[Scan]
initial_time=2016-01-18T20:58:52
final_time=2016-01-18T20:59:12
ip_count=19
run=1024
dataset=7
scan=540
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84532E-6
ql1_vset=
ql1_vmon=-8.80032E1
ql1_imon=-6.63674E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.42984E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.08181E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.59476E-8
mult1=-1.489E-8
mult2=-2.49396E-9
rf_tmon=-5.46512E-3
rf_agc=3.25304E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.46432E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66223E0
bslens_imon=2.44428E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19602E1
lens5a_imon=1.98914E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05044E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.79347E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02055E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04461E1
cs_ea1_imon=2.57453E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94385E0
lens1_imon=1.49875E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03783E1
cs_ea2_imon=1.48126E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.92692E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.29689E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11511E1
os_restr1_imon=4.27914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15555E1
os_ea1_imon=2.36596E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.18127E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93483E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02053E1
cs_anode1_imon=2.95646E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.99342E-8
tplens_vset=1.4E-1
tplens_vmon=1.64954E0
tplens_imon=-4.20112E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.51394E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.54488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98172E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=9.27722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28396E0
ionrepsh_imon=1.75727E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33785E1
lens5b_imon=2.18867E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4711E0
os_ea2_imon=-8.47685E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00466E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16428E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04529E0
os_ef2alow_imon=-2.53983E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88543E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11181E1
os_restr2_imon=3.4138E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.28573E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.2409E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73181E1
iondef1_imon=1.09123E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.09546E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.00447E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.66259E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1452E0
cs_ionaccel_imon=-1.744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47494E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=2.72711E-1
window_imon=-7.15322E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.23102E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.46625E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.2484E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=5.97958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.4202E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07462E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=9.95041E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63049E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66134E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.68035E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.41718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.55334E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.51676E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.096E3	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.8003E1	-5.96046E-4	-8.80003E1	8.10623E-4	5.00679E-3	9.52721E-2	2.73535E1	-3.26573E1	-3.26254E1	2.68516E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
2.0E0	1.05721E5	9.4E1	3.16E2	1.6E2	-7.37103E-2	-8.80028E1	-3.57628E-4	-8.80002E1	3.8147E-4	4.93526E-3	9.50336E-2	2.73213E1	-3.26609E1	-3.26512E1	2.68101E1	1.1979E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.99093E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80028E1	-7.86781E-4	-8.80006E1	5.24521E-4	4.91142E-3	9.4986E-2	2.73255E1	-3.26506E1	-3.26086E1	2.68725E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.00144E-1
4.0E0	2.3145E4	9.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80028E1	-2.86102E-4	-8.80007E1	3.57628E-4	4.76837E-3	9.51529E-2	2.72974E1	-3.26508E1	-3.26266E1	2.6834E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80025E1	-6.19888E-4	-8.80006E1	5.48363E-4	4.95911E-3	9.49621E-2	2.73538E1	-3.26825E1	-3.26242E1	2.68388E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97901E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80028E1	-8.10623E-4	-8.80001E1	4.76837E-4	5.126E-3	9.53436E-2	2.73417E1	-3.26476E1	-3.26368E1	2.68172E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80028E1	-5.00679E-4	-8.80001E1	4.29153E-4	4.72069E-3	9.50575E-2	2.73357E1	-3.26663E1	-3.2635E1	2.68406E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80027E1	-7.62939E-4	-8.80002E1	5.72205E-4	4.81606E-3	9.49383E-2	2.73296E1	-3.26647E1	-3.26101E1	2.68623E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
1.2E1	9.9E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.8003E1	-7.15256E-4	-8.80003E1	2.6226E-4	4.64916E-3	9.47714E-2	2.72964E1	-3.26416E1	-3.26385E1	2.68413E1	1.20028E-7	2.5199E-3	2.5199E-3	6.323E-3	3.01485E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80031E1	-4.76837E-4	-8.80003E1	7.86781E-4	4.74453E-3	9.49144E-2	2.73307E1	-3.26507E1	-3.26219E1	2.68433E1	1.20045E-7	2.51838E-3	2.51838E-3	6.3245E-3	3.01337E-1
1.4E1	3.517E3	3.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80031E1	-8.10623E-4	-8.80005E1	7.39098E-4	4.55379E-3	9.46045E-2	2.733E1	-3.2653E1	-3.2613E1	2.68417E1	1.19807E-7	2.51747E-3	2.51747E-3	6.3074E-3	2.99981E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80029E1	-3.33786E-4	-8.80009E1	7.39098E-4	4.79221E-3	9.49383E-2	2.73178E1	-3.26341E1	-3.26625E1	2.68574E1					
1.6E1	4.53E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80029E1	-5.00679E-4	-8.80007E1	7.39098E-4	4.22001E-3	9.48191E-2	2.7335E1	-3.26372E1	-3.26117E1	2.68113E1	1.19991E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.00097E-1
1.7E1	1.004E3	1.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80027E1	-2.86102E-4	-8.80011E1	7.86781E-4	4.36306E-3	9.4986E-2	2.73108E1	-3.26804E1	-3.26499E1	2.6833E1	1.19883E-7	2.51838E-3	2.51838E-3	6.33592E-3	3.00794E-1
1.8E1	3.934E3	2.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80028E1	-3.09944E-4	-8.80011E1	5.24521E-4	4.43459E-3	9.48668E-2	2.73523E1	-3.26915E1	-3.26455E1	2.68395E1	1.19851E-7	2.50867E-3	2.50867E-3	6.33282E-3	3.006E-1
1.9E1	2.197E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80028E1	-5.00679E-4	-8.80005E1	4.29153E-4	4.57764E-3	9.53436E-2	2.73592E1	-3.26735E1	-3.25936E1	2.684E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
2.0E1	2.6074E4	1.2E1	8.08E2	5.58E2	-7.25507E-2	-8.80029E1	-6.91414E-4	-8.80005E1	2.38419E-5	4.57764E-3	9.52244E-2	2.73604E1	-3.26386E1	-3.26302E1	2.68505E1	1.19766E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.00144E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80031E1	-3.8147E-4	-8.80006E1	5.72205E-4	4.50611E-3	9.50098E-2	2.73257E1	-3.2675E1	-3.26325E1	2.6855E1	1.198E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
2.2E1	1.938E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80029E1	-4.05312E-4	-8.80004E1	5.24521E-4	4.673E-3	9.4986E-2	2.73198E1	-3.26531E1	-3.26425E1	2.68192E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80032E1	-6.19888E-4	-8.80007E1	6.67572E-4	4.673E-3	9.51767E-2	2.73181E1	-3.26626E1	-3.26195E1	2.68424E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99941E-1