[Scan]
initial_time=2016-01-18T20:55:45
final_time=2016-01-18T20:56:04
ip_count=19
run=1024
dataset=7
scan=533
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.78185E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.2695E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.36869E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.19898E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.59437E-8
mult1=-1.15682E-8
mult2=-2.8526E-9
rf_tmon=-7.86012E-3
rf_agc=2.95278E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.15687E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19512E1
lens5a_imon=2.01908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04824E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.80178E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.56556E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96812E0
lens1_imon=1.53453E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.47365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.9254E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.29899E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14775E1
os_ea1_imon=2.39036E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.19652E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.96E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.99444E-8
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-4.72318E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25009E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27045E1
iondef2_imon=1.55329E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98031E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=8.98826E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.7568E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4916E0
os_ea2_imon=-8.08562E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.41121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74431E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68647E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.96917E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.65274E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.31758E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=6.86842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.83302E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48824E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.42372E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64777E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.95837E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66053E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.45829E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22416E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67701E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.931E3	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80027E1	-4.52995E-4	-8.80007E1	3.09944E-4	4.76837E-3	9.4986E-2	2.73111E1	-3.26615E1	-3.26164E1	2.68112E1	1.2026E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.00197E-1
2.0E0	1.06116E5	8.4E1	3.16E2	1.6E2	-7.22418E-2	-8.80026E1	-3.8147E-4	-8.80006E1	2.86102E-4	4.95911E-3	9.49383E-2	2.73357E1	-3.26652E1	-3.26095E1	2.68761E1	1.20122E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.98481E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80026E1	-4.52995E-4	-8.80005E1	5.00679E-4	4.57764E-3	9.48906E-2	2.7337E1	-3.26567E1	-3.26167E1	2.68538E1	1.19978E-7	2.52473E-3	2.52473E-3	6.29067E-3	3.0041E-1
4.0E0	2.3228E4	1.1E1	6.55E2	3.98E2	-7.29374E-2	-8.80023E1	-7.39098E-4	-8.80003E1	3.09944E-4	4.36306E-3	9.49144E-2	2.73081E1	-3.26735E1	-3.26278E1	2.68099E1	1.19841E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80026E1	-8.10623E-4	-8.80005E1	3.8147E-4	4.81606E-3	9.50098E-2	2.73562E1	-3.2629E1	-3.26422E1	2.68821E1	1.20017E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80027E1	-5.24521E-4	-8.80008E1	3.09944E-4	4.3869E-3	9.5129E-2	2.73045E1	-3.26484E1	-3.26024E1	2.68256E1	1.20174E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80027E1	-8.82149E-4	-8.80008E1	4.29153E-4	4.72069E-3	9.49144E-2	2.73014E1	-3.27005E1	-3.25994E1	2.68444E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80025E1	-2.6226E-4	-8.80008E1	4.29153E-4	4.36306E-3	9.51767E-2	2.73051E1	-3.26687E1	-3.2617E1	2.68507E1	1.20072E-7	2.5157E-3	2.5157E-3	6.31225E-3	3.00567E-1
1.2E1	1.11E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80027E1	0.0E0	-8.80008E1	5.24521E-4	4.8399E-3	9.4986E-2	2.72967E1	-3.26741E1	-3.26224E1	2.6813E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80025E1	-5.96046E-4	-8.80007E1	4.76837E-4	4.60148E-3	9.51529E-2	2.73736E1	-3.26963E1	-3.26128E1	2.68731E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02659E-1
1.4E1	3.536E3	2.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80027E1	-4.29153E-4	-8.80007E1	7.15256E-4	4.60148E-3	9.51529E-2	2.7364E1	-3.26753E1	-3.25924E1	2.6797E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00302E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80026E1	-9.05991E-4	-8.80005E1	5.48363E-4	4.43459E-3	9.53197E-2	2.73311E1	-3.26986E1	-3.26266E1	2.68695E1	1.19705E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.6E1	4.53E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80027E1	-9.53674E-4	-8.80005E1	5.24521E-4	4.91142E-3	9.4986E-2	2.72961E1	-3.265E1	-3.26446E1	2.68028E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
1.7E1	8.67E2	2.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80027E1	-8.82149E-4	-8.80003E1	6.19888E-4	4.76837E-3	9.4986E-2	2.73153E1	-3.26314E1	-3.26182E1	2.68142E1	1.19861E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00824E-1
1.8E1	3.834E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80029E1	-5.96046E-4	-8.80003E1	5.96046E-4	4.72069E-3	9.49383E-2	2.73122E1	-3.26178E1	-3.26396E1	2.6795E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
1.9E1	2.09E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80027E1	-4.76837E-4	-8.80003E1	5.00679E-4	4.62532E-3	9.5129E-2	2.73808E1	-3.26693E1	-3.25888E1	2.68923E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.0E1	2.6423E4	2.3E1	8.08E2	5.58E2	-7.29374E-2	-8.80027E1	-6.4373E-4	-8.80001E1	5.00679E-4	4.74453E-3	9.4986E-2	2.73526E1	-3.26573E1	-3.26182E1	2.67794E1	1.20122E-7	2.51007E-3	2.51007E-3	6.29098E-3	3.00041E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80023E1	-7.15256E-4	-8.80004E1	7.15256E-4	4.673E-3	9.50575E-2	2.73163E1	-3.26661E1	-3.2606E1	2.68679E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
2.2E1	1.909E3	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80028E1	-8.82149E-4	-8.80003E1	9.29832E-4	4.52995E-3	9.53674E-2	2.73098E1	-3.2662E1	-3.26372E1	2.68105E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80028E1	-4.29153E-4	-8.80008E1	7.86781E-4	4.48227E-3	9.50336E-2	2.74431E1	-3.27045E1	-3.25009E1	2.68647E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1