[Scan]
initial_time=2016-01-18T20:57:32
final_time=2016-01-18T20:57:51
ip_count=19
run=1024
dataset=7
scan=537
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.80346E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.78885E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.33151E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.16441E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.5955E-8
mult1=-2.3575E-8
mult2=-1.9042E-9
rf_tmon=-7.28223E-3
rf_agc=3.02153E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.26822E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.38398E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19518E1
lens5a_imon=2.00421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54154E1
cs_ef1b_imon=2.80215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04487E1
cs_ea1_imon=2.55388E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00882E0
lens1_imon=1.63009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03413E1
cs_ea2_imon=1.51471E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.92136E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.297E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1491E1
os_ea1_imon=2.37266E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.18236E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93537E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02093E1
cs_anode1_imon=2.95159E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.99896E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26669E1
iondef3_imon=1.51719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25407E1
iondef2_imon=1.554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=9.13405E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=1.7745E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34017E1
lens5b_imon=2.16525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46446E0
os_ea2_imon=-5.2187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00357E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04819E0
os_ef2alow_imon=-2.43557E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.32351E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.41137E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.23951E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72582E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.10241E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.99728E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.64768E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14868E0
cs_ionaccel_imon=-1.75442E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47358E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.56493E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.75681E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.65605E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.01707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23429E0
defgridb_imon=6.04373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.42582E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06953E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6477E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.94717E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6599E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80042E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43931E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.65181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22343E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86429E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.044E3	4.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80029E1	-8.10623E-4	-8.80008E1	5.24521E-4	4.60148E-3	9.48668E-2	2.73642E1	-3.26776E1	-3.26318E1	2.68337E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.98665E-1
2.0E0	1.05923E5	1.16E2	3.16E2	1.6E2	-7.30146E-2	-8.80029E1	-5.72205E-4	-8.80008E1	5.24521E-4	4.74453E-3	9.50098E-2	2.73516E1	-3.26744E1	-3.26493E1	2.68319E1	1.20243E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.99594E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80028E1	-6.67572E-4	-8.80007E1	5.72205E-4	4.673E-3	9.52721E-2	2.73549E1	-3.26799E1	-3.26156E1	2.68632E1	1.19766E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.97499E-1
4.0E0	2.357E4	9.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80024E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.64916E-3	9.4986E-2	2.73027E1	-3.26744E1	-3.26018E1	2.68256E1	1.20142E-7	2.51393E-3	2.51393E-3	6.32858E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80025E1	-5.72205E-4	-8.80008E1	6.4373E-4	4.64916E-3	9.52005E-2	2.73261E1	-3.26693E1	-3.26344E1	2.68593E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80026E1	-6.67572E-4	-8.80003E1	5.00679E-4	4.74453E-3	9.50336E-2	2.73559E1	-3.26823E1	-3.26413E1	2.68268E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80023E1	-6.19888E-4	-8.80005E1	5.00679E-4	4.81606E-3	9.53674E-2	2.73269E1	-3.26449E1	-3.26508E1	2.68106E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.8002E1	-9.05991E-4	-8.80005E1	6.67572E-4	4.55379E-3	9.50575E-2	2.72588E1	-3.26164E1	-3.26218E1	2.68196E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.2E1	1.05E2	1.0E0	4.85E2	3.23E2	-7.286E-2	-8.80021E1	-7.86781E-4	-8.79999E1	8.58307E-4	4.64916E-3	9.50336E-2	2.73322E1	-3.26526E1	-3.26101E1	2.68779E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80025E1	-8.34465E-4	-8.80004E1	7.39098E-4	4.60148E-3	9.49144E-2	2.72929E1	-3.26297E1	-3.26615E1	2.68316E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
1.4E1	3.452E3	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80026E1	-7.62939E-4	-8.80001E1	8.34465E-4	4.86374E-3	9.51052E-2	2.73387E1	-3.26621E1	-3.26014E1	2.6786E1	1.20031E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.00942E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80028E1	-4.52995E-4	-8.80004E1	5.00679E-4	4.43459E-3	9.52005E-2	2.73189E1	-3.26675E1	-3.2617E1	2.68376E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
1.6E1	4.6E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80028E1	-5.72205E-4	-8.80002E1	7.15256E-4	4.673E-3	9.47714E-2	2.73237E1	-3.26645E1	-3.26518E1	2.68352E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.99613E-1
1.7E1	8.8E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80028E1	-5.24521E-4	-8.80006E1	5.72205E-4	4.60148E-3	9.49383E-2	2.73275E1	-3.26838E1	-3.25995E1	2.68587E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.8E1	3.917E3	5.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80026E1	-6.91414E-4	-8.80008E1	8.82149E-4	4.74453E-3	9.49383E-2	2.73075E1	-3.2644E1	-3.26476E1	2.68024E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
1.9E1	2.093E3	2.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80026E1	-3.8147E-4	-8.80007E1	6.4373E-4	4.8399E-3	9.50813E-2	2.73488E1	-3.26549E1	-3.26083E1	2.6843E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
2.0E1	2.6252E4	1.5E1	8.08E2	5.58E2	-7.15461E-2	-8.80026E1	-5.48363E-4	-8.80005E1	8.58307E-4	4.55379E-3	9.53436E-2	2.73189E1	-3.26524E1	-3.26284E1	2.69055E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9952E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80026E1	-7.62939E-4	-8.80007E1	7.86781E-4	4.60148E-3	9.55105E-2	2.73472E1	-3.26699E1	-3.26044E1	2.67944E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
2.2E1	1.881E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80025E1	-1.04904E-3	-8.80006E1	6.91414E-4	4.50611E-3	9.5129E-2	2.73529E1	-3.26526E1	-3.26219E1	2.6854E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80027E1	-8.10623E-4	-8.80008E1	4.52995E-4	4.60148E-3	9.5439E-2	2.72582E1	-3.25407E1	-3.26669E1	2.68088E1	1.19953E-7	2.52492E-3	2.52492E-3	6.33977E-3	2.98665E-1