	9.50813E-2	2.73333E1	-3.26609E1	-3.26308E1	2.68274E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9874E-1
1.8E1	3.714E3	6.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80023E1	-3.09944E-4	-8.80009E1	5.96046E-4	3.95775E-3	9.50336E-2	2.73321E1	-3.26585E1	-3.26164E1	2.68268E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98481E-1
1.9E1	2.122E3	2.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80024E1	-4.05312E-4	-8.80008E1	4.29153E-4	4.02927E-3	9.50813E-2	2.73309E1	-3.26759E1	-3.26284E1	2.68575E1	1.19705E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
2.0E1	2.6287E4	1.5E1	8.08E2	5.58E2	-7.11597E-2	-8.80025E1	-6.91414E-4	-8.80008E1	4.29153E-4	4.31538E-3	9.4986E-2	2.73051E1	-3.26478E1	-3.25977E1	2.68244E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80021E1	-6.67572E-4	-8.80011E1	5.00679E-4	3.93391E-3	9.47237E-2	2.73153E1	-3.26885E1	-3.26242E1	2.68359E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
2.2E1	1.844E3	2.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80025E1	-6.19888E-4	-8.80012E1	4.29153E-4	4.45843E-3	9.49621E-2	2.73269E1	-3.26819E1	-3.26137E1	2.68367E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80024E1	-6.91414E-4	-8.80012E1	4.29153E-4	4.17233E-3	9.47237E-2	2.7317E1	-3.26784E1	-3.25923E1	2.68481E1	1.19782E-7	2.51679E-3	2.51679E-3	6.323E-3	3.0223E-1