[Scan]
initial_time=2016-01-18T20:49:02
final_time=2016-01-18T20:49:21
ip_count=19
run=1024
dataset=7
scan=518
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.73496E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.34246E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.36127E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.32376E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.59308E-8
mult1=-1.45807E-8
mult2=-2.67669E-9
rf_tmon=-5.83424E-3
rf_agc=3.30572E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.53691E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63973E0
bslens_imon=2.31533E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19976E1
lens5a_imon=2.00411E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=2.81115E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02044E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.55322E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95819E0
lens1_imon=1.68358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03415E1
cs_ea2_imon=1.48842E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.30585E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15036E1
os_ea1_imon=2.39455E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63155E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23802E0
cs_ionrep_imon=1.19128E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.97405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=4.00497E-8
tplens_vset=1.4E-1
tplens_vmon=1.67694E0
tplens_imon=-2.19017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.48989E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26218E1
iondef2_imon=1.56556E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98125E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=9.07254E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28577E0
ionrepsh_imon=1.77088E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34019E1
lens5b_imon=2.17123E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45717E0
os_ea2_imon=-6.48754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00667E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11388E1
os_restr2_imon=3.41265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.28275E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10533E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.97541E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.68843E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.65216E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.64209E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.42076E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32388E0
defgridb_imon=6.05809E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.4257E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64954E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.96311E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66339E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90961E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.42828E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=2.99093E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91728E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.939E3	2.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80023E1	-3.33786E-4	-8.80011E1	4.05312E-4	4.55379E-3	9.52244E-2	2.7321E1	-3.26484E1	-3.26183E1	2.6798E1	1.19978E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98819E-1
2.0E0	1.06698E5	1.07E2	3.16E2	1.6E2	-7.21643E-2	-8.80023E1	-7.39098E-4	-8.80008E1	4.29153E-4	4.60148E-3	9.51529E-2	2.73261E1	-3.26597E1	-3.2611E1	2.68424E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98665E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80024E1	-7.39098E-4	-8.8001E1	3.09944E-4	4.55379E-3	9.48906E-2	2.73184E1	-3.26654E1	-3.26266E1	2.68453E1	1.20435E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
4.0E0	2.3299E4	2.0E1	6.55E2	3.98E2	-7.08504E-2	-8.80024E1	-5.72205E-4	-8.8001E1	2.14577E-4	4.22001E-3	9.48429E-2	2.73285E1	-3.26789E1	-3.26356E1	2.68484E1	1.1979E-7	2.51603E-3	2.51603E-3	6.30212E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80027E1	-5.72205E-4	-8.80008E1	3.8147E-4	4.24385E-3	9.50575E-2	2.7347E1	-3.26384E1	-3.26189E1	2.68791E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80027E1	-3.8147E-4	-8.8001E1	5.48363E-4	4.45843E-3	9.50575E-2	2.73424E1	-3.26705E1	-3.2584E1	2.68442E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80025E1	-3.09944E-4	-8.80012E1	3.33786E-4	4.48227E-3	9.47952E-2	2.73021E1	-3.26723E1	-3.25876E1	2.6846E1	1.19978E-7	2.51136E-3	2.51136E-3	6.30182E-3	2.97762E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80026E1	-2.38419E-4	-8.8001E1	3.33786E-4	4.43459E-3	9.4986E-2	2.73291E1	-3.2653E1	-3.26296E1	2.684E1	1.20106E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.9841E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80025E1	-5.48363E-4	-8.80005E1	4.29153E-4	4.43459E-3	9.50575E-2	2.72979E1	-3.26549E1	-3.26254E1	2.68502E1	1.20278E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80025E1	-4.76837E-4	-8.80009E1	4.05312E-4	4.3869E-3	9.53197E-2	2.73346E1	-3.2681E1	-3.26434E1	2.68435E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
1.4E1	3.55E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80025E1	-3.57628E-4	-8.80011E1	4.52995E-4	4.48227E-3	9.51767E-2	2.7299E1	-3.26554E1	-3.26297E1	2.68526E1	1.1974E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99845E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80026E1	-3.57628E-4	-8.8001E1	2.86102E-4	4.8399E-3	9.49144E-2	2.73417E1	-3.26891E1	-3.26319E1	2.681E1	1.19766E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00144E-1
1.6E1	4.88E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80027E1	-3.09944E-4	-8.8001E1	2.38419E-4	4.76837E-3	9.48429E-2	2.7337E1	-3.26992E1	-3.26425E1	2.68285E1	1.20106E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.98665E-1
1.7E1	8.99E2	2.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80024E1	-5.00679E-4	-8.80012E1	3.09944E-4	4.64916E-3	9.52005E-2	2.73247E1	-3.26738E1	-3.26278E1	2.68687E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9892E-1
1.8E1	3.794E3	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80025E1	-4.05312E-4	-8.80011E1	3.09944E-4	4.64916E-3	9.52244E-2	2.73093E1	-3.26747E1	-3.26296E1	2.68603E1	1.19872E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.0041E-1
1.9E1	2.173E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80027E1	-5.24521E-4	-8.80011E1	3.57628E-4	4.79221E-3	9.52482E-2	2.73312E1	-3.26527E1	-3.26011E1	2.68238E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9952E-1
2.0E1	2.6384E4	1.1E1	8.08E2	5.58E2	-7.20871E-2	-8.80026E1	-5.72205E-4	-8.80011E1	3.09944E-4	4.62532E-3	9.52005E-2	2.73144E1	-3.26642E1	-3.26312E1	2.67926E1	1.20092E-7	2.51287E-3	2.51287E-3	6.33388E-3	3.006E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80025E1	-6.91414E-4	-8.80011E1	3.57628E-4	4.72069E-3	9.50575E-2	2.73088E1	-3.26397E1	-3.26535E1	2.68294E1	1.19941E-7	2.51498E-3	2.51498E-3	6.29157E-3	3.01104E-1
2.2E1	1.929E3	1.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80026E1	-4.29153E-4	-8.8001E1	5.48363E-4	4.62532E-3	9.51052E-2	2.73257E1	-3.27133E1	-3.26431E1	2.68233E1	1.20226E-7	2.51411E-3	2.51411E-3	6.33648E-3	3.00087E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80025E1	-3.09944E-4	-8.80008E1	5.00679E-4	5.05447E-3	9.52482E-2	2.73063E1	-3.26218E1	-3.26056E1	2.68448E1	1.19991E-7	2.51603E-3	2.51603E-3	6.29157E-3	2.99093E-1