[Scan]
initial_time=2016-01-18T20:50:50
final_time=2016-01-18T20:51:09
ip_count=19
run=1024
dataset=7
scan=522
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.72899E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.254E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.41131E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.35665E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.59022E-8
mult1=-2.34426E-8
mult2=-2.81243E-9
rf_tmon=-5.32354E-3
rf_agc=3.32855E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.95963E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.24215E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=2.01696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.81043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.54364E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96265E0
lens1_imon=1.52116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.50253E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.92684E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.30407E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14783E1
os_ea1_imon=2.37529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.9373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=2.95747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.99185E-8
tplens_vset=1.4E-1
tplens_vmon=1.64504E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.54291E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98054E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=9.47917E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=1.75127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50565E0
os_ea2_imon=-9.19398E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.26756E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73484E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.1024E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.69575E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.41753E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07293E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64694E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.95813E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66408E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80886E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6208E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.63807E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.939E3	2.0E0	1.47E2	4.1E1	-7.13143E-2	-8.80022E1	-5.96046E-4	-8.80007E1	2.14577E-4	4.62532E-3	9.49383E-2	2.73207E1	-3.26735E1	-3.2635E1	2.68412E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00824E-1
2.0E0	1.06303E5	1.05E2	3.16E2	1.6E2	-7.16233E-2	-8.80023E1	-7.15256E-4	-8.80007E1	5.96046E-4	4.86374E-3	9.50336E-2	2.73271E1	-3.26946E1	-3.26223E1	2.67974E1	1.19913E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01609E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80022E1	-5.72205E-4	-8.80007E1	4.29153E-4	4.43459E-3	9.47952E-2	2.73626E1	-3.26835E1	-3.26004E1	2.68551E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
4.0E0	2.2892E4	1.4E1	6.55E2	3.98E2	-7.11597E-2	-8.80023E1	-7.86781E-4	-8.80005E1	4.52995E-4	4.88758E-3	9.47714E-2	2.73279E1	-3.26807E1	-3.26392E1	2.684E1	1.19941E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80023E1	-5.00679E-4	-8.80006E1	2.6226E-4	4.62532E-3	9.50336E-2	2.72751E1	-3.26645E1	-3.262E1	2.68448E1	1.20069E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80026E1	-6.4373E-4	-8.80007E1	1.43051E-4	4.45843E-3	9.48668E-2	2.72968E1	-3.26992E1	-3.26354E1	2.68366E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80024E1	-4.29153E-4	-8.80006E1	3.33786E-4	4.43459E-3	9.52005E-2	2.73216E1	-3.26621E1	-3.26291E1	2.684E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80024E1	-5.00679E-4	-8.80005E1	3.33786E-4	4.45843E-3	9.51529E-2	2.73364E1	-3.26644E1	-3.26372E1	2.68441E1	1.20031E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.00676E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80025E1	-4.29153E-4	-8.80005E1	3.09944E-4	4.41074E-3	9.50575E-2	2.72979E1	-3.26338E1	-3.26092E1	2.68659E1	1.20209E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00966E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80027E1	-3.33786E-4	-8.80007E1	9.53674E-5	4.57764E-3	9.50813E-2	2.73207E1	-3.26476E1	-3.26146E1	2.68268E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.4E1	3.411E3	3.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80028E1	-5.00679E-4	-8.80008E1	2.14577E-4	4.64916E-3	9.48668E-2	2.7361E1	-3.26561E1	-3.26368E1	2.6837E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02396E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80027E1	-5.48363E-4	-8.80006E1	3.33786E-4	4.3869E-3	9.44853E-2	2.73069E1	-3.26372E1	-3.26213E1	2.6843E1	1.19749E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.02253E-1
1.6E1	4.44E2	2.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80027E1	-2.14577E-4	-8.80006E1	2.38419E-4	4.24385E-3	9.47714E-2	2.72678E1	-3.26506E1	-3.27041E1	2.68352E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.7E1	9.11E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80023E1	-2.86102E-4	-8.80008E1	3.09944E-4	4.60148E-3	9.48429E-2	2.72984E1	-3.26444E1	-3.26217E1	2.68262E1	1.19861E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00302E-1
1.8E1	3.749E3	1.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80022E1	-1.19209E-4	-8.80007E1	3.57628E-4	5.05447E-3	9.51529E-2	2.73147E1	-3.26633E1	-3.26254E1	2.68448E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97963E-1
1.9E1	2.047E3	3.0E0	7.68E2	5.29E2	-7.10051E-2	-8.80022E1	-4.29153E-4	-8.80005E1	-1.19209E-4	4.81606E-3	9.53913E-2	2.73285E1	-3.26741E1	-3.26068E1	2.68514E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99348E-1
2.0E1	2.6185E4	7.0E0	8.08E2	5.58E2	-7.11597E-2	-8.80024E1	-2.6226E-4	-8.80007E1	4.05312E-4	4.62532E-3	9.50813E-2	2.72955E1	-3.26627E1	-3.2632E1	2.68076E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80025E1	-5.48363E-4	-8.80009E1	1.19209E-4	4.36306E-3	9.52482E-2	2.73476E1	-3.26644E1	-3.26278E1	2.6834E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0041E-1
2.2E1	1.882E3	1.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80024E1	-4.05312E-4	-8.80009E1	3.09944E-4	4.93526E-3	9.52005E-2	2.73092E1	-3.2649E1	-3.2649E1	2.68528E1	1.20106E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.04322E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80026E1	-7.39098E-4	-8.8001E1	3.57628E-4	4.69685E-3	9.50813E-2	2.73484E1	-3.26723E1	-3.26482E1	2.68178E1	1.2026E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1