[Scan]
initial_time=2016-01-18T20:51:17
final_time=2016-01-18T20:51:36
ip_count=19
run=1024
dataset=7
scan=523
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.79886E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.36094E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.38997E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.27203E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.59398E-8
mult1=-1.53515E-8
mult2=-2.74836E-9
rf_tmon=-5.62962E-3
rf_agc=3.22326E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.58305E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66281E0
bslens_imon=2.52423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19787E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.80863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02173E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04635E1
cs_ea1_imon=2.55402E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01338E0
lens1_imon=1.5648E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03638E1
cs_ea2_imon=1.49134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.92936E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.30238E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.25959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15027E1
os_ea1_imon=2.39203E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25789E0
cs_ionrep_imon=1.19621E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93538E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.95207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.00097E-8
tplens_vset=1.4E-1
tplens_vmon=1.65418E0
tplens_imon=-4.61826E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.49795E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2656E1
iondef2_imon=1.55948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98033E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=8.59141E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3025E0
ionrepsh_imon=1.76909E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33657E1
lens5b_imon=2.17511E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45488E0
os_ea2_imon=-7.08637E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00459E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2986E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.41878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29024E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73082E1
iondef1_imon=1.10583E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.03483E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81116E-1
olens1_imon=7.67079E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.27968E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.70958E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.42221E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3543E0
defgridb_imon=6.01782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.42096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64832E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.94768E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66285E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75497E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.56012E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40051E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20414E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.41272E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.962E3	0.0E0	1.47E2	4.1E1	-7.10051E-2	-8.80025E1	-7.15256E-4	-8.80007E1	3.8147E-4	4.57764E-3	9.52244E-2	2.73187E1	-3.2662E1	-3.26236E1	2.68655E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
2.0E0	1.0547E5	1.0E2	3.16E2	1.6E2	-7.03869E-2	-8.80023E1	-3.8147E-4	-8.80007E1	3.33786E-4	4.74453E-3	9.54151E-2	2.73192E1	-3.26627E1	-3.26156E1	2.68211E1	1.20004E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00197E-1
3.0E0	2.6E1	0.0E0	4.85E2	2.79E2	-7.01548E-2	-8.80024E1	-5.24521E-4	-8.80008E1	5.48363E-4	4.62532E-3	9.55582E-2	2.7348E1	-3.26619E1	-3.26544E1	2.67946E1	1.19965E-7	2.50898E-3	2.50898E-3	6.32386E-3	2.98222E-1
4.0E0	2.3139E4	9.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80023E1	-4.05312E-4	-8.8001E1	4.05312E-4	4.48227E-3	9.52005E-2	2.73045E1	-3.26514E1	-3.26166E1	2.68493E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9892E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80025E1	-5.24521E-4	-8.80007E1	7.39098E-4	4.57764E-3	9.52482E-2	2.73771E1	-3.26655E1	-3.26478E1	2.68268E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.97394E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80025E1	-4.52995E-4	-8.80006E1	6.19888E-4	4.55379E-3	9.52005E-2	2.7321E1	-3.26644E1	-3.26083E1	2.68377E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80026E1	-6.91414E-4	-8.80004E1	4.52995E-4	4.8399E-3	9.51529E-2	2.73344E1	-3.2636E1	-3.26173E1	2.68032E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80025E1	-7.15256E-4	-8.80006E1	6.19888E-4	4.55379E-3	9.53197E-2	2.72673E1	-3.26431E1	-3.2639E1	2.68603E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80023E1	-4.76837E-4	-8.80007E1	5.00679E-4	4.79221E-3	9.51529E-2	2.73351E1	-3.26549E1	-3.26122E1	2.68469E1	1.19697E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80028E1	-5.96046E-4	-8.80004E1	3.57628E-4	4.52995E-3	9.50575E-2	2.72991E1	-3.26681E1	-3.26392E1	2.68465E1	1.20297E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.00676E-1
1.4E1	3.469E3	6.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80028E1	-5.00679E-4	-8.80005E1	3.57628E-4	4.31538E-3	9.51529E-2	2.73033E1	-3.26526E1	-3.26012E1	2.68412E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80025E1	-4.76837E-4	-8.80006E1	3.57628E-4	4.48227E-3	9.50575E-2	2.73388E1	-3.26756E1	-3.26083E1	2.68442E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02133E-1
1.6E1	4.8E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80027E1	-7.62939E-4	-8.80008E1	5.24521E-4	4.3869E-3	9.48906E-2	2.72609E1	-3.26254E1	-3.26543E1	2.68406E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.7E1	8.7E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80024E1	-7.39098E-4	-8.80005E1	6.19888E-4	4.57764E-3	9.52005E-2	2.73423E1	-3.26644E1	-3.26183E1	2.68569E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.98156E-1
1.8E1	3.777E3	1.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80026E1	-5.00679E-4	-8.80004E1	3.57628E-4	4.64916E-3	9.52244E-2	2.73387E1	-3.26759E1	-3.2644E1	2.68196E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9874E-1
1.9E1	2.048E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80025E1	-8.82149E-4	-8.80004E1	4.29153E-4	4.57764E-3	9.52244E-2	2.73234E1	-3.26838E1	-3.26113E1	2.68012E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
2.0E1	2.6097E4	1.2E1	8.08E2	5.58E2	-7.3401E-2	-8.80025E1	-3.57628E-4	-8.80007E1	2.38419E-4	4.673E-3	9.52482E-2	2.73493E1	-3.26573E1	-3.26172E1	2.68418E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.98665E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80029E1	-4.52995E-4	-8.80007E1	3.33786E-4	4.45843E-3	9.4986E-2	2.73003E1	-3.26945E1	-3.26116E1	2.6837E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
2.2E1	1.89E3	3.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80028E1	-7.86781E-4	-8.80007E1	5.48363E-4	4.76837E-3	9.52244E-2	2.72762E1	-3.26543E1	-3.26602E1	2.68366E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80027E1	-7.15256E-4	-8.80008E1	4.52995E-4	4.8399E-3	9.53674E-2	2.73082E1	-3.2656E1	-3.26083E1	2.68088E1	1.20414E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1