[Scan]
initial_time=2016-01-18T20:54:25
final_time=2016-01-18T20:54:44
ip_count=19
run=1024
dataset=7
scan=530
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.83451E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.76327E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.45009E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.4158E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.5896E-8
mult1=-1.7639E-8
mult2=-2.31939E-9
rf_tmon=-7.73285E-3
rf_agc=3.02694E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.61154E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65443E0
bslens_imon=2.62386E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19609E1
lens5a_imon=2.01035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05258E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54017E1
cs_ef1b_imon=2.81036E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04615E1
cs_ea1_imon=2.54551E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98329E0
lens1_imon=1.33465E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.97017E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03727E1
cs_ea2_imon=1.51818E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84294E1
cs_ef1a_imon=2.92414E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.30293E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11529E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15379E1
os_ea1_imon=2.39785E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63766E1
os_ef1bup_imon=3.07047E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23373E0
cs_ionrep_imon=1.21075E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93633E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01877E1
cs_anode1_imon=2.9567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.99529E-8
tplens_vset=1.4E-1
tplens_vmon=1.7002E0
tplens_imon=-3.51244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.47741E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.56262E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98258E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=8.92067E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30719E0
ionrepsh_imon=1.76647E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18409E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74757E1
cs_ef2b_imon=3.13522E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52512E0
os_ea2_imon=-7.25887E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00329E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71357E1
cs_ef2a_imon=3.15243E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03148E0
os_ef2alow_imon=-2.52566E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88275E-1
os_ef2bup_imon=-5.2278E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.41928E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28386E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01877E1
cs_anode2_imon=2.25159E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.09725E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68267E1
iondef4_imon=1.10075E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.06103E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.6834E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14324E0
cs_ionaccel_imon=-1.76218E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47335E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.60176E-6
window_vset=0.0E0
window_vmon=2.41923E-1
window_imon=-7.59164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39002E-4
mask2_vset=0.0E0
mask2_vmon=-1.86388E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92695E3
multa_neg_imon=8.09292E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.64577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.2261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53532E0
defgridb_imon=6.03238E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.4131E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64887E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.94592E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66411E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92275E-2
os_fil2_imon=-2.69993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44929E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.47537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.43245E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.66246E-1
res40_imon=-2.54437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.035E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80024E1	-6.91414E-4	-8.80007E1	7.39098E-4	4.74453E-3	9.51052E-2	2.73085E1	-3.26778E1	-3.26437E1	2.68032E1	1.20297E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.99348E-1
2.0E0	1.04668E5	1.02E2	3.16E2	1.6E2	-7.13915E-2	-8.80023E1	-7.86781E-4	-8.80004E1	7.62939E-4	4.91142E-3	9.53197E-2	2.73345E1	-3.26669E1	-3.25852E1	2.684E1	1.20078E-7	2.51575E-3	2.51575E-3	6.323E-3	2.99506E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80024E1	-1.00136E-3	-8.80007E1	5.48363E-4	4.43459E-3	9.50813E-2	2.73151E1	-3.26585E1	-3.26349E1	2.68447E1	1.20069E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9874E-1
4.0E0	2.3038E4	7.0E0	6.55E2	3.98E2	-7.00776E-2	-8.80024E1	-9.77516E-4	-8.80007E1	8.34465E-4	4.19617E-3	9.52005E-2	2.73474E1	-3.26532E1	-3.26486E1	2.68511E1	1.19851E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.08504E-2	-8.80024E1	-6.91414E-4	-8.80006E1	8.10623E-4	4.48227E-3	9.51529E-2	2.73265E1	-3.26774E1	-3.26334E1	2.68294E1	1.20192E-7	2.52342E-3	2.52342E-3	6.3445E-3	3.01104E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80023E1	-7.86781E-4	-8.80006E1	5.96046E-4	4.36306E-3	9.49383E-2	2.73334E1	-3.26502E1	-3.26172E1	2.68046E1	1.20084E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.8002E1	-6.67572E-4	-8.80007E1	3.57628E-4	4.48227E-3	9.51529E-2	2.73255E1	-3.26506E1	-3.26068E1	2.68472E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80024E1	-8.34465E-4	-8.80009E1	6.67572E-4	4.60148E-3	9.52244E-2	2.73039E1	-3.26785E1	-3.26048E1	2.68343E1	1.20487E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01871E-1
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80024E1	-6.91414E-4	-8.80007E1	6.19888E-4	4.74453E-3	9.50336E-2	2.73105E1	-3.26392E1	-3.26561E1	2.68268E1	1.20487E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02133E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80026E1	-6.91414E-4	-8.80008E1	5.48363E-4	4.29153E-3	9.51052E-2	2.73526E1	-3.26699E1	-3.26645E1	2.68623E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
1.4E1	3.38E3	2.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80024E1	-5.24521E-4	-8.80009E1	7.39098E-4	4.95911E-3	9.51052E-2	2.7324E1	-3.26832E1	-3.26195E1	2.68202E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80021E1	-1.0252E-3	-8.80011E1	6.4373E-4	4.45843E-3	9.5129E-2	2.73222E1	-3.26505E1	-3.26315E1	2.68082E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
1.6E1	4.58E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80025E1	-9.29832E-4	-8.80011E1	1.66893E-4	4.8399E-3	9.49144E-2	2.73009E1	-3.26699E1	-3.26068E1	2.68484E1	1.20383E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02133E-1
1.7E1	9.71E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80027E1	-9.29832E-4	-8.8001E1	4.76837E-4	5.03063E-3	9.50336E-2	2.73117E1	-3.26591E1	-3.26266E1	2.68172E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00942E-1
1.8E1	3.881E3	2.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80025E1	-7.62939E-4	-8.8001E1	3.8147E-4	4.86374E-3	9.52005E-2	2.73381E1	-3.2652E1	-3.26467E1	2.68232E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99941E-1
1.9E1	2.115E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80024E1	-7.39098E-4	-8.80012E1	4.29153E-4	4.8399E-3	9.49144E-2	2.73267E1	-3.26717E1	-3.26146E1	2.68232E1	1.19749E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0148E-1
2.0E1	2.6436E4	1.4E1	8.08E2	5.58E2	-7.20871E-2	-8.80025E1	-8.34465E-4	-8.80009E1	5.00679E-4	4.50611E-3	9.47952E-2	2.73177E1	-3.26819E1	-3.2638E1	2.67839E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80026E1	-5.00679E-4	-8.80005E1	3.8147E-4	4.64916E-3	9.46999E-2	2.73311E1	-3.26767E1	-3.26172E1	2.68496E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
2.2E1	1.856E3	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80025E1	-3.57628E-4	-8.80007E1	3.09944E-4	4.86374E-3	9.50813E-2	2.73423E1	-3.26496E1	-3.26549E1	2.68406E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80025E1	-5.48363E-4	-8.80006E1	1.19209E-4	4.69685E-3	9.53436E-2	2.73147E1	-3.26398E1	-3.2626E1	2.68267E1	1.19851E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.01738E-1