[Scan]
initial_time=2016-01-18T20:49:29
final_time=2016-01-18T20:49:48
ip_count=19
run=1024
dataset=7
scan=519
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.8383E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.35533E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.37962E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.30948E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.5907E-8
mult1=-1.80484E-8
mult2=-2.7266E-9
rf_tmon=-4.32617E-3
rf_agc=3.35919E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.66101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69099E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.79818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.54574E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01E0
lens1_imon=1.49205E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.5002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.91927E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.31063E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=2.39071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.18342E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=2.95171E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.99807E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26891E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.05335E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.78477E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.1557E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47685E0
os_ea2_imon=-8.26259E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71624E1
cs_ef2a_imon=3.15028E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11388E1
os_restr2_imon=3.42347E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23009E2
cs_ionfoca_imon=6.26743E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.11723E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.06599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.70182E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82685E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.28961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.44048E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65089E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.95903E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66527E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78776E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43171E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22584E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88724E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.034E3	2.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80022E1	-4.05312E-4	-8.80007E1	5.00679E-4	4.8399E-3	9.52005E-2	2.73328E1	-3.26626E1	-3.26142E1	2.68476E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
2.0E0	1.06063E5	1.11E2	3.16E2	1.6E2	-7.27053E-2	-8.80022E1	-4.76837E-4	-8.80007E1	3.33786E-4	5.05447E-3	9.55105E-2	2.73467E1	-3.26646E1	-3.26413E1	2.68419E1	1.19953E-7	2.52384E-3	2.52384E-3	6.30202E-3	2.9892E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80021E1	-6.4373E-4	-8.80011E1	5.72205E-4	4.48227E-3	9.52244E-2	2.73393E1	-3.26679E1	-3.26189E1	2.68395E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.98819E-1
4.0E0	2.313E4	1.1E1	6.55E2	3.98E2	-7.16233E-2	-8.80021E1	-6.91414E-4	-8.80009E1	7.15256E-4	4.36306E-3	9.53436E-2	2.73375E1	-3.26773E1	-3.26065E1	2.6822E1	1.198E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80022E1	-6.67572E-4	-8.80008E1	4.52995E-4	4.43459E-3	9.51529E-2	2.72967E1	-3.26633E1	-3.2632E1	2.68285E1	1.20209E-7	2.52169E-3	2.52169E-3	6.2752E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80021E1	-6.19888E-4	-8.8001E1	4.29153E-4	4.19617E-3	9.51767E-2	2.73352E1	-3.2662E1	-3.26201E1	2.6837E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.08504E-2	-8.80023E1	-3.8147E-4	-8.80006E1	5.48363E-4	4.45843E-3	9.50098E-2	2.73255E1	-3.26543E1	-3.2623E1	2.68472E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80023E1	-1.43051E-4	-8.80008E1	5.24521E-4	4.33922E-3	9.50813E-2	2.73369E1	-3.26676E1	-3.2604E1	2.68034E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
1.2E1	1.12E2	0.0E0	4.85E2	3.23E2	-7.08504E-2	-8.80023E1	-6.19888E-4	-8.80009E1	2.86102E-4	4.57764E-3	9.53674E-2	2.73442E1	-3.26675E1	-3.26062E1	2.68514E1	1.20137E-7	2.52473E-3	2.52473E-3	6.34099E-3	3.00676E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80025E1	-4.05312E-4	-8.80009E1	2.14577E-4	4.36306E-3	9.52482E-2	2.73398E1	-3.26909E1	-3.26372E1	2.68447E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.4E1	3.482E3	4.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80024E1	-6.67572E-4	-8.80009E1	3.33786E-4	4.07696E-3	9.53197E-2	2.73337E1	-3.26661E1	-3.26553E1	2.6797E1	1.20375E-7	2.5199E-3	2.5199E-3	6.3126E-3	2.99753E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80024E1	-1.00136E-3	-8.80011E1	5.96046E-4	4.26769E-3	9.49144E-2	2.73057E1	-3.26638E1	-3.26425E1	2.68232E1	1.20005E-7	2.51758E-3	2.51758E-3	6.28423E-3	3.01193E-1
1.6E1	4.29E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80024E1	-5.48363E-4	-8.80011E1	6.19888E-4	4.55379E-3	9.51052E-2	2.73363E1	-3.26891E1	-3.25779E1	2.68442E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99686E-1
1.7E1	8.69E2	0.0E0	6.87E2	4.7E2	-7.08504E-2	-8.80024E1	-3.8147E-4	-8.80008E1	2.6226E-4	4.17233E-3	9.47952E-2	2.73286E1	-3.26635E1	-3.26316E1	2.68395E1	1.20226E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9978E-1
1.8E1	3.737E3	2.0E0	7.27E2	5.0E2	-7.11597E-2	-8.80021E1	-5.72205E-4	-8.80006E1	5.72205E-4	4.52995E-3	9.50336E-2	2.73269E1	-3.26634E1	-3.26248E1	2.68358E1	1.1987E-7	2.51854E-3	2.51854E-3	6.32784E-3	2.99906E-1
1.9E1	2.067E3	1.0E0	7.68E2	5.29E2	-7.08504E-2	-8.80023E1	-5.00679E-4	-8.8001E1	4.52995E-4	4.60148E-3	9.48906E-2	2.73303E1	-3.26314E1	-3.26326E1	2.68286E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3131E-3	2.9917E-1
2.0E1	2.6198E4	1.2E1	8.08E2	5.58E2	-7.06187E-2	-8.8002E1	-5.00679E-4	-8.80008E1	5.96046E-4	4.29153E-3	9.46999E-2	2.73021E1	-3.26254E1	-3.26213E1	2.68214E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.9874E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80021E1	-5.96046E-4	-8.80009E1	7.86781E-4	4.69685E-3	9.47714E-2	2.73611E1	-3.26673E1	-3.26225E1	2.68136E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31548E-3	3.00325E-1
2.2E1	1.779E3	1.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80022E1	-2.14577E-4	-8.80006E1	4.76837E-4	4.29153E-3	9.47475E-2	2.73322E1	-3.26555E1	-3.26396E1	2.68493E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80021E1	-2.14577E-4	-8.80007E1	5.24521E-4	4.57764E-3	9.5129E-2	2.73129E1	-3.26891E1	-3.26044E1	2.68256E1	1.20158E-7	2.52707E-3	2.52707E-3	6.29665E-3	3.0148E-1