[Scan]
initial_time=2016-01-18T20:53:58
final_time=2016-01-18T20:54:17
ip_count=19
run=1024
dataset=7
scan=529
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.84657E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.07674E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.3777E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.31981E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.5916E-8
mult1=-1.72778E-8
mult2=-2.78648E-9
rf_tmon=-5.70206E-3
rf_agc=3.20358E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=5.81992E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.7971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.56635E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98007E0
lens1_imon=1.72303E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.46828E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.92396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.30293E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.95243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=4.00415E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.56237E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.97892E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.12702E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.15323E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49002E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73484E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68773E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.12927E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.6763E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56615E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.696E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.41976E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06783E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65012E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.94906E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66377E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70568E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54861E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.03027E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.05543E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.967E3	2.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80027E1	-9.05991E-4	-8.80004E1	0.0E0	5.00679E-3	9.50098E-2	2.73405E1	-3.26512E1	-3.2611E1	2.6837E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
2.0E0	1.04918E5	1.08E2	3.16E2	1.6E2	-7.19325E-2	-8.80027E1	-7.39098E-4	-8.80008E1	4.29153E-4	4.88758E-3	9.51052E-2	2.73375E1	-3.26701E1	-3.26199E1	2.68707E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9874E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80028E1	-6.67572E-4	-8.80008E1	2.14577E-4	4.86374E-3	9.52482E-2	2.72886E1	-3.26721E1	-3.26141E1	2.68082E1	1.19925E-7	2.51025E-3	2.51025E-3	6.34099E-3	2.97762E-1
4.0E0	2.3213E4	1.2E1	6.55E2	3.98E2	-7.15461E-2	-8.8003E1	-6.4373E-4	-8.80005E1	3.09944E-4	4.57764E-3	9.53197E-2	2.73231E1	-3.26512E1	-3.26573E1	2.68358E1	1.20028E-7	2.51369E-3	2.51369E-3	6.3074E-3	2.98522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80028E1	-2.86102E-4	-8.80007E1	2.86102E-4	4.33922E-3	9.5439E-2	2.73222E1	-3.2664E1	-3.26248E1	2.68196E1	1.20403E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80024E1	-1.66893E-4	-8.80008E1	1.90735E-4	4.26769E-3	9.49144E-2	2.73098E1	-3.26703E1	-3.26337E1	2.6813E1	1.19965E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80028E1	-3.33786E-4	-8.80008E1	2.38419E-4	4.36306E-3	9.50336E-2	2.73183E1	-3.26717E1	-3.26272E1	2.68599E1	1.20004E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80026E1	-1.43051E-4	-8.80008E1	2.14577E-4	4.29153E-3	9.53197E-2	2.73207E1	-3.2647E1	-3.25978E1	2.68348E1	1.19766E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.0201E-1
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80026E1	-1.43051E-4	-8.80009E1	5.24521E-4	4.45843E-3	9.51767E-2	2.73315E1	-3.26434E1	-3.26176E1	2.68001E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98156E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80025E1	-5.96046E-4	-8.80008E1	3.33786E-4	4.43459E-3	9.52959E-2	2.73069E1	-3.26657E1	-3.2644E1	2.68754E1	1.20096E-7	2.51716E-3	2.51716E-3	6.32386E-3	3.00432E-1
1.4E1	3.452E3	2.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80026E1	-5.96046E-4	-8.80005E1	3.8147E-4	4.8399E-3	9.53197E-2	2.73405E1	-3.2672E1	-3.26148E1	2.67986E1					
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80027E1	-5.72205E-4	-8.80006E1	1.66893E-4	4.69685E-3	9.48668E-2	2.73147E1	-3.26609E1	-3.26284E1	2.68268E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.6E1	4.49E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80026E1	-6.19888E-4	-8.80009E1	4.05312E-4	4.81606E-3	9.51052E-2	2.73369E1	-3.26879E1	-3.26302E1	2.68923E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.7E1	9.54E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80028E1	-4.76837E-4	-8.80006E1	4.52995E-4	4.57764E-3	9.46999E-2	2.73016E1	-3.26626E1	-3.26201E1	2.68412E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00302E-1
1.8E1	3.803E3	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80028E1	-5.72205E-4	-8.80007E1	5.00679E-4	4.41074E-3	9.50098E-2	2.73249E1	-3.26609E1	-3.2611E1	2.68442E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
1.9E1	2.111E3	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80027E1	-2.86102E-4	-8.80006E1	1.43051E-4	4.43459E-3	9.50098E-2	2.73243E1	-3.26603E1	-3.2638E1	2.68424E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.0E1	2.632E4	1.1E1	8.08E2	5.58E2	-7.31692E-2	-8.80029E1	-6.91414E-4	-8.80006E1	3.09944E-4	4.57764E-3	9.48906E-2	2.73393E1	-3.26975E1	-3.26386E1	2.68923E1	1.20244E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.01209E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80029E1	-2.6226E-4	-8.80005E1	5.00679E-4	4.43459E-3	9.48668E-2	2.73275E1	-3.2672E1	-3.25995E1	2.68314E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
2.2E1	1.868E3	3.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80026E1	-3.8147E-4	-8.80006E1	5.48363E-4	4.48227E-3	9.48906E-2	2.73339E1	-3.26422E1	-3.25852E1	2.6777E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80031E1	-5.24521E-4	-8.80004E1	1.90735E-4	4.24385E-3	9.52244E-2	2.73484E1	-3.26729E1	-3.26296E1	2.68773E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.03027E-1