[Scan]
initial_time=2016-01-18T20:59:19
final_time=2016-01-18T20:59:38
ip_count=19
run=1024
dataset=7
scan=541
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.78016E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.05171E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.34745E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.15737E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.5887E-8
mult1=-1.65783E-8
mult2=-2.74836E-9
rf_tmon=-3.32177E-3
rf_agc=3.39466E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.56636E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62889E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19364E1
lens5a_imon=1.96937E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.82845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.56347E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97226E0
lens1_imon=1.55E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.5119E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.29834E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11778E1
os_restr1_imon=4.25021E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14891E1
os_ea1_imon=2.38394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62969E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.9672E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.98986E-8
tplens_vset=1.4E-1
tplens_vmon=1.65645E0
tplens_imon=-5.44483E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26193E1
iondef3_imon=1.52885E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26707E1
iondef2_imon=1.55408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98299E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=9.52792E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.77002E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49423E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04375E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11364E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73094E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.0253E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.65706E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.57435E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-7.52649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-4.31896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93766E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.96463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.40264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64686E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.94413E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62468E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66098E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.35011E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-1.99923E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22366E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28969E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.99E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80029E1	-8.82149E-4	-8.80007E1	5.00679E-4	4.8399E-3	9.51052E-2	2.73116E1	-3.26933E1	-3.26449E1	2.68099E1	1.20278E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
2.0E0	1.05064E5	9.0E1	3.16E2	1.6E2	-7.286E-2	-8.80026E1	-1.04904E-3	-8.80006E1	-1.66893E-4	4.45843E-3	9.54151E-2	2.73228E1	-3.26878E1	-3.26309E1	2.68774E1	1.19841E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00097E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80027E1	-1.14441E-3	-8.80006E1	5.72205E-4	4.55379E-3	9.52482E-2	2.73139E1	-3.26673E1	-3.26095E1	2.68221E1	1.20045E-7	2.51611E-3	2.51611E-3	6.3245E-3	2.9863E-1
4.0E0	2.3318E4	1.0E1	6.55E2	3.98E2	-7.27053E-2	-8.80028E1	-1.09673E-3	-8.80007E1	4.29153E-4	4.41074E-3	9.54151E-2	2.7298E1	-3.26661E1	-3.26219E1	2.68395E1	1.1969E-7	2.50972E-3	2.50972E-3	6.32328E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80029E1	-1.23978E-3	-8.80007E1	2.38419E-4	4.673E-3	9.51529E-2	2.73273E1	-3.26597E1	-3.26194E1	2.68575E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80029E1	-8.82149E-4	-8.80007E1	1.19209E-4	4.91142E-3	9.50336E-2	2.73434E1	-3.26679E1	-3.25912E1	2.6825E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.8003E1	-8.10623E-4	-8.80007E1	7.62939E-4	4.64916E-3	9.50336E-2	2.73315E1	-3.26633E1	-3.26392E1	2.68358E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80026E1	-7.39098E-4	-8.80006E1	1.19209E-4	4.64916E-3	9.52482E-2	2.73263E1	-3.2682E1	-3.2616E1	2.68424E1	1.19705E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80027E1	-9.05991E-4	-8.80006E1	3.8147E-4	4.79221E-3	9.50098E-2	2.73357E1	-3.26567E1	-3.26278E1	2.68366E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80028E1	-9.29832E-4	-8.80005E1	2.38419E-4	4.43459E-3	9.50336E-2	2.72827E1	-3.2629E1	-3.26248E1	2.68178E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.98222E-1
1.4E1	3.397E3	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80028E1	-8.10623E-4	-8.80007E1	1.19209E-4	4.48227E-3	9.52244E-2	2.73473E1	-3.26744E1	-3.26389E1	2.68575E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.99E-1
1.5E1	1.11E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80027E1	-9.53674E-4	-8.80008E1	6.19888E-4	4.33922E-3	9.49621E-2	2.73139E1	-3.26461E1	-3.2636E1	2.6813E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
1.6E1	4.56E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80029E1	-7.86781E-4	-8.80007E1	2.86102E-4	4.55379E-3	9.51767E-2	2.73321E1	-3.26759E1	-3.2623E1	2.68605E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
1.7E1	9.37E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80026E1	-8.10623E-4	-8.80009E1	-9.53674E-5	4.52995E-3	9.5129E-2	2.7334E1	-3.26579E1	-3.26213E1	2.67968E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00453E-1
1.8E1	3.846E3	1.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80028E1	-5.96046E-4	-8.80006E1	4.76837E-4	4.43459E-3	9.49621E-2	2.73219E1	-3.26506E1	-3.26164E1	2.68499E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9926E-1
1.9E1	2.206E3	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80029E1	-5.24521E-4	-8.80009E1	4.05312E-4	4.60148E-3	9.50813E-2	2.73222E1	-3.26791E1	-3.26071E1	2.68502E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.97901E-1
2.0E1	2.6003E4	1.5E1	8.08E2	5.58E2	-7.201E-2	-8.80031E1	-8.34465E-4	-8.80007E1	2.38419E-4	4.74453E-3	9.52959E-2	2.73186E1	-3.26474E1	-3.26536E1	2.68142E1	1.20069E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9874E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80026E1	-7.86781E-4	-8.80005E1	4.29153E-4	4.79221E-3	9.52005E-2	2.73285E1	-3.26807E1	-3.26056E1	2.6846E1	1.20383E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9978E-1
2.2E1	1.834E3	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80026E1	-8.34465E-4	-8.80005E1	4.76837E-4	4.98295E-3	9.50813E-2	2.73558E1	-3.26738E1	-3.2606E1	2.68478E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00563E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80027E1	-7.62939E-4	-8.80006E1	4.76837E-4	4.86374E-3	9.47952E-2	2.73094E1	-3.26707E1	-3.26193E1	2.67926E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1