[Scan]
initial_time=2016-01-18T20:50:23
final_time=2016-01-18T20:50:42
ip_count=19
run=1024
dataset=7
scan=521
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.73973E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.90954E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.39585E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.20681E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.5936E-8
mult1=-1.72176E-8
mult2=-2.80245E-9
rf_tmon=-3.85152E-3
rf_agc=3.3658E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.59628E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6748E0
bslens_imon=2.55048E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.99675E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5388E1
cs_ef1b_imon=2.79951E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.01964E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04645E1
cs_ea1_imon=2.54831E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9882E0
lens1_imon=1.49316E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64833E1
os_ef1alow_imon=2.98102E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0383E1
cs_ea2_imon=1.49825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84257E1
cs_ef1a_imon=2.92601E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.30355E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11435E1
os_restr1_imon=4.27072E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15249E1
os_ea1_imon=2.38227E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6366E1
os_ef1bup_imon=3.08132E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24383E0
cs_ionrep_imon=1.18716E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=2.96156E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=4.00257E-8
tplens_vset=1.4E-1
tplens_vmon=1.68342E0
tplens_imon=-3.54269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.49519E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27005E1
iondef2_imon=1.56008E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.9817E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=9.07278E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30554E0
ionrepsh_imon=1.77842E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33715E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47476E0
os_ea2_imon=-6.51995E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.006E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.15318E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05019E0
os_ef2alow_imon=-2.61923E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77048E-1
os_ef2bup_imon=-5.31014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11211E1
os_restr2_imon=3.41367E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.28974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01771E1
cs_anode2_imon=2.24149E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.1051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.10636E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.00475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.66528E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13887E0
cs_ionaccel_imon=-1.84451E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56617E1
einzel_imon=7.74398E-6
window_vset=0.0E0
window_vmon=2.53775E-1
window_imon=-7.36708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39107E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.65599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.58893E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.83316E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.08127E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30267E0
defgridb_imon=6.00869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.42932E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65017E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.96132E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66349E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83618E-2
os_fil2_imon=-2.65003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88473E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.36588E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.42547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93146E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.14473E-1
res40_imon=-2.49572E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.061E3	1.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80024E1	-6.19888E-4	-8.80006E1	2.86102E-4	4.88758E-3	9.51767E-2	2.73347E1	-3.26696E1	-3.26187E1	2.68406E1	1.20281E-7	2.51758E-3	2.51758E-3	6.27268E-3	3.00916E-1
2.0E0	1.05476E5	8.9E1	3.16E2	1.6E2	-7.23964E-2	-8.80027E1	-2.14577E-4	-8.80006E1	1.66893E-4	4.62532E-3	9.48191E-2	2.73322E1	-3.26502E1	-3.26048E1	2.68214E1	1.20064E-7	2.51447E-3	2.51447E-3	6.29211E-3	2.99421E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80025E1	-5.96046E-4	-8.80006E1	4.76837E-4	4.50611E-3	9.4986E-2	2.73101E1	-3.26678E1	-3.26379E1	2.6835E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99175E-1
4.0E0	2.3108E4	1.4E1	6.55E2	3.98E2	-7.11597E-2	-8.80023E1	-6.67572E-4	-8.80007E1	5.24521E-4	4.48227E-3	9.49621E-2	2.73529E1	-3.26803E1	-3.26231E1	2.68609E1	1.19829E-7	2.51725E-3	2.51725E-3	6.30171E-3	2.99981E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80027E1	-5.48363E-4	-8.80007E1	5.00679E-4	4.45843E-3	9.49144E-2	2.72996E1	-3.2656E1	-3.2664E1	2.6825E1	1.20055E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80028E1	-7.15256E-4	-8.80005E1	5.48363E-4	4.60148E-3	9.49144E-2	2.73279E1	-3.26512E1	-3.2632E1	2.68334E1	1.19757E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80027E1	-7.15256E-4	-8.80005E1	4.05312E-4	4.17233E-3	9.51529E-2	2.73269E1	-3.26708E1	-3.26201E1	2.68388E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80026E1	-4.05312E-4	-8.80005E1	2.14577E-4	4.43459E-3	9.49144E-2	2.73075E1	-3.26434E1	-3.26194E1	2.68502E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9978E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80025E1	-5.00679E-4	-8.80009E1	2.6226E-4	4.43459E-3	9.5129E-2	2.73147E1	-3.26627E1	-3.2599E1	2.68232E1	1.20174E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02659E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80025E1	-4.05312E-4	-8.80005E1	4.52995E-4	4.62532E-3	9.45568E-2	2.73291E1	-3.26837E1	-3.26104E1	2.68166E1	1.2033E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01347E-1
1.4E1	3.455E3	3.0E0	5.66E2	3.82E2	-7.10051E-2	-8.80026E1	-8.82149E-4	-8.80005E1	1.43051E-4	4.86374E-3	9.47237E-2	2.73261E1	-3.26825E1	-3.25906E1	2.68605E1	1.20174E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.05415E-2	-8.80027E1	-4.05312E-4	-8.80007E1	5.24521E-4	4.55379E-3	9.48429E-2	2.72961E1	-3.26518E1	-3.26026E1	2.68538E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.6E1	4.6E2	0.0E0	6.47E2	4.41E2	-7.13143E-2	-8.80025E1	-2.6226E-4	-8.80007E1	5.00679E-4	4.41074E-3	9.51052E-2	2.73003E1	-3.26909E1	-3.26753E1	2.68022E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
1.7E1	8.46E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80022E1	-3.33786E-4	-8.80006E1	5.24521E-4	4.02927E-3	9.50575E-2	2.73302E1	-3.26701E1	-3.25942E1	2.68791E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.8E1	3.692E3	9.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80021E1	-4.29153E-4	-8.80008E1	6.67572E-4	4.24385E-3	9.51052E-2	2.73189E1	-3.26512E1	-3.26422E1	2.68214E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
1.9E1	2.086E3	0.0E0	7.68E2	5.29E2	-7.09279E-2	-8.80022E1	-5.48363E-4	-8.80008E1	6.19888E-4	4.48227E-3	9.50336E-2	2.73228E1	-3.26726E1	-3.26001E1	2.68016E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
2.0E1	2.6524E4	1.3E1	8.08E2	5.58E2	-7.16233E-2	-8.80022E1	-5.00679E-4	-8.80006E1	2.86102E-4	4.48227E-3	9.51052E-2	2.73339E1	-3.26689E1	-3.26168E1	2.68034E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
2.1E1	6.5E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80021E1	-6.19888E-4	-8.80005E1	3.8147E-4	4.14848E-3	9.51529E-2	2.73334E1	-3.26797E1	-3.26189E1	2.68298E1	1.19819E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.00942E-1
2.2E1	1.875E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80023E1	-5.24521E-4	-8.80007E1	5.00679E-4	4.57764E-3	9.54628E-2	2.73291E1	-3.26302E1	-3.26062E1	2.68244E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.8002E1	-7.15256E-4	-8.80007E1	2.14577E-4	4.88758E-3	9.4986E-2	2.73442E1	-3.27005E1	-3.26386E1	2.68256E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.01609E-1