[Scan]
initial_time=2016-01-18T21:00:12
final_time=2016-01-18T21:00:32
ip_count=19
run=1024
dataset=7
scan=543
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.82222E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.06542E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.3703E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.1788E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.5924E-8
mult1=-1.96618E-8
mult2=-2.66272E-9
rf_tmon=-6.21877E-3
rf_agc=3.14169E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.57959E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.29904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19482E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53965E1
cs_ef1b_imon=2.80322E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.55707E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95455E0
lens1_imon=1.43188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65095E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.48356E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.29627E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.26355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.37868E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=1.19581E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.95711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.99869E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.56108E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98041E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=9.22811E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30755E0
ionrepsh_imon=1.76211E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.16454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48865E0
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.41193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.27309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7352E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.0216E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.64146E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.5653E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.4241E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.78701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.39579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41898E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64661E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.95513E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.57978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.59582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22373E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.43675E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.068E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.8003E1	-7.62939E-4	-8.80008E1	2.38419E-4	4.48227E-3	9.46999E-2	2.73231E1	-3.26843E1	-3.26266E1	2.6849E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00453E-1
2.0E0	1.05964E5	1.03E2	3.16E2	1.6E2	-7.286E-2	-8.80031E1	-4.76837E-4	-8.80007E1	4.76837E-5	4.62532E-3	9.50336E-2	2.73262E1	-3.26846E1	-3.26152E1	2.68001E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01609E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80033E1	-7.86781E-4	-8.80008E1	4.29153E-4	4.673E-3	9.52721E-2	2.73614E1	-3.26529E1	-3.26064E1	2.68719E1	1.20325E-7	2.5199E-3	2.5199E-3	6.31779E-3	2.98522E-1
4.0E0	2.2947E4	1.0E1	6.55E2	3.98E2	-7.23964E-2	-8.8003E1	-8.82149E-4	-8.80008E1	4.29153E-4	4.45843E-3	9.51529E-2	2.7325E1	-3.26822E1	-3.26371E1	2.6864E1	1.20045E-7	2.51838E-3	2.51838E-3	6.30171E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80028E1	-8.34465E-4	-8.80004E1	5.24521E-4	4.48227E-3	9.50575E-2	2.73249E1	-3.26597E1	-3.2641E1	2.68593E1	1.19909E-7	2.51845E-3	2.51845E-3	6.32047E-3	2.98504E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80032E1	-8.58307E-4	-8.80006E1	4.05312E-4	4.43459E-3	9.52244E-2	2.73092E1	-3.26679E1	-3.26089E1	2.68238E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.8003E1	-7.86781E-4	-8.80006E1	8.58307E-4	3.8147E-3	9.53674E-2	2.73033E1	-3.26529E1	-3.25856E1	2.68659E1	1.19953E-7	2.52492E-3	2.52492E-3	6.28592E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80029E1	-5.48363E-4	-8.80009E1	4.05312E-4	4.3869E-3	9.49144E-2	2.73098E1	-3.26272E1	-3.26437E1	2.68004E1	1.19978E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.03618E-1
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80028E1	-7.86781E-4	-8.80007E1	0.0E0	4.48227E-3	9.48668E-2	2.73305E1	-3.26396E1	-3.2606E1	2.68268E1	1.20158E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00966E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80027E1	-9.05991E-4	-8.8001E1	2.38419E-4	4.57764E-3	9.48906E-2	2.72937E1	-3.26645E1	-3.26741E1	2.67642E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99175E-1
1.4E1	3.365E3	4.0E0	5.66E2	3.82E2	-7.286E-2	-8.80027E1	-4.29153E-4	-8.80009E1	1.90735E-4	4.93526E-3	9.49621E-2	2.73153E1	-3.26831E1	-3.26218E1	2.68508E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80028E1	-5.24521E-4	-8.80007E1	-1.19209E-4	4.64916E-3	9.46999E-2	2.73299E1	-3.26514E1	-3.26726E1	2.6834E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.97963E-1
1.6E1	4.65E2	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80029E1	-9.29832E-4	-8.80008E1	1.90735E-4	4.673E-3	9.52005E-2	2.73291E1	-3.26747E1	-3.26128E1	2.68671E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9892E-1
1.7E1	9.59E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80032E1	-4.76837E-4	-8.80008E1	-4.76837E-5	4.91142E-3	9.4986E-2	2.73183E1	-3.26416E1	-3.26158E1	2.68046E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.8E1	3.98E3	2.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80031E1	-5.24521E-4	-8.80006E1	1.19209E-4	4.60148E-3	9.48906E-2	2.73448E1	-3.26597E1	-3.26068E1	2.68352E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
1.9E1	2.131E3	1.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80027E1	-9.05991E-4	-8.80007E1	3.57628E-4	4.22001E-3	9.49144E-2	2.73435E1	-3.26573E1	-3.26212E1	2.68478E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
2.0E1	2.6089E4	1.3E1	8.08E2	5.58E2	-7.43285E-2	-8.80029E1	-7.15256E-4	-8.80006E1	3.33786E-4	4.55379E-3	9.51529E-2	2.73233E1	-3.26778E1	-3.26004E1	2.68215E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80029E1	-1.0252E-3	-8.80004E1	5.24521E-4	4.31538E-3	9.5129E-2	2.73227E1	-3.26528E1	-3.263E1	2.68306E1	1.20092E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.01609E-1
2.2E1	1.833E3	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80027E1	-7.86781E-4	-8.80005E1	3.8147E-4	4.50611E-3	9.48191E-2	2.73575E1	-3.26996E1	-3.25973E1	2.68456E1	1.20276E-7	2.52405E-3	2.52405E-3	6.3074E-3	2.98768E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80027E1	-7.15256E-4	-8.80004E1	2.86102E-4	4.86374E-3	9.48429E-2	2.7352E1	-3.26717E1	-3.26128E1	2.6831E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00942E-1