[Scan]
initial_time=2016-01-18T20:56:38
final_time=2016-01-18T20:56:58
ip_count=19
run=1024
dataset=7
scan=535
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.77711E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.18331E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.39183E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.22526E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.59603E-8
mult1=-1.8518E-8
mult2=-1.78843E-9
rf_tmon=-1.25334E-2
rf_agc=2.62438E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.80776E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.38398E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=2.7971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.55777E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99939E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.48427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.92828E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.29743E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.27364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.39956E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.17316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93661E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.93873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.99157E-8
tplens_vset=1.4E-1
tplens_vmon=1.63317E0
tplens_imon=-5.00633E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25293E1
iondef2_imon=1.55931E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=8.9705E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31522E0
ionrepsh_imon=1.78937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.16667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50399E0
os_ea2_imon=-7.37774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03354E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11334E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.26637E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72582E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.01456E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.63574E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.74619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.28795E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39079E0
defgridb_imon=6.25964E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.4266E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06278E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64718E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.96053E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83841E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.57725E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22413E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28969E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.979E3	2.0E0	1.47E2	4.1E1	-7.16233E-2	-8.8003E1	-5.96046E-4	-8.8001E1	2.38419E-4	4.60148E-3	9.4676E-2	2.72933E1	-3.26543E1	-3.26065E1	2.68557E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00302E-1
2.0E0	1.06042E5	9.8E1	3.16E2	1.6E2	-7.20871E-2	-8.80029E1	-4.29153E-4	-8.80006E1	5.24521E-4	4.69685E-3	9.49144E-2	2.73331E1	-3.26752E1	-3.26137E1	2.67798E1	1.20042E-7	2.51814E-3	2.51814E-3	6.28103E-3	3.02115E-1
3.0E0	1.6E1	1.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80028E1	-5.24521E-4	-8.80006E1	6.19888E-4	4.69685E-3	9.48668E-2	2.72956E1	-3.26381E1	-3.26546E1	2.68643E1	1.19841E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.00348E-1
4.0E0	2.2869E4	1.2E1	6.55E2	3.98E2	-7.286E-2	-8.80029E1	-4.05312E-4	-8.80004E1	7.62939E-4	4.55379E-3	9.47237E-2	2.73303E1	-3.26164E1	-3.26825E1	2.68587E1	1.19829E-7	2.51158E-3	2.51158E-3	6.3245E-3	2.98361E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80027E1	-6.4373E-4	-8.80006E1	6.4373E-4	4.33922E-3	9.51052E-2	2.73275E1	-3.26378E1	-3.26213E1	2.68238E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80028E1	-4.29153E-4	-8.80004E1	5.96046E-4	4.45843E-3	9.50813E-2	2.7329E1	-3.26689E1	-3.26346E1	2.68274E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80028E1	-5.96046E-4	-8.80005E1	5.00679E-4	4.41074E-3	9.52721E-2	2.7288E1	-3.2649E1	-3.25871E1	2.68684E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80028E1	-5.72205E-4	-8.80006E1	5.48363E-4	4.95911E-3	9.53197E-2	2.73165E1	-3.26675E1	-3.25978E1	2.68169E1	1.19902E-7	2.50775E-3	2.50775E-3	6.30202E-3	3.00453E-1
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80026E1	-9.53674E-4	-8.80006E1	3.33786E-4	4.673E-3	9.50575E-2	2.73424E1	-3.26456E1	-3.26603E1	2.68424E1	1.20031E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.02813E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80027E1	-6.67572E-4	-8.80009E1	8.10623E-4	4.57764E-3	9.53436E-2	2.73051E1	-3.26266E1	-3.26146E1	2.68274E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
1.4E1	3.474E3	3.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80028E1	-7.15256E-4	-8.80006E1	4.29153E-4	4.81606E-3	9.49144E-2	2.73159E1	-3.26843E1	-3.26308E1	2.68298E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80026E1	-7.15256E-4	-8.80007E1	5.96046E-4	4.76837E-3	9.50813E-2	2.73592E1	-3.26795E1	-3.25803E1	2.68166E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98819E-1
1.6E1	4.59E2	0.0E0	6.47E2	4.41E2	-7.45602E-2	-8.80023E1	-5.48363E-4	-8.80007E1	5.96046E-4	4.69685E-3	9.52244E-2	2.73568E1	-3.26765E1	-3.26374E1	2.6837E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
1.7E1	9.41E2	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80028E1	-5.48363E-4	-8.80008E1	6.4373E-4	4.50611E-3	9.52482E-2	2.73326E1	-3.26878E1	-3.26046E1	2.67938E1	1.2033E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01347E-1
1.8E1	3.805E3	4.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80026E1	-4.52995E-4	-8.80004E1	6.4373E-4	5.14984E-3	9.50098E-2	2.73499E1	-3.2711E1	-3.25995E1	2.68136E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01347E-1
1.9E1	2.048E3	2.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80024E1	-7.62939E-4	-8.80007E1	6.91414E-4	4.88758E-3	9.49621E-2	2.73429E1	-3.26609E1	-3.26128E1	2.68581E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9978E-1
2.0E1	2.5932E4	1.2E1	8.08E2	5.58E2	-7.30146E-2	-8.80029E1	-7.39098E-4	-8.8001E1	4.29153E-4	4.88758E-3	9.50098E-2	2.73574E1	-3.26338E1	-3.26681E1	2.68454E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80027E1	-9.05991E-4	-8.80009E1	6.4373E-4	4.57764E-3	9.52959E-2	2.73234E1	-3.26431E1	-3.26201E1	2.68267E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
2.2E1	1.828E3	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80029E1	-8.34465E-4	-8.80005E1	3.09944E-4	4.52995E-3	9.5439E-2	2.73033E1	-3.26425E1	-3.26413E1	2.68587E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80029E1	-6.67572E-4	-8.80007E1	5.48363E-4	4.50611E-3	9.54628E-2	2.72582E1	-3.25293E1	-3.26374E1	2.68316E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02511E-1