[Scan]
initial_time=2016-01-18T20:52:10
final_time=2016-01-18T20:52:30
ip_count=19
run=1024
dataset=7
scan=525
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.74803E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.16352E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.34507E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.23242E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.59363E-8
mult1=-1.30577E-8
mult2=-2.81341E-9
rf_tmon=-3.34737E-3
rf_agc=3.32088E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.38409E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.21691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.79601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.56059E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01732E0
lens1_imon=1.52476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.49893E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.93152E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.30334E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.25923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14915E1
os_ea1_imon=2.37565E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.18674E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.95964E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.00324E-8
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.56526E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=9.06038E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.76894E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.16188E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50565E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28018E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68358E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=4.99877E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.67048E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.80962E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.43766E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64777E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.9675E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66176E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52412E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.15753E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.9E3	0.0E0	1.47E2	4.1E1	-7.18554E-2	-8.8003E1	-4.05312E-4	-8.8001E1	9.53674E-4	4.1008E-3	9.51052E-2	2.7321E1	-3.26992E1	-3.26307E1	2.68453E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.0E0	1.06216E5	1.02E2	3.16E2	1.6E2	-7.20871E-2	-8.80027E1	-4.76837E-4	-8.8001E1	6.67572E-4	4.22001E-3	9.49383E-2	2.73124E1	-3.26817E1	-3.26027E1	2.68176E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01738E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80028E1	-6.91414E-4	-8.80008E1	6.4373E-4	4.36306E-3	9.48906E-2	2.73063E1	-3.26661E1	-3.26467E1	2.68586E1	1.19766E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01209E-1
4.0E0	2.3222E4	1.7E1	6.55E2	3.98E2	-7.11597E-2	-8.80028E1	-4.29153E-4	-8.80008E1	5.48363E-4	4.55379E-3	9.52005E-2	2.73177E1	-3.26422E1	-3.26194E1	2.68172E1	1.20042E-7	2.51603E-3	2.51603E-3	6.33919E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80028E1	-4.05312E-4	-8.8001E1	5.72205E-4	4.36306E-3	9.53197E-2	2.73429E1	-3.26573E1	-3.26386E1	2.68532E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10825E-2	-8.80027E1	-9.29832E-4	-8.80009E1	8.10623E-4	4.55379E-3	9.4986E-2	2.72907E1	-3.2653E1	-3.26248E1	2.68424E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80028E1	-8.10623E-4	-8.80007E1	5.96046E-4	4.07696E-3	9.52721E-2	2.73393E1	-3.26767E1	-3.26095E1	2.6846E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.8003E1	-6.67572E-4	-8.80007E1	6.91414E-4	4.26769E-3	9.50813E-2	2.72961E1	-3.26729E1	-3.2629E1	2.68238E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80028E1	-5.96046E-4	-8.80008E1	5.96046E-4	4.12464E-3	9.49144E-2	2.73112E1	-3.26554E1	-3.2648E1	2.68478E1	1.20174E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00041E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80027E1	-7.39098E-4	-8.80005E1	5.96046E-4	4.36306E-3	9.52721E-2	2.73234E1	-3.26472E1	-3.26319E1	2.68151E1	1.19978E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.00144E-1
1.4E1	3.509E3	2.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80026E1	-6.67572E-4	-8.80006E1	5.00679E-4	4.673E-3	9.48191E-2	2.73045E1	-3.26338E1	-3.26284E1	2.68382E1	1.19841E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00852E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80025E1	-4.76837E-4	-8.80004E1	3.57628E-4	4.74453E-3	9.48429E-2	2.73311E1	-3.2652E1	-3.26301E1	2.68268E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01609E-1
1.6E1	4.56E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80025E1	-3.8147E-4	-8.80007E1	6.67572E-4	4.55379E-3	9.47475E-2	2.74132E1	-3.26723E1	-3.25245E1	2.68298E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9952E-1
1.7E1	8.74E2	2.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80025E1	-2.6226E-4	-8.80004E1	3.33786E-4	4.673E-3	9.50098E-2	2.73434E1	-3.26419E1	-3.26537E1	2.68442E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.98222E-1
1.8E1	3.758E3	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80025E1	-4.29153E-4	-8.80008E1	2.14577E-4	4.55379E-3	9.49144E-2	2.73137E1	-3.26762E1	-3.26168E1	2.68418E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0148E-1
1.9E1	2.105E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80025E1	-6.19888E-4	-8.8001E1	2.6226E-4	4.24385E-3	9.50098E-2	2.73399E1	-3.2653E1	-3.26242E1	2.68436E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.99E-1
2.0E1	2.6305E4	2.0E1	8.08E2	5.58E2	-7.24736E-2	-8.80025E1	-5.00679E-4	-8.80009E1	4.52995E-4	4.55379E-3	9.51767E-2	2.73257E1	-3.2685E1	-3.2626E1	2.6855E1	1.19549E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
2.1E1	7.5E1	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80024E1	-6.91414E-4	-8.80009E1	3.33786E-4	4.43459E-3	9.50336E-2	2.73393E1	-3.26826E1	-3.26514E1	2.67897E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
2.2E1	1.812E3	1.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80024E1	-6.19888E-4	-8.80008E1	4.05312E-4	4.24385E-3	9.52482E-2	2.73321E1	-3.26687E1	-3.26032E1	2.68737E1	1.2026E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80027E1	-3.33786E-4	-8.80007E1	3.8147E-4	4.55379E-3	9.51052E-2	2.73293E1	-3.26779E1	-3.26443E1	2.68358E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1