[Scan]
initial_time=2016-01-18T20:53:31
final_time=2016-01-18T20:53:50
ip_count=19
run=1024
dataset=7
scan=528
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.80425E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.08902E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.42903E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.28224E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.59322E-8
mult1=-1.75026E-8
mult2=-2.97999E-9
rf_tmon=-3.89598E-3
rf_agc=3.42706E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.54621E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.38045E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.78556E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=2.56414E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98936E0
lens1_imon=1.4602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.30341E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.25742E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21847E0
cs_ionrep_imon=1.18802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.96252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.99972E-8
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.55647E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.97946E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=9.43243E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3105E0
ionrepsh_imon=1.77698E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44559E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.41373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73511E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68644E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.04017E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.67529E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.94917E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56669E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-8.7158E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.41702E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.59942E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.4203E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07095E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65137E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.94708E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62113E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66199E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.21531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.82698E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.34354E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.994E3	0.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80027E1	-7.86781E-4	-8.80007E1	6.19888E-4	4.88758E-3	9.4986E-2	2.73171E1	-3.26536E1	-3.26573E1	2.68487E1	1.20414E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0071E-1
2.0E0	1.05491E5	8.9E1	3.16E2	1.6E2	-7.13915E-2	-8.80027E1	-5.24521E-4	-8.80005E1	6.19888E-4	4.76837E-3	9.52005E-2	2.73141E1	-3.26398E1	-3.26254E1	2.68257E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0148E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80025E1	-5.00679E-4	-8.80009E1	4.76837E-4	4.64916E-3	9.51529E-2	2.73334E1	-3.26773E1	-3.26366E1	2.68227E1	1.19809E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
4.0E0	2.3272E4	9.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80026E1	-6.19888E-4	-8.80009E1	2.86102E-4	4.57764E-3	9.5129E-2	2.73287E1	-3.26561E1	-3.26396E1	2.68556E1	1.20174E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.98222E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80027E1	-8.10623E-4	-8.80007E1	4.05312E-4	4.74453E-3	9.51767E-2	2.73074E1	-3.26937E1	-3.263E1	2.68423E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80026E1	-7.15256E-4	-8.80004E1	5.00679E-4	4.48227E-3	9.53197E-2	2.73515E1	-3.26216E1	-3.26266E1	2.68484E1	1.20016E-7	2.5216E-3	2.5216E-3	6.33809E-3	2.99906E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80029E1	-9.53674E-4	-8.80007E1	3.33786E-4	4.36306E-3	9.51529E-2	2.73231E1	-3.26777E1	-3.26392E1	2.67984E1	1.20171E-7	2.51411E-3	2.51411E-3	6.33065E-3	2.99811E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80028E1	-9.29832E-4	-8.80011E1	5.00679E-4	4.79221E-3	9.48191E-2	2.73096E1	-3.26523E1	-3.26204E1	2.68662E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01085E-1
1.2E1	9.9E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.8003E1	-9.29832E-4	-8.80009E1	6.19888E-4	4.69685E-3	9.4986E-2	2.72943E1	-3.26521E1	-3.26171E1	2.6847E1	1.19773E-7	2.51956E-3	2.51956E-3	6.29211E-3	2.98937E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80027E1	-6.67572E-4	-8.80005E1	2.14577E-4	5.05447E-3	9.48191E-2	2.73328E1	-3.26767E1	-3.26343E1	2.67806E1	1.20226E-7	2.51758E-3	2.51758E-3	6.3016E-3	2.97613E-1
1.4E1	3.396E3	4.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80023E1	-5.48363E-4	-8.80004E1	4.29153E-4	4.81606E-3	9.52721E-2	2.73351E1	-3.26621E1	-3.26278E1	2.68827E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80024E1	-8.10623E-4	-8.80006E1	2.86102E-4	5.07832E-3	9.52482E-2	2.73228E1	-3.26803E1	-3.26236E1	2.68383E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.6E1	4.62E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80023E1	-7.15256E-4	-8.80007E1	3.09944E-4	5.10216E-3	9.50098E-2	2.73556E1	-3.26633E1	-3.26428E1	2.68514E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02659E-1
1.7E1	9.65E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80024E1	-8.10623E-4	-8.80006E1	3.57628E-4	4.81606E-3	9.4986E-2	2.73285E1	-3.26536E1	-3.25906E1	2.68352E1	1.20122E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01871E-1
1.8E1	3.819E3	3.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80026E1	-6.91414E-4	-8.80003E1	5.72205E-4	4.8399E-3	9.50098E-2	2.73399E1	-3.26837E1	-3.26392E1	2.68244E1	1.20226E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
1.9E1	2.019E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80025E1	-5.96046E-4	-8.80007E1	3.57628E-4	4.673E-3	9.50098E-2	2.73279E1	-3.26801E1	-3.26098E1	2.68779E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99175E-1
2.0E1	2.6256E4	2.1E1	8.08E2	5.58E2	-7.18554E-2	-8.80028E1	-6.19888E-4	-8.80006E1	5.48363E-4	4.72069E-3	9.46999E-2	2.73428E1	-3.26785E1	-3.25883E1	2.68401E1	1.19965E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80026E1	-4.76837E-4	-8.80011E1	2.86102E-4	4.72069E-3	9.46045E-2	2.7308E1	-3.26661E1	-3.2629E1	2.68382E1	1.19953E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00197E-1
2.2E1	1.826E3	2.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80025E1	-4.05312E-4	-8.80009E1	9.53674E-5	4.88758E-3	9.48191E-2	2.73484E1	-3.26543E1	-3.26506E1	2.67806E1	1.19965E-7	2.51771E-3	2.51771E-3	6.26371E-3	3.00563E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80027E1	-1.90735E-4	-8.80008E1	3.57628E-4	4.86374E-3	9.50098E-2	2.73511E1	-3.26809E1	-3.26136E1	2.68644E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1